JP2521880B2 - Copper alloy for electronic and electrical equipment and its manufacturing method - Google Patents

Copper alloy for electronic and electrical equipment and its manufacturing method

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Publication number
JP2521880B2
JP2521880B2 JP5177225A JP17722593A JP2521880B2 JP 2521880 B2 JP2521880 B2 JP 2521880B2 JP 5177225 A JP5177225 A JP 5177225A JP 17722593 A JP17722593 A JP 17722593A JP 2521880 B2 JP2521880 B2 JP 2521880B2
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JP
Japan
Prior art keywords
alloy
electronic
electrical equipment
copper alloy
strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5177225A
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Japanese (ja)
Other versions
JPH06207233A (en
Inventor
真人 浅井
章二 志賀
好正 大山
重雄 篠崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
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Furukawa Electric Co Ltd
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Publication of JPH06207233A publication Critical patent/JPH06207233A/en
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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は電子電気機器、特に半導
体リード材、コネクター、スイッチ、リレーなどの接点
ばね、端子等として強度、導電性、メッキ性、半田付け
性等の実用特性に優れた銅合金とその製造法に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has excellent practical properties such as strength, conductivity, plating property, solderability, etc., for electronic and electrical equipment, particularly for semiconductor lead materials, connectors, switches, contact springs for relays, terminals, etc. The present invention relates to a copper alloy and its manufacturing method.

【0002】[0002]

【従来の技術】電子電気機器の部品や部材にはCu合金
が多用されているが、近時小型化、高密度化、高精度化
に加えて経済性が強く志向され、従来の純Cu、黄銅、
リン青銅に替ってより高性能と経済性が要求されるよう
になった。例えば黄銅に比べてはるかに機械的特性が優
れたリン青銅でも応力腐食割れ(SCC)感受性に加え
て、電子電気用途に普遍的な半田接合の信頼性の問題が
大きい。これと同種の欠陥として電気接点や接続部に貴
金属に代えてSnやSn−Pb合金(半田)メッキを用
いる場合、経時的に密着性が失なわれ、前記半田接合部
と同様に剥離現象を起す。これはCuとSnとの拡散反
応に起因する現象で100℃以下の低温でも進行するた
め、特公昭51−41222号公報や特開昭49−10
8562号公報に例示される如く厚いCuやNiのバリ
ヤー層をメッキ等により予め形成する等余分の工程を必
要とする。
2. Description of the Related Art Cu alloys are frequently used for parts and members of electronic and electrical equipment. Recently, in addition to miniaturization, high density and high precision, economic efficiency is strongly desired. brass,
In place of phosphor bronze, higher performance and economic efficiency are required. For example, even phosphor bronze, which has far superior mechanical properties to brass, has a problem of reliability of universal solder joint in addition to stress corrosion cracking (SCC) susceptibility, which is universal for electronic and electrical applications. As the same kind of defect, when Sn or Sn-Pb alloy (solder) plating is used in place of the noble metal for the electrical contact or the connecting portion, the adhesiveness is lost with time, and the peeling phenomenon occurs like the solder joint portion. cause. This is a phenomenon caused by a diffusion reaction between Cu and Sn and progresses even at a low temperature of 100 ° C. or less, and therefore, JP-B-51-41222 and JP-A-49-10.
As illustrated in Japanese Patent No. 8562, extra steps such as pre-forming a thick Cu or Ni barrier layer by plating are required.

【0003】このため一部ではCu−Fe合金、例えば
C194(2.3wt%Fe,0.12wt%Zn,
0.03wt%P,残部Cu)(以下wt%を%と略
記)やC195(1.5%Fe,0.6%Sn,0.2
%Co,0.03%P,残部Cu)等が用いられてい
る。これ等合金は多量のFe分をリン化物や金属単体状
に析出分散させたもので、精密な曲げ加工においてミク
ロクラックを起すばかりか、前記半田接合の信頼性に劣
る問題がある。
Therefore, in some cases, a Cu-Fe alloy such as C194 (2.3 wt% Fe, 0.12 wt% Zn,
0.03 wt% P, balance Cu (hereinafter wt% is abbreviated as%) and C195 (1.5% Fe, 0.6% Sn, 0.2)
% Co, 0.03% P, balance Cu), etc. are used. These alloys are those in which a large amount of Fe is deposited and dispersed in the form of a phosphide or a simple metal, and not only causes microcracks in precision bending, but also has the problem of poor reliability of the solder joint.

【0004】[0004]

【発明が解決しようとする課題】このような状況下にお
いて、機械的強度や精密加工性の優れたCu−Sn合金
について、下記の欠点欠陥の改善が強く望まれている。
Under such circumstances, there is a strong demand for improvement of the following defects and defects in Cu-Sn alloys which are excellent in mechanical strength and precision workability.

【0005】(1)高価なSnを節約して同等の強度を
発揮させること。 (2)強度と導電率は相反する関係にあるが、これをよ
り高い値で両立させること。 (3)SCCを起さないこと。 (4)半田接合やSn,Sn−Pb合金メッキの経時剥
離を起さないこと。 (5)熱間加工において割れなどの欠陥を起さない製造
上有利な組成であること。 (6)特別な設備を必要としない大気溶解鋳造で造られ
ること。
(1) To save expensive Sn and exhibit equivalent strength. (2) The strength and the electrical conductivity are in a contradictory relationship, but both should be compatible at a higher value. (3) Do not cause SCC. (4) The solder joint and the Sn, Sn-Pb alloy plating should not be peeled off with time. (5) The composition is advantageous in manufacturing and does not cause defects such as cracks in hot working. (6) Being manufactured by atmospheric melting casting that does not require special equipment.

【0006】[0006]

【課題を解決するための手段】本発明はこれに鑑み種々
検討の結果、電子電気機器、特に半導体リード材、コネ
クター、スイッチ、リレーなどの接点ばね、端子等とし
て強度、導電性、メッキ性、半田付け性等の実用特性に
優れた銅合金とその製造法を開発したものである。
As a result of various studies in view of the above, the present invention has been developed as a contact spring for electronic and electrical equipment, particularly semiconductor lead materials, connectors, switches, relays, terminals, etc. This is a copper alloy that has excellent practical properties such as solderability and a manufacturing method thereof.

【0007】本発明銅合金としては、Sn:0.05〜
2%,P:0.005〜0.1%,Mn:0.03〜
2.0%を含み、更にCr,Co,Ti,Zrの何れか
1種又は2種以上を合計0.05〜1%を含み、残部C
uからなることを特徴とするものである。
As the copper alloy of the present invention, Sn: 0.05-
2%, P: 0.005 to 0.1%, Mn: 0.03 to
2.0%, and further contains any one or more of Cr, Co, Ti, and Zr in a total amount of 0.05 to 1%, and the balance C.
It is characterized by comprising u.

【0008】また本発明製造法は、Sn:0.05〜2
%,P:0.005〜0.1%,Mn:0.03〜2.
0%を含み、更にCr,Co,Ti,Zrの何れか1種
又は2種以上を合計0.05〜1%を含み、残部Cuか
らなる合金を700〜1050℃で熱間加工してから、
少なくとも400℃まで15℃/sec以上の速度で冷
却し、しかる後30%以上の冷間加工を行なってから、
400〜650℃で熱処理を施すことを特徴とするもの
である。
Further, according to the manufacturing method of the present invention, Sn: 0.05 to 2
%, P: 0.005 to 0.1%, Mn: 0.03 to 2.
0%, and further contains any one or more of Cr, Co, Ti, and Zr 0.05 to 1% in total, and after hot working an alloy consisting of the balance Cu at 700 to 1050 ° C. ,
After cooling at least 400 ° C at a rate of 15 ° C / sec or more, and then performing cold working of 30% or more,
It is characterized in that heat treatment is performed at 400 to 650 ° C.

【0009】即ち本発明は上記組成の合金からなり、そ
のインゴットを700〜1050℃で熱間加工してか
ら、少なくとも400℃まで15℃/sec以上の速度
で冷却し、その後30%以上の冷間加工を施し、しかる
後400〜650℃で熱処理を施すことにより造られ
る。また本発明合金は上記熱処理後、更に加工して所望
サイズに仕上げてから200〜400℃の低温焼鈍を施
せば、強度を失うことなく、伸びや応力緩和抵抗を向上
することができる。そして特に半導体リード材や電気機
器類のように導電性及び耐熱性が重視されるものではS
n含有量を0.1〜2%とする。
That is, the present invention is made of an alloy having the above composition. The ingot is hot worked at 700 to 1050 ° C., cooled to at least 400 ° C. at a rate of 15 ° C./sec or more, and then cooled to 30% or more. It is produced by subjecting it to interworking and then heat treatment at 400 to 650 ° C. Further, the alloy of the present invention can be improved in elongation and stress relaxation resistance without losing strength if it is subjected to low temperature annealing at 200 to 400 ° C. after being further processed into a desired size after the above heat treatment. And, especially in the case where conductivity and heat resistance are important, such as semiconductor lead materials and electric equipment, S
The n content is 0.1 to 2%.

【0010】[0010]

【作用】本発明合金はCr,Co,Ti,Zrの析出を
併用したCu−Sn固溶体合金であり、同一Sn量の合
金に対し、強度、導電率を向上することができる。添加
元素や組成にもよるが大略Sn量の1〜2%分に相当す
るので、経済的にも有利である。上記添加元素は金属単
体、Pとの化合物、特にZrはCuZr,TiはTi
Snとして微小な析出物となり、Cu−Sn合金のSC
C感受性を大巾に改善抑制することができる。
The alloy of the present invention is a Cu-Sn solid solution alloy in which precipitation of Cr, Co, Ti, and Zr is used in combination, and strength and conductivity can be improved for alloys having the same Sn content. Although it depends on the additive element and composition, it corresponds to approximately 1 to 2% of the Sn amount, which is economically advantageous. The additive element is a simple metal, a compound with P, particularly Zr is Cu 3 Zr and Ti is Ti.
It becomes a minute precipitate as Sn, and SC of Cu-Sn alloy
The C sensitivity can be greatly improved and suppressed.

【0011】本発明ではPを0.005〜0.1%と通
常のリン青銅のP量(0.1〜0.25%)より低濃度
化し、替りにZnやMnを脱酸剤として利用したもので
ある。Pの低下は熱間加工時の割れの主因となるCu−
P、Cu−Sn−P等の低融点相の形成を防止し、Sn
メッキや半田付け性を大巾に改善する。即ち剥離したメ
ッキや半田接合部は何れも黒色を呈し、CuやSnの他
に濃縮したPが検出される。これはメッキや半田とリン
青銅との界面に形成されるCuとSnの金属間化合物
(η′相とε相)のうちリン青銅側のε相にリン青銅中
のPが拡散濃縮し、ε相が一層脆化することにより、半
田接合部の強度を低下するものである。
In the present invention, the concentration of P is reduced to 0.005 to 0.1%, which is lower than the P amount of ordinary phosphor bronze (0.1 to 0.25%), and Zn or Mn is used as a deoxidizing agent instead. It was done. The decrease in P is the main cause of cracking during hot working Cu-
It prevents the formation of a low melting point phase such as P, Cu-Sn-P, and Sn.
Greatly improves plating and solderability. That is, the peeled plating and the solder joints all show a black color, and concentrated P is detected in addition to Cu and Sn. This is because P in the phosphor bronze diffuses and concentrates in the ε phase on the phosphor bronze side among the intermetallic compounds of Cu and Sn (η ′ phase and ε phase) formed at the interface between plating or solder and phosphor bronze. By further embrittlement of the phase, the strength of the solder joint is reduced.

