TW217439B - - Google Patents

Info

Publication number
TW217439B
TW217439B TW081100062A TW81100062A TW217439B TW 217439 B TW217439 B TW 217439B TW 081100062 A TW081100062 A TW 081100062A TW 81100062 A TW81100062 A TW 81100062A TW 217439 B TW217439 B TW 217439B
Authority
TW
Taiwan
Application number
TW081100062A
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Application granted granted Critical
Publication of TW217439B publication Critical patent/TW217439B/zh

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
TW081100062A 1991-10-17 1992-01-07 TW217439B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3269781A JP3067325B2 (ja) 1991-10-17 1991-10-17 クリーンルーム用気密ストッカー

Publications (1)

Publication Number Publication Date
TW217439B true TW217439B (zh) 1993-12-11

Family

ID=17477072

Family Applications (1)

Application Number Title Priority Date Filing Date
TW081100062A TW217439B (zh) 1991-10-17 1992-01-07

Country Status (2)

Country Link
JP (1) JP3067325B2 (zh)
TW (1) TW217439B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
JP2817605B2 (ja) * 1993-12-22 1998-10-30 村田機械株式会社 クリーンルーム用自動倉庫
WO1999013495A2 (en) * 1997-09-12 1999-03-18 Novus Corporation Sealed cabinet for storage of semiconductor wafers
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
TWI813430B (zh) * 2017-08-09 2023-08-21 荷蘭商Ａｓｍ智慧財產控股公司 用於儲存基板用之卡匣的儲存設備及備有其之處理設備
KR102597978B1 (ko) 2017-11-27 2023-11-06 에이에스엠 아이피 홀딩 비.브이. 배치 퍼니스와 함께 사용하기 위한 웨이퍼 카세트를 보관하기 위한 보관 장치

Also Published As

Publication number Publication date
JP3067325B2 (ja) 2000-07-17
JPH05105206A (ja) 1993-04-27

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