JP2636776B2 - ワイヤーボンディング方法 - Google Patents

ワイヤーボンディング方法

Info

Publication number
JP2636776B2
JP2636776B2 JP7021459A JP2145995A JP2636776B2 JP 2636776 B2 JP2636776 B2 JP 2636776B2 JP 7021459 A JP7021459 A JP 7021459A JP 2145995 A JP2145995 A JP 2145995A JP 2636776 B2 JP2636776 B2 JP 2636776B2
Authority
JP
Japan
Prior art keywords
wire
electrode
lead
connection point
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP7021459A
Other languages
English (en)
Other versions
JPH08222595A (ja
Inventor
賢治 大谷内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7021459A priority Critical patent/JP2636776B2/ja
Priority to US08/597,163 priority patent/US5647527A/en
Priority to KR1019960002971A priority patent/KR100205728B1/ko
Publication of JPH08222595A publication Critical patent/JPH08222595A/ja
Application granted granted Critical
Publication of JP2636776B2 publication Critical patent/JP2636776B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85986—Specific sequence of steps, e.g. repetition of manufacturing steps, time sequence
    • H—ELECTRICITY
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    • H01L2224/92—Specific sequence of method steps
    • H01L2224/921—Connecting a surface with connectors of different types
    • H01L2224/9212—Sequential connecting processes
    • H01L2224/92142—Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92147—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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Description

