JP3049464B2 - ダイシング装置 - Google Patents

ダイシング装置

Info

Publication number
JP3049464B2
JP3049464B2 JP32120293A JP32120293A JP3049464B2 JP 3049464 B2 JP3049464 B2 JP 3049464B2 JP 32120293 A JP32120293 A JP 32120293A JP 32120293 A JP32120293 A JP 32120293A JP 3049464 B2 JP3049464 B2 JP 3049464B2
Authority
JP
Japan
Prior art keywords
blade
cutting
contact
semiconductor wafer
shielding plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP32120293A
Other languages
English (en)
Japanese (ja)
Other versions
JPH07153722A (ja
Inventor
昌也 諸岡
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP32120293A priority Critical patent/JP3049464B2/ja
Priority to US08/341,514 priority patent/US5628673A/en
Priority to GB9423891A priority patent/GB2284280B/en
Priority to KR1019940031395A priority patent/KR950015717A/ko
Priority to TW83111399A priority patent/TW255978B/zh
Publication of JPH07153722A publication Critical patent/JPH07153722A/ja
Application granted granted Critical
Publication of JP3049464B2 publication Critical patent/JP3049464B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP32120293A 1993-11-26 1993-11-26 ダイシング装置 Expired - Fee Related JP3049464B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP32120293A JP3049464B2 (ja) 1993-11-26 1993-11-26 ダイシング装置
US08/341,514 US5628673A (en) 1993-11-26 1994-11-17 Dicing machine with non-contact setup function
GB9423891A GB2284280B (en) 1993-11-26 1994-11-25 Dicing machine with non-contact setup function
KR1019940031395A KR950015717A (ko) 1993-11-26 1994-11-26 비-접촉 셋업기능을 가진 다이싱머신
TW83111399A TW255978B (Sortimente) 1993-11-26 1994-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32120293A JP3049464B2 (ja) 1993-11-26 1993-11-26 ダイシング装置

Publications (2)

Publication Number Publication Date
JPH07153722A JPH07153722A (ja) 1995-06-16
JP3049464B2 true JP3049464B2 (ja) 2000-06-05

Family

ID=18129939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32120293A Expired - Fee Related JP3049464B2 (ja) 1993-11-26 1993-11-26 ダイシング装置

Country Status (2)

Country Link
JP (1) JP3049464B2 (Sortimente)
TW (1) TW255978B (Sortimente)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6178709B2 (ja) * 2013-11-26 2017-08-09 株式会社ディスコ 切削装置及びセットアップ方法
JP6444717B2 (ja) * 2014-12-12 2018-12-26 Ｔｏｗａ株式会社 切断装置及び切断方法
JP6235453B2 (ja) * 2014-12-24 2017-11-22 Ｔｏｗａ株式会社 切断装置及び切断方法
JP7080564B2 (ja) * 2018-08-13 2022-06-06 株式会社ディスコ 切削装置及びノズルの高さ検査方法
CN113547240A (zh) * 2021-07-26 2021-10-26 安徽联合智能装备有限责任公司 一种床身稳定双层激光切割机
CN114193643A (zh) * 2021-12-27 2022-03-18 烟台力凯数控科技有限公司 开方机用切割装置和晶棒切割方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629867A (ja) * 1985-07-08 1987-01-17 Amada Co Ltd 研削装置
JPH064220B2 (ja) * 1986-10-07 1994-01-19 株式会社新潟鐵工所 数値制御研削盤における自動砥石寸法測定方法
JPH0767669B2 (ja) * 1988-10-20 1995-07-26 株式会社新潟鐵工所 数値制御研削盤における自動砥石寸法測定装置
JPH0572356U (ja) * 1992-03-12 1993-10-05 株式会社テクニスコ 光センサーによるセットアップ機構

Also Published As

Publication number Publication date
TW255978B (Sortimente) 1995-09-01
JPH07153722A (ja) 1995-06-16

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