JPH0497849U - - Google Patents
Info
- Publication number
- JPH0497849U JPH0497849U JP1230391U JP1230391U JPH0497849U JP H0497849 U JPH0497849 U JP H0497849U JP 1230391 U JP1230391 U JP 1230391U JP 1230391 U JP1230391 U JP 1230391U JP H0497849 U JPH0497849 U JP H0497849U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991012303U JP2531052Y2 (ja) | 1991-01-16 | 1991-01-16 | マグネトロンスパッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991012303U JP2531052Y2 (ja) | 1991-01-16 | 1991-01-16 | マグネトロンスパッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0497849U true JPH0497849U (enExample) | 1992-08-25 |
| JP2531052Y2 JP2531052Y2 (ja) | 1997-04-02 |
Family
ID=31746210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991012303U Expired - Lifetime JP2531052Y2 (ja) | 1991-01-16 | 1991-01-16 | マグネトロンスパッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531052Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60106967A (ja) * | 1983-11-16 | 1985-06-12 | Hitachi Ltd | マグネトロン式スパツタ装置 |
| JPS6233766A (ja) * | 1985-08-01 | 1987-02-13 | ライボルト・アクチェンゲゼルシャフト | 陰極スパツタリング装置で基板を被覆するスパツタリング陰極 |
-
1991
- 1991-01-16 JP JP1991012303U patent/JP2531052Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60106967A (ja) * | 1983-11-16 | 1985-06-12 | Hitachi Ltd | マグネトロン式スパツタ装置 |
| JPS6233766A (ja) * | 1985-08-01 | 1987-02-13 | ライボルト・アクチェンゲゼルシャフト | 陰極スパツタリング装置で基板を被覆するスパツタリング陰極 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2531052Y2 (ja) | 1997-04-02 |