JP3067325B2 - クリーンルーム用気密ストッカー - Google Patents

クリーンルーム用気密ストッカー

Info

Publication number
JP3067325B2
JP3067325B2 JP3269781A JP26978191A JP3067325B2 JP 3067325 B2 JP3067325 B2 JP 3067325B2 JP 3269781 A JP3269781 A JP 3269781A JP 26978191 A JP26978191 A JP 26978191A JP 3067325 B2 JP3067325 B2 JP 3067325B2
Authority
JP
Japan
Prior art keywords
stocker
casing
cassette
opening
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3269781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05105206A (ja
Inventor
哲平 山下
正直 村田
幹 田中
日也 森田
等 河野
敦 奥野
正徳 津田
満弘 林
Original Assignee
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼電機株式会社 filed Critical 神鋼電機株式会社
Priority to JP3269781A priority Critical patent/JP3067325B2/ja
Priority to TW081100062A priority patent/TW217439B/zh
Priority to US07/826,954 priority patent/US5303482A/en
Priority to DE69228014T priority patent/DE69228014T2/de
Priority to EP92101358A priority patent/EP0497281B1/en
Publication of JPH05105206A publication Critical patent/JPH05105206A/ja
Application granted granted Critical
Publication of JP3067325B2 publication Critical patent/JP3067325B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP3269781A 1991-01-29 1991-10-17 クリーンルーム用気密ストッカー Expired - Fee Related JP3067325B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP3269781A JP3067325B2 (ja) 1991-10-17 1991-10-17 クリーンルーム用気密ストッカー
TW081100062A TW217439B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-17 1992-01-07
US07/826,954 US5303482A (en) 1991-01-29 1992-01-28 Wafer airtight keeping unit and keeping facility thereof
DE69228014T DE69228014T2 (de) 1991-01-29 1992-01-28 Einheit zum luftdichten Aufbewahren von Halbleiterscheiben
EP92101358A EP0497281B1 (en) 1991-01-29 1992-01-28 Wafer airtight keeping unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3269781A JP3067325B2 (ja) 1991-10-17 1991-10-17 クリーンルーム用気密ストッカー

Publications (2)

Publication Number Publication Date
JPH05105206A JPH05105206A (ja) 1993-04-27
JP3067325B2 true JP3067325B2 (ja) 2000-07-17

Family

ID=17477072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3269781A Expired - Fee Related JP3067325B2 (ja) 1991-01-29 1991-10-17 クリーンルーム用気密ストッカー

Country Status (2)

Country Link
JP (1) JP3067325B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW217439B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
JP2817605B2 (ja) * 1993-12-22 1998-10-30 村田機械株式会社 クリーンルーム用自動倉庫
WO1999013495A2 (en) * 1997-09-12 1999-03-18 Novus Corporation Sealed cabinet for storage of semiconductor wafers
TWI813430B (zh) * 2017-08-09 2023-08-21 荷蘭商Ａｓｍ智慧財產控股公司 用於儲存基板用之卡匣的儲存設備及備有其之處理設備
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
CN111316417B (zh) 2017-11-27 2023-12-22 阿斯莫Ip控股公司 与批式炉偕同使用的用于储存晶圆匣的储存装置
US12009241B2 (en) * 2019-10-14 2024-06-11 Asm Ip Holding B.V. Vertical batch furnace assembly with detector to detect cassette

Also Published As

Publication number Publication date
JPH05105206A (ja) 1993-04-27
TW217439B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-11

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