JP2569024Y2 - ウェーハ処理装置の下側電極着脱装置 - Google Patents

ウェーハ処理装置の下側電極着脱装置

Info

Publication number
JP2569024Y2
JP2569024Y2 JP532291U JP532291U JP2569024Y2 JP 2569024 Y2 JP2569024 Y2 JP 2569024Y2 JP 532291 U JP532291 U JP 532291U JP 532291 U JP532291 U JP 532291U JP 2569024 Y2 JP2569024 Y2 JP 2569024Y2
Authority
JP
Japan
Prior art keywords
lower electrode
wafer processing
processing chamber
lift
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP532291U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0497853U (OSRAM
Inventor
敏 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP532291U priority Critical patent/JP2569024Y2/ja
Publication of JPH0497853U publication Critical patent/JPH0497853U/ja
Application granted granted Critical
Publication of JP2569024Y2 publication Critical patent/JP2569024Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP532291U 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置 Expired - Lifetime JP2569024Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP532291U JP2569024Y2 (ja) 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP532291U JP2569024Y2 (ja) 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置

Publications (2)

Publication Number Publication Date
JPH0497853U JPH0497853U (OSRAM) 1992-08-25
JP2569024Y2 true JP2569024Y2 (ja) 1998-04-22

Family

ID=31735747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP532291U Expired - Lifetime JP2569024Y2 (ja) 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置

Country Status (1)

Country Link
JP (1) JP2569024Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0497853U (OSRAM) 1992-08-25

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