JP3109161U - ポンプ装置 - Google Patents

ポンプ装置 Download PDF

Info

Publication number
JP3109161U
JP3109161U JP2004007099U JP2004007099U JP3109161U JP 3109161 U JP3109161 U JP 3109161U JP 2004007099 U JP2004007099 U JP 2004007099U JP 2004007099 U JP2004007099 U JP 2004007099U JP 3109161 U JP3109161 U JP 3109161U
Authority
JP
Japan
Prior art keywords
pump device
pump
flow resistance
fluid
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004007099U
Other languages
English (en)
Japanese (ja)
Inventor
ケイ マシュー
ハットン ニコラス
ジョン アンダーウッド フレデリック
ノース フィリップ
Original Assignee
ザ ビーオーシー グループ ピーエルシー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ザ ビーオーシー グループ ピーエルシー filed Critical ザ ビーオーシー グループ ピーエルシー
Application granted granted Critical
Publication of JP3109161U publication Critical patent/JP3109161U/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F01C21/108—Stators; Members defining the outer boundaries of the working chamber with an axial surface, e.g. side plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0003—Sealing arrangements in rotary-piston machines or pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2004007099U 2003-12-03 2004-12-02 ポンプ装置 Expired - Lifetime JP3109161U (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0327964A GB2408801A (en) 2003-12-03 2003-12-03 Detection of seal leak using differential pressure measurement

Publications (1)

Publication Number Publication Date
JP3109161U true JP3109161U (ja) 2005-05-12

Family

ID=29764459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004007099U Expired - Lifetime JP3109161U (ja) 2003-12-03 2004-12-02 ポンプ装置

Country Status (7)

Country Link
US (1) US20050123414A1 (fr)
JP (1) JP3109161U (fr)
CN (1) CN2844879Y (fr)
DE (1) DE202004018733U1 (fr)
FR (1) FR2863322B3 (fr)
GB (1) GB2408801A (fr)
TW (1) TWM278782U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015513633A (ja) * 2012-03-02 2015-05-14 ドーヴァー パンプ ソリューションズ グループ（ヨーロ 密閉機構、密閉機構を有する搬送装置、および密閉機構を操作する方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
GB2442738B (en) * 2006-10-09 2011-08-03 Boc Group Plc A sealing system
GB0712779D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Seal
DE102008021971A1 (de) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Reinigen von Vakuumpumpen
CN103517763A (zh) * 2011-03-15 2014-01-15 卡柯洛塑料技术有限公司 表面处理
US8997553B2 (en) * 2011-04-14 2015-04-07 Cincinnati Test Systems, Inc. Leak testing device and method
CN102606465B (zh) * 2012-03-06 2015-01-07 昆山佳铭自动化科技有限公司 电子真空泵综合性能检测装置
CN102865219B (zh) * 2012-10-09 2014-11-12 浙江宇宙智能设备有限公司 一种直驱式高压泵动密封内泄在线监测方法
DE102013208614A1 (de) * 2013-05-10 2014-11-13 Pfeiffer Vacuum Gmbh Vorrichtung mit mindestens einem Kanal zum Führen eines gasförmigen oder flüssigen Betriebsmittels
CN103422899B (zh) * 2013-08-09 2015-06-03 华南理工大学 小型天然气管网压力能发电的工艺及装置
EP2871363B1 (fr) 2013-11-06 2020-10-07 Maag Pump Systems AG Pompe à engrenages avec un ensemble d'étanchéité
JP6418838B2 (ja) 2014-07-31 2018-11-07 エドワーズ株式会社 ドライポンプ及び排ガス処理方法
FR3107575B1 (fr) * 2020-02-20 2022-03-25 Pfeiffer Vacuum Tech Ag Pompe à vide sèche
CN114593059A (zh) * 2020-12-07 2022-06-07 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的定子部件

