JP2738990B2 - パルスレーザ装置 - Google Patents

パルスレーザ装置

Info

Publication number
JP2738990B2
JP2738990B2 JP3121006A JP12100691A JP2738990B2 JP 2738990 B2 JP2738990 B2 JP 2738990B2 JP 3121006 A JP3121006 A JP 3121006A JP 12100691 A JP12100691 A JP 12100691A JP 2738990 B2 JP2738990 B2 JP 2738990B2
Authority
JP
Japan
Prior art keywords
main discharge
discharge electrodes
peaking
saturable reactor
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3121006A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04348574A (ja
Inventor
元 中谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3121006A priority Critical patent/JP2738990B2/ja
Priority to TW081104061A priority patent/TW209324B/zh
Priority to CA002069368A priority patent/CA2069368C/en
Priority to US07/888,614 priority patent/US5267253A/en
Priority to EP92304801A priority patent/EP0516397B1/en
Priority to KR1019920009054A priority patent/KR960005579B1/ko
Priority to DE69202301T priority patent/DE69202301T2/de
Publication of JPH04348574A publication Critical patent/JPH04348574A/ja
Application granted granted Critical
Publication of JP2738990B2 publication Critical patent/JP2738990B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Generation Of Surge Voltage And Current (AREA)
JP3121006A 1991-05-27 1991-05-27 パルスレーザ装置 Expired - Fee Related JP2738990B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP3121006A JP2738990B2 (ja) 1991-05-27 1991-05-27 パルスレーザ装置
CA002069368A CA2069368C (en) 1991-05-27 1992-05-25 Pulsed laser
TW081104061A TW209324B (enExample) 1991-05-27 1992-05-25
EP92304801A EP0516397B1 (en) 1991-05-27 1992-05-27 Pulsed laser
US07/888,614 US5267253A (en) 1991-05-27 1992-05-27 Pulsed laser
KR1019920009054A KR960005579B1 (ko) 1991-05-27 1992-05-27 펄스레이저장치
DE69202301T DE69202301T2 (de) 1991-05-27 1992-05-27 Gepulster Laser.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3121006A JP2738990B2 (ja) 1991-05-27 1991-05-27 パルスレーザ装置

Publications (2)

Publication Number Publication Date
JPH04348574A JPH04348574A (ja) 1992-12-03
JP2738990B2 true JP2738990B2 (ja) 1998-04-08

Family

ID=14800459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3121006A Expired - Fee Related JP2738990B2 (ja) 1991-05-27 1991-05-27 パルスレーザ装置

Country Status (7)

Country Link
US (1) US5267253A (enExample)
EP (1) EP0516397B1 (enExample)
JP (1) JP2738990B2 (enExample)
KR (1) KR960005579B1 (enExample)
CA (1) CA2069368C (enExample)
DE (1) DE69202301T2 (enExample)
TW (1) TW209324B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2701606B1 (fr) * 1993-02-10 1995-04-14 Sat Laser impulsionnel à gaz, à impulsion de durée allongée.
GB9318359D0 (en) * 1993-09-04 1993-10-20 Secr Defence Pulsed gas lasers
US5822343A (en) * 1994-08-26 1998-10-13 Psc Inc. Operating and control system for lasers useful in bar code scanners
US5612529A (en) * 1994-10-31 1997-03-18 Psc Inc. System for bar code reading and scanning with automatic gain control
US5834750A (en) * 1995-02-28 1998-11-10 Psc, Inc. Bar code scanning system for automatically maintaining constant the amplitude of light reflected from a bar code
US5914974A (en) * 1997-02-21 1999-06-22 Cymer, Inc. Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules
DE19845586B4 (de) * 1997-10-03 2008-04-03 Komatsu Ltd. Entladungsschaltung für einen Impulslaser mit einer Impulsleistungsquelle
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
JP3775469B2 (ja) * 2000-03-15 2006-05-17 ウシオ電機株式会社 ArFエキシマレーザ装置、KrFエキシマレーザ装置及びフッ素レーザ装置
US6834066B2 (en) * 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6763049B1 (en) * 2000-06-15 2004-07-13 Lambda Emi Very high repetition rate power supply system and method
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
DE10042292B4 (de) * 2000-08-29 2004-08-12 Tuilaser Ag Verfahren zum Betreiben eines Excimer-Laser
EP1447064B1 (en) * 2003-02-12 2010-06-02 Coherent GmbH Kit-of-parts for surgically ablating eye tissue
JP5133837B2 (ja) * 2008-10-03 2013-01-30 ギガフォトン株式会社 パルスレーザ用電源装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622682A (ja) * 1985-06-28 1987-01-08 Nec Corp パルスガスレ−ザ装置
US4722091A (en) * 1986-02-24 1988-01-26 Rca Corporation Hybrid laser power supply
JPS6313387A (ja) * 1986-07-03 1988-01-20 Nec Corp パルスガスレ−ザ装置
JPS63136679A (ja) * 1986-11-28 1988-06-08 Toshiba Corp ガスレ−ザ発振装置
JPH03504429A (ja) * 1988-04-20 1991-09-26 シーメンス アクチェンゲゼルシヤフト 特にteガスレーザー用の高出力の高電圧パルス発生装置および方法
US4975921A (en) * 1989-03-29 1990-12-04 Lasertechnics, Inc. Integrated prepulse circuits for efficient excitation of gas lasers

Also Published As

Publication number Publication date
KR920022604A (ko) 1992-12-19
EP0516397A1 (en) 1992-12-02
DE69202301D1 (de) 1995-06-08
KR960005579B1 (ko) 1996-04-26
CA2069368A1 (en) 1992-11-28
CA2069368C (en) 1996-03-05
DE69202301T2 (de) 1996-02-08
US5267253A (en) 1993-11-30
EP0516397B1 (en) 1995-05-03
JPH04348574A (ja) 1992-12-03
TW209324B (enExample) 1993-07-11

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