JPS63131124U - - Google Patents
Info
- Publication number
- JPS63131124U JPS63131124U JP2254287U JP2254287U JPS63131124U JP S63131124 U JPS63131124 U JP S63131124U JP 2254287 U JP2254287 U JP 2254287U JP 2254287 U JP2254287 U JP 2254287U JP S63131124 U JPS63131124 U JP S63131124U
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- combustion
- gas conduit
- vertical semiconductor
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002485 combustion reaction Methods 0.000 claims description 15
- 239000012495 reaction gas Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2254287U JPS63131124U (ko) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2254287U JPS63131124U (ko) | 1987-02-18 | 1987-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131124U true JPS63131124U (ko) | 1988-08-26 |
Family
ID=30820026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2254287U Pending JPS63131124U (ko) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131124U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01252809A (ja) * | 1987-09-01 | 1989-10-09 | Tel Sagami Ltd | 縦型酸化装置 |
-
1987
- 1987-02-18 JP JP2254287U patent/JPS63131124U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01252809A (ja) * | 1987-09-01 | 1989-10-09 | Tel Sagami Ltd | 縦型酸化装置 |