GB2408801A - Detection of seal leak using differential pressure measurement - Google Patents

Detection of seal leak using differential pressure measurement Download PDF

Info

Publication number
GB2408801A
GB2408801A GB0327964A GB0327964A GB2408801A GB 2408801 A GB2408801 A GB 2408801A GB 0327964 A GB0327964 A GB 0327964A GB 0327964 A GB0327964 A GB 0327964A GB 2408801 A GB2408801 A GB 2408801A
Authority
GB
United Kingdom
Prior art keywords
fluid
limiting means
flow
detection apparatus
leak detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0327964A
Other languages
English (en)
Other versions
GB0327964D0 (en
Inventor
Matthew Key
Nicholas Daniel Hutton
Frederick John Underwood
Phillip North
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0327964A priority Critical patent/GB2408801A/en
Publication of GB0327964D0 publication Critical patent/GB0327964D0/en
Priority to FR0412552A priority patent/FR2863322B3/fr
Priority to JP2004007099U priority patent/JP3109161U/ja
Priority to DE202004018733U priority patent/DE202004018733U1/de
Priority to CNU2004201174498U priority patent/CN2844879Y/zh
Priority to TW093219592U priority patent/TWM278782U/zh
Priority to US11/004,259 priority patent/US20050123414A1/en
Publication of GB2408801A publication Critical patent/GB2408801A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F01C21/108—Stators; Members defining the outer boundaries of the working chamber with an axial surface, e.g. side plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0003—Sealing arrangements in rotary-piston machines or pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
GB0327964A 2003-12-03 2003-12-03 Detection of seal leak using differential pressure measurement Withdrawn GB2408801A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB0327964A GB2408801A (en) 2003-12-03 2003-12-03 Detection of seal leak using differential pressure measurement
FR0412552A FR2863322B3 (fr) 2003-12-03 2004-11-26 Dispositif de pompage comportant des moyens de controle de l'etat des joints d'etancheite du volume aspire
JP2004007099U JP3109161U (ja) 2003-12-03 2004-12-02 ポンプ装置
DE202004018733U DE202004018733U1 (de) 2003-12-03 2004-12-03 Pumpe
CNU2004201174498U CN2844879Y (zh) 2003-12-03 2004-12-03 泵送设备
TW093219592U TWM278782U (en) 2003-12-03 2004-12-03 Pumping apparatus
US11/004,259 US20050123414A1 (en) 2003-12-03 2004-12-03 Pumping apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0327964A GB2408801A (en) 2003-12-03 2003-12-03 Detection of seal leak using differential pressure measurement

Publications (2)

Publication Number Publication Date
GB0327964D0 GB0327964D0 (en) 2004-01-07
GB2408801A true GB2408801A (en) 2005-06-08

Family

ID=29764459

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0327964A Withdrawn GB2408801A (en) 2003-12-03 2003-12-03 Detection of seal leak using differential pressure measurement

Country Status (7)

Country Link
US (1) US20050123414A1 (fr)
JP (1) JP3109161U (fr)
CN (1) CN2844879Y (fr)
DE (1) DE202004018733U1 (fr)
FR (1) FR2863322B3 (fr)
GB (1) GB2408801A (fr)
TW (1) TWM278782U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2442738A (en) * 2006-10-09 2008-04-16 Boc Group Plc Barrier fluid channel protecting seal in vacuum pump.

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
GB0712779D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Seal
DE102008021971A1 (de) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Reinigen von Vakuumpumpen
CA2830015A1 (fr) * 2011-03-15 2012-09-20 Carclo Technical Plastics Limited Regulation de l'ecoulement d'un fluide dans un capillaire
WO2012142402A1 (fr) * 2011-04-14 2012-10-18 Cincinnati Test Systems, Inc. Procédé et dispositif pour tester une fuite
EP2820247B1 (fr) * 2012-03-02 2021-02-17 Maag Pump Systems AG Système d'étanchéité, dispositif de transport pourvu d'un système d'étanchéité ainsi que procédé permettant de faire fonctionner ledit système d'étanchéité
CN102606465B (zh) * 2012-03-06 2015-01-07 昆山佳铭自动化科技有限公司 电子真空泵综合性能检测装置
CN102865219B (zh) * 2012-10-09 2014-11-12 浙江宇宙智能设备有限公司 一种直驱式高压泵动密封内泄在线监测方法
DE102013208614A1 (de) * 2013-05-10 2014-11-13 Pfeiffer Vacuum Gmbh Vorrichtung mit mindestens einem Kanal zum Führen eines gasförmigen oder flüssigen Betriebsmittels
CN103422899B (zh) * 2013-08-09 2015-06-03 华南理工大学 小型天然气管网压力能发电的工艺及装置
EP2871363B1 (fr) 2013-11-06 2020-10-07 Maag Pump Systems AG Pompe à engrenages avec un ensemble d'étanchéité
JP6418838B2 (ja) 2014-07-31 2018-11-07 エドワーズ株式会社 ドライポンプ及び排ガス処理方法
FR3107575B1 (fr) * 2020-02-20 2022-03-25 Pfeiffer Vacuum Technology AG Pompe à vide sèche
CN114593059A (zh) * 2020-12-07 2022-06-07 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的定子部件

