DE69202301T2 - Gepulster Laser. - Google Patents

Gepulster Laser.

Info

Publication number
DE69202301T2
DE69202301T2 DE69202301T DE69202301T DE69202301T2 DE 69202301 T2 DE69202301 T2 DE 69202301T2 DE 69202301 T DE69202301 T DE 69202301T DE 69202301 T DE69202301 T DE 69202301T DE 69202301 T2 DE69202301 T2 DE 69202301T2
Authority
DE
Germany
Prior art keywords
pulsed laser
discharge
laser according
main discharge
choke coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69202301T
Other languages
German (de)
English (en)
Other versions
DE69202301D1 (de
Inventor
Hajime Nakatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE69202301D1 publication Critical patent/DE69202301D1/de
Application granted granted Critical
Publication of DE69202301T2 publication Critical patent/DE69202301T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Generation Of Surge Voltage And Current (AREA)
DE69202301T 1991-05-27 1992-05-27 Gepulster Laser. Expired - Fee Related DE69202301T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3121006A JP2738990B2 (ja) 1991-05-27 1991-05-27 パルスレーザ装置

Publications (2)

Publication Number Publication Date
DE69202301D1 DE69202301D1 (de) 1995-06-08
DE69202301T2 true DE69202301T2 (de) 1996-02-08

Family

ID=14800459

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69202301T Expired - Fee Related DE69202301T2 (de) 1991-05-27 1992-05-27 Gepulster Laser.

Country Status (7)

Country Link
US (1) US5267253A (enExample)
EP (1) EP0516397B1 (enExample)
JP (1) JP2738990B2 (enExample)
KR (1) KR960005579B1 (enExample)
CA (1) CA2069368C (enExample)
DE (1) DE69202301T2 (enExample)
TW (1) TW209324B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19845586B4 (de) * 1997-10-03 2008-04-03 Komatsu Ltd. Entladungsschaltung für einen Impulslaser mit einer Impulsleistungsquelle

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2701606B1 (fr) * 1993-02-10 1995-04-14 Sat Laser impulsionnel à gaz, à impulsion de durée allongée.
GB9318359D0 (en) * 1993-09-04 1993-10-20 Secr Defence Pulsed gas lasers
US5822343A (en) * 1994-08-26 1998-10-13 Psc Inc. Operating and control system for lasers useful in bar code scanners
US5612529A (en) * 1994-10-31 1997-03-18 Psc Inc. System for bar code reading and scanning with automatic gain control
US5834750A (en) * 1995-02-28 1998-11-10 Psc, Inc. Bar code scanning system for automatically maintaining constant the amplitude of light reflected from a bar code
US5914974A (en) * 1997-02-21 1999-06-22 Cymer, Inc. Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
JP3775469B2 (ja) * 2000-03-15 2006-05-17 ウシオ電機株式会社 ArFエキシマレーザ装置、KrFエキシマレーザ装置及びフッ素レーザ装置
US6834066B2 (en) * 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6763049B1 (en) 2000-06-15 2004-07-13 Lambda Emi Very high repetition rate power supply system and method
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
DE10042292B4 (de) * 2000-08-29 2004-08-12 Tuilaser Ag Verfahren zum Betreiben eines Excimer-Laser
DE602004027429D1 (de) * 2003-02-12 2010-07-15 Coherent Gmbh Elementensatz zur chirurgischen Ablation von Augengewebe
JP5133837B2 (ja) * 2008-10-03 2013-01-30 ギガフォトン株式会社 パルスレーザ用電源装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622682A (ja) * 1985-06-28 1987-01-08 Nec Corp パルスガスレ−ザ装置
US4722091A (en) * 1986-02-24 1988-01-26 Rca Corporation Hybrid laser power supply
JPS6313387A (ja) * 1986-07-03 1988-01-20 Nec Corp パルスガスレ−ザ装置
JPS63136679A (ja) * 1986-11-28 1988-06-08 Toshiba Corp ガスレ−ザ発振装置
EP0411022A1 (de) * 1988-04-20 1991-02-06 Siemens Aktiengesellschaft Vorrichtung und verfahren zur erzeugung von hochspannungsimpulsen hoher leistung, insbesondere für te-gaslaser
US4975921A (en) * 1989-03-29 1990-12-04 Lasertechnics, Inc. Integrated prepulse circuits for efficient excitation of gas lasers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19845586B4 (de) * 1997-10-03 2008-04-03 Komatsu Ltd. Entladungsschaltung für einen Impulslaser mit einer Impulsleistungsquelle

Also Published As

Publication number Publication date
EP0516397B1 (en) 1995-05-03
TW209324B (enExample) 1993-07-11
CA2069368A1 (en) 1992-11-28
KR960005579B1 (ko) 1996-04-26
DE69202301D1 (de) 1995-06-08
US5267253A (en) 1993-11-30
KR920022604A (ko) 1992-12-19
JPH04348574A (ja) 1992-12-03
JP2738990B2 (ja) 1998-04-08
EP0516397A1 (en) 1992-12-02
CA2069368C (en) 1996-03-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee