JPS61179735U - - Google Patents
Info
- Publication number
- JPS61179735U JPS61179735U JP6345785U JP6345785U JPS61179735U JP S61179735 U JPS61179735 U JP S61179735U JP 6345785 U JP6345785 U JP 6345785U JP 6345785 U JP6345785 U JP 6345785U JP S61179735 U JPS61179735 U JP S61179735U
- Authority
- JP
- Japan
- Prior art keywords
- gas passage
- reaction
- tube
- heat treatment
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims 4
- 239000000376 reactant Substances 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6345785U JPS61179735U (ko) | 1985-04-27 | 1985-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6345785U JPS61179735U (ko) | 1985-04-27 | 1985-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61179735U true JPS61179735U (ko) | 1986-11-10 |
Family
ID=30593620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6345785U Pending JPS61179735U (ko) | 1985-04-27 | 1985-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61179735U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285328A (ja) * | 1990-03-31 | 1991-12-16 | Tokyo Electron Sagami Ltd | 縦型熱処理装置 |
-
1985
- 1985-04-27 JP JP6345785U patent/JPS61179735U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285328A (ja) * | 1990-03-31 | 1991-12-16 | Tokyo Electron Sagami Ltd | 縦型熱処理装置 |
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