JP2681113B2 - 縦型酸化装置 - Google Patents

縦型酸化装置

Info

Publication number
JP2681113B2
JP2681113B2 JP63211773A JP21177388A JP2681113B2 JP 2681113 B2 JP2681113 B2 JP 2681113B2 JP 63211773 A JP63211773 A JP 63211773A JP 21177388 A JP21177388 A JP 21177388A JP 2681113 B2 JP2681113 B2 JP 2681113B2
Authority
JP
Japan
Prior art keywords
gas
combustion chamber
process tube
hydrogen gas
steam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63211773A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01252809A (ja
Inventor
中尾　　賢
禎男 坂本
貞男 丸地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of JPH01252809A publication Critical patent/JPH01252809A/ja
Application granted granted Critical
Publication of JP2681113B2 publication Critical patent/JP2681113B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/34—Indirect CO2mitigation, i.e. by acting on non CO2directly related matters of the process, e.g. pre-heating or heat recovery

Landscapes

  • Gas Burners (AREA)
  • Formation Of Insulating Films (AREA)
JP63211773A 1987-09-01 1988-08-26 縦型酸化装置 Expired - Lifetime JP2681113B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP13333987 1987-09-01
JP62-133339 1987-12-17
JP62-319916 1987-12-17
JP31991687 1987-12-17

Publications (2)

Publication Number Publication Date
JPH01252809A JPH01252809A (ja) 1989-10-09
JP2681113B2 true JP2681113B2 (ja) 1997-11-26

Family

ID=26467719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63211773A Expired - Lifetime JP2681113B2 (ja) 1987-09-01 1988-08-26 縦型酸化装置

Country Status (2)

Country Link
JP (1) JP2681113B2 (ko)
KR (1) KR970007113B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3522506B2 (ja) * 1997-09-01 2004-04-26 東京瓦斯株式会社 酸素燃焼バーナと該バーナを持つ燃焼炉
CN109441665B (zh) * 2018-12-26 2024-05-28 同济大学 高压气态氢氧喷气式发动机装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210613A (ja) * 1982-06-02 1983-12-07 Hitachi Ltd 熱処理炉用石英管
JPS59182294A (ja) * 1983-03-31 1984-10-17 Fujitsu Ltd 化学気相成長装置
JPS6116531A (ja) * 1984-07-03 1986-01-24 Matsushita Electronics Corp 半導体装置の製造方法
JPS61268025A (ja) * 1985-05-23 1986-11-27 Oki Electric Ind Co Ltd ウエハ−の熱処理装置
JPS6245128A (ja) * 1985-08-23 1987-02-27 Toshiba Corp 外部燃焼装置
JPS63131124U (ko) * 1987-02-18 1988-08-26

Also Published As

Publication number Publication date
JPH01252809A (ja) 1989-10-09
KR890005822A (ko) 1989-05-17
KR970007113B1 (ko) 1997-05-02

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