JP2606631B2 - マスタースライス型半導体集積回路装置 - Google Patents

マスタースライス型半導体集積回路装置

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Publication number
JP2606631B2
JP2606631B2 JP3011809A JP1180991A JP2606631B2 JP 2606631 B2 JP2606631 B2 JP 2606631B2 JP 3011809 A JP3011809 A JP 3011809A JP 1180991 A JP1180991 A JP 1180991A JP 2606631 B2 JP2606631 B2 JP 2606631B2
Authority
JP
Japan
Prior art keywords
type semiconductor
package
slice type
integrated circuit
circuit device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3011809A
Other languages
English (en)
Other versions
JPH04246851A (ja
Inventor
保美 倉島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3011809A priority Critical patent/JP2606631B2/ja
Priority to US07/828,368 priority patent/US5365406A/en
Publication of JPH04246851A publication Critical patent/JPH04246851A/ja
Application granted granted Critical
Publication of JP2606631B2 publication Critical patent/JP2606631B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/49105Connecting at different heights
    • H01L2224/49109Connecting at different heights outside the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49175Parallel arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/494Connecting portions
    • H01L2224/4943Connecting portions the connecting portions being staggered
    • H01L2224/49433Connecting portions the connecting portions being staggered outside the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/15165Monolayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)

Description

【発明の詳細な説明】
【0001】
【産業上の利用分野】本発明はマスタースライス型半導
体集積回路装置に関し、特にPGA(Pin Grid Array)
パッケージを有するマスタースライス型半導体集積回路
装置に関する。
【0002】
【従来の技術】従来のマスタースライス型半導体集積回
路装置では、PGAパッケージの全信号ピンを入出力信
号ピンとして用いるか、またはパッケージの1方の対向
する2辺にある信号ピンを入出力信号ピンとして用い、
他方の対向する2辺にある信号ピンを入力信号専用ピン
として用いる場合があった。また、従来のマスタースラ
イス型半導体集積回路装置では、第3図(a),(b)
に示すように、PGAパケージの配線を2層構造とし、
パッケージ138内の配線121,122の配線抵抗に
よる出力信号の電位降下が全信号ピンに対して均一化す
るよう、パッケージ内配線121,122の長さが長い
もの(外周のピンに接続する配線)ほど信号線の幅を太
くして、全ての信号ピンに対する配線121,122の
配線抵抗の均一化を図っていた。
【0003】
【発明が解決しようとする課題】上述した従来のマスタ
ースライス型半導体集積回路装置では、パッケージ外周
のピンに接続するパッケージ内の配線が太くなるため配
線間の相互間隔が狭くなること、および出力信号用配線
の配線長が長くなることから、配線が細くて短い内周の
ピンに接続する配線に比べて大きなクロストークノイズ
を生じる。
【0004】PGAパッケージの最内周の信号ピンも、
最外周の信号ピンも一律に出力信号に割当てられる可能
性がある従来のマスタースライス型半導体集積回路装置
では、最外周の信号ピンの多くが出力信号に割り当てら
れ、これらが同一タイミングで動作すると、非常に大き
なクロストークノイズを生じ、付加デバイスの誤動作を
招くという問題があった。
【0005】
【課題を解決するための手段】本発明のマスタースライ
ス型半導体集積回路装置は、マスタースライス型半導体
チップを搭載したPGAパッケージを有するマスタース
ライス型半導体集積回路装置において、前記PGAパッ
ケージ内に設けた配線を介してパッケージの最外周の外
部ピンと電気的に接続して前記半導体チップ上に設けた
入力セルと、前記PGAパッケージ内の配線を介してパ
ッケージの内周側の外部ピンを電気的に接続して前記半
導体ップ上に設けた入出力セルとを有する。
【0006】
【実施例】次に、本発明について図面を参照して説明す
る。
【0007】図1(a),(b)は本発明の第1の実施
例を示す平面図及び断面図である。
【0008】図1(a),(b)に示すように、4列あ
る外部ピンの外周に位置する外部ピン137は、パッケ
ージ138内のコンタクトホール111で接続された下
層の配線121及び上層の配線122を経由して半導体
チップ上に設けた入力セル101のボンディングパッド
131とボンディング線132で接続されている。一
方、内周に位置する外部ピン136は、同様にパッケー
ジ138内の配線121,122を介して入出力セル1
02のボンディングパッド131とボンディング線13
2で接続されている。外部ピン136に接続された配線
121,122は出力信号が割り当てられる可能性があ
るため、配線長が長くなるほど配線幅を太くして、配線
抵抗の均一化を図っている。一方、外部ピン137に接
続された配線121,122は入力信号専用であるた
め、信号線に電流がほとんど流れず、信号線の配線抵抗
による電位降下がほとんどないので、配線幅を入出力信
号用の配線に比べて細くすることができる。したがっ
て、これらの配線は、従来例に対して信号線間の距離を
広く取ることができ、クロストークノイズを低減するこ
とが可能である。またクロストークノイズを最も誘引す
る出力信号が、内周に位置する外部ピン136に割り当
てられるため、配線長が短く、クロストークノイズを小
さく抑えることが可能である。
【0009】図2(a),(b)は本発明の第2の実施
例を示す平面図及び断面図である。
【0010】図2(a),(b)に示すように、4列あ
る外部ピンの外周に位置する外部ピン137は、パッケ
ージ138の配線121を介して入力セル101のボン
ディングパッド131とボンディング線132で接続さ
れている。一方、内周に位置する外部ピン136は、パ
ッケージ138の配線122を介して入出力セル102
のボンディングパッド131とボンディング線132で
接続されている。
【0011】本実施例では、第1の実施例と同じくクロ
ストークノイズを最も誘引する出力信号が、内周に位置
する外部ピン136に割り当てられるため、配線長が短
く、クロストークノイズを小さく抑えることが可能であ
ると同時に、パッケージ138内の出力信号用の配線が
同一の配線層にはないため、入力信号が出力信号の動作
の影響を受けず、入力信号にノイズが生じにくいという
利点がある。
【0012】
【発明の効果】以上説明したように本発明は、PGAパ
ッケージ実装のマスタースライス型半導体集積回路装置
において、最も外周の信号ピンには入力信号のみを、最
も内周の信号ピンには出力もしくは入出力信号をわりあ
て、また入力信号専用ピンのパッケージ内信号線幅を、
出力用もしくは入出力信号用ピンの信号線に較べて細く
することで、信号線間のクロストークを減少させる効果
がある。
【図面の簡単な説明】
【図1】本発明の第1の実施例を示す平面図及び断面図
である。
【図2】本発明の第2の実施例を示す平面図及び断面図
である。
【図3】従来のマスタースライス型半導体集積回路装置
の一例を示す平面図及び断面図である。
【符号の説明】
101 入力セル 102 入出力セル 111 コンタクトホール 121,122 配線 131 ボンディングパッド 132 ボンディング線 133 半導体チップ 136,137 外部ピン 138 パッケージ

