JP2531052Y2 - マグネトロンスパッタ装置 - Google Patents

マグネトロンスパッタ装置

Info

Publication number
JP2531052Y2
JP2531052Y2 JP1991012303U JP1230391U JP2531052Y2 JP 2531052 Y2 JP2531052 Y2 JP 2531052Y2 JP 1991012303 U JP1991012303 U JP 1991012303U JP 1230391 U JP1230391 U JP 1230391U JP 2531052 Y2 JP2531052 Y2 JP 2531052Y2
Authority
JP
Japan
Prior art keywords
target
magnet
substrate
thin film
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1991012303U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0497849U (enExample
Inventor
義彦 栗山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP1991012303U priority Critical patent/JP2531052Y2/ja
Publication of JPH0497849U publication Critical patent/JPH0497849U/ja
Application granted granted Critical
Publication of JP2531052Y2 publication Critical patent/JP2531052Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1991012303U 1991-01-16 1991-01-16 マグネトロンスパッタ装置 Expired - Lifetime JP2531052Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991012303U JP2531052Y2 (ja) 1991-01-16 1991-01-16 マグネトロンスパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991012303U JP2531052Y2 (ja) 1991-01-16 1991-01-16 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPH0497849U JPH0497849U (enExample) 1992-08-25
JP2531052Y2 true JP2531052Y2 (ja) 1997-04-02

Family

ID=31746210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991012303U Expired - Lifetime JP2531052Y2 (ja) 1991-01-16 1991-01-16 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JP2531052Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106967A (ja) * 1983-11-16 1985-06-12 Hitachi Ltd マグネトロン式スパツタ装置
DE3527626A1 (de) * 1985-08-01 1987-02-05 Leybold Heraeus Gmbh & Co Kg Zerstaeubungskatode nach dem magnetronprinzip

Also Published As

Publication number Publication date
JPH0497849U (enExample) 1992-08-25

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