【発明の詳細な説明】
【０００１】
【産業上の利用分野】本発明は、半導体素子の各電極を
対応するリードピンにワイヤでボンディングするワイヤ
ボンディング方法に関し、特にワイヤのボンディングの
順序の改良に関する。
【０００２】
【従来の技術】半導体素子の電極は通常素子周辺に沿っ
て設けられているが、半導体素子の中には、図２に示す
ような、素子１の中央部に一列に電極２を配置したもの
がある。このような素子はダイナミック型半導体メモリ
にみられる。
【０００３】半導体素子の各電極は対応するリードピン
にワイヤで接続されるが、図２のように素子１の中央部
に一列に電極２が配置されたものでは、素子１上に接着
テープ９によりリードピン３が取り付られ、ワイヤ４に
より接続される。
【０００４】ワイヤ４と対応する電極２およびリード３
との接続は、まず、図３（ａ）のように、ワイヤ４の先
端に、電気放電等の方法により、金属小球５を形成す
る。次に図３（ｂ）のようにキャピラリー６により、金
属小球５を電極２に押圧して接合し、その後図３（ｃ）
のようにキャピラリー６を引き上げる。次に図３（ｄ）
のように、キャピラリー６を接合すべきリードと反対方
向に水平に移動し、ワイヤ４に屈曲部７を設ける。この
屈曲部７を設ける作業は接合後のワイヤ４の形状を均一
化するのに重要であり、特に半導体素子１からのワイヤ
４の最高部位の高さを常に一定に保つのに重要である。
【０００５】ワイヤ４に屈曲部７を設けた後、図３
（ｅ）のように、ワイヤ４をくり出しながらキャピラリ
６を接合すべきリード３の方向へ、円の軌跡を描きなが
ら移動させる。そして、キャピラリ６が図３（ｆ）のよ
うにリード３上に移動した時点でワイヤ４をキャピラリ
６でリード３に押圧してワイヤ４とリード３を接合す
る。
【０００６】以上が一つの電極４と対応するリード３と
の間のワイヤ４による電気的接合を得るための手順であ
るが、半導体素子１は、複数の電極４及び複数のリード
３を有している。図２の例では、所渭ノンコネクト電極
を除いて２６箇所の接合が必要である。
【０００７】かかる２６箇所の接合順序は、一般に、図
４（ａ）〜（ｆ）に示すように電極２が配置された列の
端の電極２から接合を始め、電極が配置された順番に接
合していくという方法がとられていた。
【０００８】
【発明が解決しようとする課題】図３を用いて説明した
ように、ボンディング後のワイヤ４の形状を安定させる
ため、半導体素子１上の電極２とワイヤ４先端の金属小
球５と接合した後、キャピラリ６を電極４の真上に上
げ、そして、ワイヤ４を接合すべきリードと反対方向に
素子１の表面と水平に移動してワイヤ４に屈曲部７を設
けることが要求されている。ところが、図４（ｄ）に示
すように、例えば電極２−１３に対するワイヤ４−１３
のボンディングを行うとき、キャピラリの移動方向に電
極２−１２にすでにボンディングされているワイヤ４−
１２が存在するため、キャピラリ６が移動すると、かか
るワイヤ４−１２にキャピラリが接触してこのワイヤ４
−１２を変形又は切断してしまうという不具合いがあっ
た。この不具合の解消のためには、電極２及びリード３
の配置が制限されることになり、半導体素子及びリード
の設計が困難になる。さらに、キャピラリの移動する領
域を確保するために、余分な領域が必要となり、半導体
素子１そのものが大きくなってしまうという不具合いも
あった。
【０００９】したがって、本発明の目的は、他のワイヤ
やリードを変形或いは切断することなく各電極と対応す
るリードとの間のワイヤによるボンディングを可能とし
たワイヤボンディング方法を提供することにある。
【００１０】
【課題を解決するための手段】本発明のワイヤボンディ
ング方法は、正方形あるいは長方形の半導体素子の相対
する辺の中央近傍同志を結ぶ直線上に、概略一列に配列
された電極と、前記電極の周辺に配置されたリードとを
ワイヤにて結線するワイヤボンディング方法において、
そのボンディング順序が、前記半導体上の電極と前記リ
ードを半導体素子に垂直な方向から見た平面図上でリー
ド上の結線点と、前記リードに対応する結線点を結ぶ線
分が、他のリード上の結線点と、各々に対応する電極上
の結線点を結ぶ線分をリードから電極に向かって延長し
た半直線と交差する時、前記リード上の結線点と電極上
の結線点を結ぶ線分に対応するワイヤすなわち前記半直
線により分割され得る線分に対応するワイヤを、前記半
直線に含まれるリード上の結線点と電極上の結線点に対
応するワイヤより後にボンディングするワイヤボンディ
ング方法である。
【００１１】
【実施例】次に、本発明の実施例につき図面を参照して
詳細に説明する。
【００１２】図１（ａ）は本発明の一実施例によるワイ
ヤボンディング法が施された後の素子平面図である。前
述のとおり、例えば電極２０７に対するワイヤボンディ
ングを施した後に電極２０８のボンディングを行うと、
ワイヤ４０７が変形もしくは切断される可能性がある。
その理由をより詳細に解析すると以下のとおりとなる。
【００１３】すなわち、ワイヤ４０７は、図１（ｂ）の
ボンディング前の素子平面図において電極２０７上の設
計における結線点８２７と、リード３０７上の設計にお
ける結線点８３７とを結線するものである。一方、ワイ
ヤ４０８は電極２０８上の設計における結線点８２８
と、リード３０８上の設計における結線点８３８を結線
して成るワイヤである。ここで、結線点８３８と結線点
８２８とを結ぶ線分を、結線点８２８方向に延長した半
直線は、図示のように、結線点８２７と結線点８３７と
を結ぶ線分すなわちワイヤ４０７と交差する。このた
め、ワイヤ４０７を結線した後にワイヤ４０８を結線す
るとキャピラリがワイヤ４０７に接触してワイヤ４０７
が変形する。このように結線点８３８と結線点８２８と
を結ぶ線分を結線点８２８方向に延長した半直線が結線
点８２７と結線点８３７とを結ぶ線分を分割するのであ
るから、結線点８２７と結線点８３７とを結ぶ線分に対
応するワイヤ４０７を、結線点８２８と結線点８３８を
結ぶ線分に対応するワイヤ４０８の後にボンディングす
ればよいことを示している。
【００１４】同様に全てのワイヤに対して図１（ｂ）の
考察を対応する一対のワイヤ結線点同士についてくり返
し行なうと図１（ｃ）のようになる。この図から解るよ
うに、図１（ａ）に示された半導体装置におけるワイヤ
ボンディング順序は、ワイヤ４０８，ワイヤ４０７，ワ
イヤ４０６，ワイヤ４０５の順番でボンディングするグ
ループとワイヤ４０１，ワイヤ４０２，ワイヤ４０３，
ワイヤ４０４の順序でボンディングするグループの２つ
に分けられる。この時、ボンディングを最初に行なうワ
イヤは、どの半直線にも分割されないワイヤからとな
る。
【００１５】また、この２つのグループはボンディング
におけるキャピラリとワイヤの干渉の不具合いについ
て、互いに無関係なためどちらのグループを先にボンデ
ィングしてもよい。さらにグループ内でのボンディング
順序が前述のとおりであれば例えば、ワイヤ４０８，ワ
イヤ４０１，ワイヤ４０７，ワイヤ４０２，ワイヤ４０
６，ワイヤ４０３，ワイヤ４０５，ワイヤ４０４のよう
な順序でボンディングすることもできる。
【００１６】
【発明の効果】以上説明したように本発明では、ワイヤ
のボンディング順序を、半導体素子上の電極と、リード
を半導体素子に対して垂直な方向から見た平面図上で、
リード上の結線点と前記リードに対応する電極上の結線
点を結ぶ線分が、他のリード上の結線点と各々に対応す
る電極上の結線点を結ぶ線分をリードから電極に向かっ
て延長した半直線と交差する時、前記リード上の結線点
と電極上の結線点を結ぶ線分に対応するワイヤすなわち
前記半直線により分割され得る線分に対応するワイヤを
前記半直線に含まれるリード上の結線点と電極上の結線
点に対応するワイヤより後にボンディングするようにし
ている。したがってボンディング装置が、半導体素子上
の電極と、ワイヤ先端に形成した金属小球を接合した
後、ギャピラリを電極の真上に上げた後、ワイヤを接合
すべきリードと反対方向に半導体素子と水平に移動し、
ワイヤに屈曲部を設ける際に、すでにボンディングを完
了している隣接ワイヤにキャピラリが接触し前記の隣接
ワイヤを変形又は切断してしまうという不具合いが解消
されるという利点がある。
【００１７】すなわち、半導体素子設計者においては、
前記の不具合いについて全く注意することなく、半導体
素子及びリードの設計を行なうことが可能となる。例え
ば、従来の方法においては、図２の設計によるボンディ
ングは可能であるが、図５の設計によるボンディングは
不可能であり許され得ない設計となっていた。しかしな
がら本発明のワイヤボンディング方法によれば、図２及
び図５の設計によるボンディングも可能であり設計の自
由度を増すという利点がある。
【図面の簡単な説明】
【図１】（ａ）は本発明の一実施例のボンディング完了
時の上面図、（ｂ），（ｃ）は本発明の一実施例のボン
ディング順序決定方法説明図。
【図２】半導体素子電極及びリード配置設計図。
【図３】（ａ）〜（ｆ）はワイヤボンディング工程動作
説明図。
【図４】（ａ）〜（ｆ）はワイヤボンディング順序説明
図。
【図５】半導体素子電極及びリード配置設計図。
【符号の説明】
１ 半導体素子 ２，２０７，２０８ 電極 ３，３０７，３０８ リード ４，４０１，４０２，４０３，４０４，４０５，４０
６，４０７，４０８ワイヤ ５ 金属小球 ６ キャピラリ ７ 屈曲部 ８，８２７，８２８，８３７，８３８ 結線点 ９ 接着テープ