Claims (2)

    (57)【特許請求の範囲】
  1. 【請求項1】 マスタースライス型半導体チップを搭載
    したPGAパッケージを有するマスタースライス型半導
    体集積回路装置において、前記PGAパッケージ内に設
    けた配線を介してパッケージの最外周の外部ピンと電気
    的に接続して前記半導体チップ上に設けた入力セルと、
    前記PGAパッケージ内の配線を介してパッケージの内
    周側の外部ピンと電気的に接続して前記半導体チップ上
    に設けた入出力セルとを有することを特徴とするマスタ
    ースライス型半導体集積回路装置。
  2. 【請求項2】 PGAパッケージの最外周の入力セル用
    の外部ピンに接続したパッケージ内配線の幅が内周側の
    入出力セル用の外部ピンに接続したパッケージ内配線の
    幅よりも細くなっている請求項1記載のマスタースライ
    ス型半導体集積回路装置。
JP3011809A 1991-02-01 1991-02-01 マスタースライス型半導体集積回路装置 Expired - Lifetime JP2606631B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3011809A JP2606631B2 (ja) 1991-02-01 1991-02-01 マスタースライス型半導体集積回路装置
US07/828,368 US5365406A (en) 1991-02-01 1992-01-30 Master-slice type semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3011809A JP2606631B2 (ja) 1991-02-01 1991-02-01 マスタースライス型半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPH04246851A JPH04246851A (ja) 1992-09-02
JP2606631B2 true JP2606631B2 (ja) 1997-05-07

Family

ID=11788156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3011809A Expired - Lifetime JP2606631B2 (ja) 1991-02-01 1991-02-01 マスタースライス型半導体集積回路装置

Country Status (2)

Country Link
US (1) US5365406A (ja)
JP (1) JP2606631B2 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641988A (en) * 1993-12-22 1997-06-24 Vlsi Technology, Inc. Multi-layered, integrated circuit package having reduced parasitic noise characteristics
US5930119A (en) * 1998-02-26 1999-07-27 Arizona Digital, Inc. Backplane having reduced LC product
DE10014382A1 (de) * 2000-03-23 2001-10-18 Infineon Technologies Ag Leiterbahn-Schichtstruktur und Vorstufe zu dieser
US9713258B2 (en) * 2006-04-27 2017-07-18 International Business Machines Corporation Integrated circuit chip packaging
JP4364226B2 (ja) * 2006-09-21 2009-11-11 株式会社東芝 半導体集積回路

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326978A (en) * 1976-08-25 1978-03-13 Hitachi Ltd Connector
JPS57115893A (en) * 1981-01-10 1982-07-19 Nippon Electric Co Multiple wiring board
US4689441A (en) * 1985-04-05 1987-08-25 International Business Machines Corporation Routing method and pattern for reducing cross talk noise problems on printed interconnection boards
US4831497A (en) * 1986-09-11 1989-05-16 General Electric Company Reduction of cross talk in interconnecting conductors

Also Published As

Publication number Publication date
US5365406A (en) 1994-11-15
JPH04246851A (ja) 1992-09-02

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