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3818752A (en) * 1971-04-28 1974-06-25 N Lindeberg Method and apparatus for testing tightness
GB2143596A (en) * 1983-07-19 1985-02-13 Telspec Ltd Improvements in and relating to the sealing of electrical cable joints equipment housings or the like
EP0700510A1 (fr) * 1993-05-06 1996-03-13 Tulip Bay Pty. Ltd. Appareil de controle
WO2001098746A1 (fr) * 2000-06-19 2001-12-27 Structural Monitoring Systems Ltd Appareil de controle de l'integrite d'attaches et d'assemblages rivetes
EP1303743A1 (fr) * 2000-05-03 2003-04-23 Structural Monitoring Systems Ltd Systeme et procede de detection et de mesure de propagation des defauts dans un composant ou dans une structure
EP1337824A1 (fr) * 2000-09-08 2003-08-27 Structural Monitoring Systems Ltd Procede et appareil permettant de controler l'integrite de constituants et de structures

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2638788B1 (fr) * 1988-11-07 1994-01-28 Alcatel Cit Pompe a vide du type roots multietage
FR2666440B1 (fr) * 1990-08-28 1992-12-11 Framatome Sa Procede de controle de la mise en place d'un element transportable et de l'etancheite de la liaison avec une structure fixe et utilisation de ce procede.
GB9403184D0 (en) * 1994-02-18 1994-04-06 Boc Group Plc Methods and apparatus for leak testing
EP0786655B1 (fr) * 1997-05-07 2002-07-24 Martin Lehmann Procédé d'essai d'étanchéité d'un récipient fermé, chambre d'essai, dispositif de test et système d'inspection pour celui-ci
US6092370A (en) * 1997-09-16 2000-07-25 Flow International Corporation Apparatus and method for diagnosing the status of specific components in high-pressure fluid pumps
JPH11230352A (ja) * 1998-02-10 1999-08-27 Nec Corp 密閉容器及びその試験方法
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
US6301319B1 (en) * 1998-09-30 2001-10-09 Westinghouse Electric Company Llc Method of sealing a reactor pressure vessel
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
US7241115B2 (en) * 2002-03-01 2007-07-10 Waters Investments Limited Methods and apparatus for determining the presence or absence of a fluid leak
US6817228B2 (en) * 2002-04-01 2004-11-16 Schlumberger Technology Corporation Method and apparatus for detecting seal failure
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3818752A (en) * 1971-04-28 1974-06-25 N Lindeberg Method and apparatus for testing tightness
GB2143596A (en) * 1983-07-19 1985-02-13 Telspec Ltd Improvements in and relating to the sealing of electrical cable joints equipment housings or the like
EP0700510A1 (fr) * 1993-05-06 1996-03-13 Tulip Bay Pty. Ltd. Appareil de controle
EP1303743A1 (fr) * 2000-05-03 2003-04-23 Structural Monitoring Systems Ltd Systeme et procede de detection et de mesure de propagation des defauts dans un composant ou dans une structure
WO2001098746A1 (fr) * 2000-06-19 2001-12-27 Structural Monitoring Systems Ltd Appareil de controle de l'integrite d'attaches et d'assemblages rivetes
EP1337824A1 (fr) * 2000-09-08 2003-08-27 Structural Monitoring Systems Ltd Procede et appareil permettant de controler l'integrite de constituants et de structures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2442738A (en) * 2006-10-09 2008-04-16 Boc Group Plc Barrier fluid channel protecting seal in vacuum pump.
GB2442738B (en) * 2006-10-09 2011-08-03 Boc Group Plc A sealing system

Also Published As

Publication number Publication date
US20050123414A1 (en) 2005-06-09
JP3109161U (ja) 2005-05-12
DE202004018733U1 (de) 2005-04-14
FR2863322B3 (fr) 2005-12-02
GB0327964D0 (en) 2004-01-07
TWM278782U (en) 2005-10-21
FR2863322A3 (fr) 2005-06-10
CN2844879Y (zh) 2006-12-06

Similar Documents

Publication Publication Date Title
GB2408801A (en) Detection of seal leak using differential pressure measurement
JP3979091B2 (ja) ターボ形流体機械及びそれに用いられるドライガスシール
US7853416B2 (en) Flow rate verification failure diagnosis apparatus, flow rate verification failure diagnosis system, flow rate verification failure diagnosis method, and control program product for flow rate verification failure diagnosis
US5869766A (en) Non-contaminating pressure transducer module
USRE38300E1 (en) Non-fluid conducting pressure module having non-contaminating body and isolation member
CN100510653C (zh) 流量传感器
US6802689B2 (en) Turbo type fluid machine and dry gas seal for use therefor
CN102539082A (zh) 用氢作示踪气体的检漏装置和方法
JP3585489B2 (ja) 乾式圧縮真空ポンプを運転する方法並びに該方法に適した真空ポンプ
USRE38557E1 (en) Non-contaminating pressure transducer module
TWI701428B (zh) 測漏裝置及測漏方法
US20230152179A1 (en) Fault detection system for vacuum pump
KR200377480Y1 (ko) 펌핑 장치
CN112577679A (zh) 压力感测装置的隔离腔的密封性监控
CN113113332A (zh) 半导体工艺腔漏的侦测方法
JP4506122B2 (ja) 塗布液供給装置
KR20070019101A (ko) 공정 챔버의 압력 측정 장치
KR20030006544A (ko) 반도체 가스 공급 시스템
CN217276753U (zh) 阀类气密性检测装置
CN218039105U (zh) 包括感知气体泄漏的传感器部的基板处理系统
WO2022219028A1 (fr) Pompe à vide et procédé permettant de surveiller une pompe à vide
JPH0448943B2 (fr)
JPH0436271B2 (fr)
JP2003332246A (ja) センサー保護機構
KR19980067767A (ko) 반도체 제조설비의 반응가스공급장치

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)