Claims (3)

    (57)【特許請求の範囲】
  1. 【請求項１】 半導体素子の中央近傍に、概略一列に配
    列された複数の電極の各々を対応するリードにワイヤに
    て結線するワイヤボンディング方法において、前記半導
    体素子上の第１の電極上のワイヤ結線点と対応するリー
    ド上のワイヤ結線点とを結ぶ線分の延長線が前記第１の
    電極に隣接する第２の電極のワイヤ結線点と対応するリ
    ード上の結線点とを結ぶ線分と交差する時、前記第１の
    電極に対するワイヤの結線を行ないその後前記第２の電
    極に対するワイヤの結線を行うことを特徴とするワイヤ
    ボンディング方法。
  2. 【請求項２】 半導体素子上に略一列に配列された第
    １，第２，第３および第４の電極を、当該第１乃至第４
    の電極の配列の右側に配置された第１および第２のリー
    ドならびに左側に配置された第３および第４のリード
    に、前記第１の電極と前記第１のリードとを、前記第２
    の電極と前記第３のリードとを、前記第３の電極と前記
    第４のリードとを、前記第４の電極と前記第２のリード
    とをそれぞれ対応させて各々ワイヤにて結線する際に、
    結線すべき電極とリードとを結ぶ線分の延長線がすでに
    結線ずみのワイヤと交差しない順番をもってそれぞれ結
    線することを特徴とするワイヤボンディング方法。
  3. 【請求項３】 前記ワイヤによる結線を、前記第１の電
    極と前記第１のリード、前記第２の電極と前記第３のリ
    ード、前記第３の電極と前記第４のリード、および前記
    第４の電極と前記第２のリードの順に行うことを特徴と
    する請求項２のワイヤボンディング方法。
JP7021459A 1995-02-09 1995-02-09 ワイヤーボンディング方法 Expired - Fee Related JP2636776B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP7021459A JP2636776B2 (ja) 1995-02-09 1995-02-09 ワイヤーボンディング方法
US08/597,163 US5647527A (en) 1995-02-09 1996-02-05 Method of determining order of wire-bonding
KR1019960002971A KR100205728B1 (ko) 1995-02-09 1996-02-08 접선순서결정방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7021459A JP2636776B2 (ja) 1995-02-09 1995-02-09 ワイヤーボンディング方法

Publications (2)

Publication Number Publication Date
JPH08222595A JPH08222595A (ja) 1996-08-30
JP2636776B2 true JP2636776B2 (ja) 1997-07-30

Family

ID=12055574

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JP3413340B2 (ja) * 1997-03-17 2003-06-03 株式会社新川 ワイヤボンディング方法
JPH1140595A (ja) * 1997-07-16 1999-02-12 Mitsubishi Electric Corp ワイヤ配線方法、このワイヤ配線方法に使用する配線分岐パッド、および、ボンディング装置、並びに、ワイヤ配線方法をコンピュータに実行させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体
WO2023158625A1 (en) * 2022-02-15 2023-08-24 Kulicke And Soffa Industries, Inc. Methods of determining a sequence for creating a plurality of wire loops in connection with a workpiece

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JPS5831733B2 (ja) * 1982-03-15 1983-07-08 株式会社日立製作所 集積回路装置
JPH05136193A (ja) * 1991-11-12 1993-06-01 Sumitomo Electric Ind Ltd 半導体デバイスのパツケージ構造
US5269452A (en) * 1992-11-12 1993-12-14 Northern Telecom Limited Method and apparatus for wirebonding

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