JP2538492Y2 - 基板の表面処理装置 - Google Patents

基板の表面処理装置

Info

Publication number
JP2538492Y2
JP2538492Y2 JP12660788U JP12660788U JP2538492Y2 JP 2538492 Y2 JP2538492 Y2 JP 2538492Y2 JP 12660788 U JP12660788 U JP 12660788U JP 12660788 U JP12660788 U JP 12660788U JP 2538492 Y2 JP2538492 Y2 JP 2538492Y2
Authority
JP
Japan
Prior art keywords
substrate
ultrasonic
rectangular
transport
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12660788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247032U (cs
Inventor
次雄 中村
Original Assignee
大日本スクリーン製造 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリーン製造 株式会社 filed Critical 大日本スクリーン製造 株式会社
Priority to JP12660788U priority Critical patent/JP2538492Y2/ja
Publication of JPH0247032U publication Critical patent/JPH0247032U/ja
Application granted granted Critical
Publication of JP2538492Y2 publication Critical patent/JP2538492Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP12660788U 1988-09-27 1988-09-27 基板の表面処理装置 Expired - Lifetime JP2538492Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12660788U JP2538492Y2 (ja) 1988-09-27 1988-09-27 基板の表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12660788U JP2538492Y2 (ja) 1988-09-27 1988-09-27 基板の表面処理装置

Publications (2)

Publication Number Publication Date
JPH0247032U JPH0247032U (cs) 1990-03-30
JP2538492Y2 true JP2538492Y2 (ja) 1997-06-18

Family

ID=31378281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12660788U Expired - Lifetime JP2538492Y2 (ja) 1988-09-27 1988-09-27 基板の表面処理装置

Country Status (1)

Country Link
JP (1) JP2538492Y2 (cs)

Also Published As

Publication number Publication date
JPH0247032U (cs) 1990-03-30

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