JP2528509Y2 - ウエハプロービング装置 - Google Patents

ウエハプロービング装置

Info

Publication number
JP2528509Y2
JP2528509Y2 JP1990095257U JP9525790U JP2528509Y2 JP 2528509 Y2 JP2528509 Y2 JP 2528509Y2 JP 1990095257 U JP1990095257 U JP 1990095257U JP 9525790 U JP9525790 U JP 9525790U JP 2528509 Y2 JP2528509 Y2 JP 2528509Y2
Authority
JP
Japan
Prior art keywords
wafer
probe
probe card
suction
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990095257U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452740U (OSRAM
Inventor
栄造 和田
信尋 川又
典雄 大谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP1990095257U priority Critical patent/JP2528509Y2/ja
Publication of JPH0452740U publication Critical patent/JPH0452740U/ja
Application granted granted Critical
Publication of JP2528509Y2 publication Critical patent/JP2528509Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990095257U 1990-09-10 1990-09-10 ウエハプロービング装置 Expired - Lifetime JP2528509Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990095257U JP2528509Y2 (ja) 1990-09-10 1990-09-10 ウエハプロービング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990095257U JP2528509Y2 (ja) 1990-09-10 1990-09-10 ウエハプロービング装置

Publications (2)

Publication Number Publication Date
JPH0452740U JPH0452740U (OSRAM) 1992-05-06
JP2528509Y2 true JP2528509Y2 (ja) 1997-03-12

Family

ID=31833851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990095257U Expired - Lifetime JP2528509Y2 (ja) 1990-09-10 1990-09-10 ウエハプロービング装置

Country Status (1)

Country Link
JP (1) JP2528509Y2 (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6278842A (ja) * 1985-10-01 1987-04-11 Oki Electric Ind Co Ltd プロ−ブカ−ドの検査方法
JPS63266847A (ja) * 1987-04-24 1988-11-02 Hitachi Ltd ウエハプロ−バ

Also Published As

Publication number Publication date
JPH0452740U (OSRAM) 1992-05-06

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