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3818752A (en) * 1971-04-28 1974-06-25 N Lindeberg Method and apparatus for testing tightness
GB2143596B (en) * 1983-07-19 1986-07-02 Telspec Ltd Improvements in and relating to the sealing of electrical cable joints equipment housings or the like
FR2638788B1 (fr) * 1988-11-07 1994-01-28 Alcatel Cit Pompe a vide du type roots multietage
FR2666440B1 (fr) * 1990-08-28 1992-12-11 Framatome Sa Procede de controle de la mise en place d'un element transportable et de l'etancheite de la liaison avec une structure fixe et utilisation de ce procede.
CA2161000C (fr) * 1993-05-06 2004-12-21 Kenneth John Davey Dispositif de surveillance pour surveilles les anomalies imminentes dans l'integrite de composante ou d'une stucture
GB9403184D0 (en) * 1994-02-18 1994-04-06 Boc Group Plc Methods and apparatus for leak testing
EP0786655B1 (fr) * 1997-05-07 2002-07-24 Martin Lehmann Procédé d'essai d'étanchéité d'un récipient fermé, chambre d'essai, dispositif de test et système d'inspection pour celui-ci
US6092370A (en) * 1997-09-16 2000-07-25 Flow International Corporation Apparatus and method for diagnosing the status of specific components in high-pressure fluid pumps
JPH11230352A (ja) * 1998-02-10 1999-08-27 Nec Corp 密閉容器及びその試験方法
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
US6301319B1 (en) * 1998-09-30 2001-10-09 Westinghouse Electric Company Llc Method of sealing a reactor pressure vessel
AUPQ726600A0 (en) * 2000-05-03 2000-05-25 Structural Monitoring Systems Ltd System and method for continuous monitoring of the structural integrity of a component or structure
AUPQ823500A0 (en) * 2000-06-19 2000-07-13 Structural Monitoring Systems Ltd Apparatus for condition monitoring the integrity of fasteners and fastened joints
AUPR001800A0 (en) * 2000-09-08 2000-10-05 Structural Monitoring Systems Ltd Method and apparatus for monitoring the integrity of structures
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
US7241115B2 (en) * 2002-03-01 2007-07-10 Waters Investments Limited Methods and apparatus for determining the presence or absence of a fluid leak
US6817228B2 (en) * 2002-04-01 2004-11-16 Schlumberger Technology Corporation Method and apparatus for detecting seal failure
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015513633A (ja) * 2012-03-02 2015-05-14 ドーヴァー パンプ ソリューションズ グループ（ヨーロ 密閉機構、密閉機構を有する搬送装置、および密閉機構を操作する方法

Also Published As

Publication number Publication date
TWM278782U (en) 2005-10-21
CN2844879Y (zh) 2006-12-06
FR2863322A3 (fr) 2005-06-10
GB2408801A (en) 2005-06-08
FR2863322B3 (fr) 2005-12-02
DE202004018733U1 (de) 2005-04-14
GB0327964D0 (en) 2004-01-07
US20050123414A1 (en) 2005-06-09

Similar Documents

Publication Publication Date Title
JP3109161U (ja) ポンプ装置
US4919599A (en) Pumping system for a leak detecting device
JP6851198B2 (ja) 真空システムのパイプカップリング
JP4598044B2 (ja) 流量検定故障診断装置、流量検定故障診断方法及び流量検定故障診断プログラム
US20060168844A1 (en) Vacuum processing apparatus and vacuum processing method
JP2009527712A (ja) シール
US20160209294A1 (en) Tightness Test During the Evacuation of a Film Chamber
JP4637092B2 (ja) シール組立体の改良
KR200377480Y1 (ko) 펌핑 장치
JP4278569B2 (ja) 圧力測定器
CN113113332A (zh) 半导体工艺腔漏的侦测方法
US11391402B2 (en) Flexible pipe and manufacturing method thereof
JP2849255B2 (ja) 高性能半導体製造用の排気システムおよびその制御方法
JP2002328111A (ja) ガスセンサの気密検査装置及び検査方法
JPH01148319A (ja) 循環濾過システムのモニタ装置
JP4199229B2 (ja) 流体機械の漏れ検査方法、当該方法に用いられる装置、及び当該方法を介して製造された流体機械
CN217276753U (zh) 阀类气密性检测装置
JPS61175285A (ja) 真空ポンプの監視装置
KR20230167117A (ko) 가스 분석기의 부품들을 위한 밀봉 시스템
KR20060121306A (ko) 배관 연결 부재 및 이를 포함하는 반도체 기판 가공 장치
JP2018054458A (ja) 漏れ素子の評価装置及び評価方法
KR20030006544A (ko) 반도체 가스 공급 시스템
CN114018493A (zh) 检漏方法
SU1183852A1 (ru) Способ испытани двухслойных трубопроводов на герметичность
DE102005017418A1 (de) Turbomolekularpumpe

Legal Events

Date Code Title Description
R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080316

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R323113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080316

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080316

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080316

Year of fee payment: 3

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R323113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080316

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090316

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100316

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100316

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110316

Year of fee payment: 6

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110316

Year of fee payment: 6