【0012】本発明はPを0.005〜0.1%に抑え
ることにより上記脆化現象を防止したもので、Mnの添
加は上記脆化現象を防止するばかりか、熱間加工性の向
上や機械的性質をも改善する。上記のZn、Mnの作用
のメカニズムは不明であるが、CuとSnとの拡散反応
に関与して脆化層の発生を抑止するものと推される。熱
間加工性はCu−Sn合金、特にSn3〜8%の高Sn
合金の課題であり、粒界におけるSn偏析や、上記Pの
作用に因る。Cr,Co,Ti,Zr等の添加元素も結
晶微細化して上記偏析を防止し、熱間加工性を改善する
ものである。またV,Mg,Be,Fe,Te,Sb,
Bi,Y,希土類元素についても同様の効果が見られ
た。
The present invention prevents the embrittlement phenomenon by suppressing P to 0.005 to 0.1%. The addition of Mn not only prevents the embrittlement phenomenon but also improves hot workability. It also improves mechanical properties. Although the mechanism of the action of Zn and Mn is unknown, it is presumed that the action of Zn and Mn is involved in the diffusion reaction between Cu and Sn to suppress the formation of the embrittlement layer. Hot workability is Cu-Sn alloy, especially high Sn of 3-8% Sn
This is a problem of the alloy and is caused by Sn segregation at grain boundaries and the action of P. Additive elements such as Cr, Co, Ti, and Zr are also finely crystallized to prevent the segregation and improve the hot workability. In addition, V, Mg, Be, Fe, Te, Sb,
Similar effects were observed for Bi, Y and rare earth elements.

【0013】しかしてMnの含有量を0.03〜2.0
%と限定したのは、下限未満では十分な効果が得られ
ず、上限を越えると導電率や加工性、特に曲げ成形性を
低下させるためである。またCr,Co,Ti,Zrの
何れか1種又は2種以上(以下Cr等と略記)の合計含
有量を0.05〜1%と限定したのは、0.05%未満
では上記効果を発揮し難く、1%を越えると冷間等の加
工性を阻害するためである。またP含有量を0.1%以
下と限定したのは、これを越える過剰の濃度では、上記
改善効果が実用的に発現され難いためである。即ち過剰
のPはCr等と結合し、Cr等の添加効果を減少せしめ
るばかりか、加工性を阻害する。
Therefore, the Mn content is 0.03 to 2.0.
The reason why the content is limited to% is that if it is less than the lower limit, a sufficient effect cannot be obtained, and if it exceeds the upper limit, the conductivity and workability, especially bending formability are deteriorated. Further, the total content of any one or more of Cr, Co, Ti, and Zr (hereinafter abbreviated as Cr and the like) is limited to 0.05 to 1%, because the above effect is obtained when the content is less than 0.05%. This is because it is difficult to exert the effect, and if it exceeds 1%, workability such as cold working is impaired. Further, the P content is limited to 0.1% or less because the above-mentioned improving effect is difficult to be practically exhibited at an excessive concentration exceeding this. That is, excessive P binds with Cr and the like, and not only reduces the effect of adding Cr and the like, but also hinders workability.

【0014】本発明合金は析出硬化を利用したものであ
り、700〜1050℃の高温熱間加工後、15℃/s
ec以上の速度で少なくとも400℃まで冷却するのは
上記析出物の析出を抑制するためであり、冷却速度が1
5℃/sec未満では粗大粒状析出を起し、上記の効果
が得られない。また30%以上の冷間加工を施してから
400〜650℃で熱処理するのは加工歪により均一微
細な析出を起させるためであり、加工率30%未満の加
工歪では均一微細な析出が得られない。
The alloy of the present invention utilizes precipitation hardening. After high temperature hot working at 700 to 1050 ° C., 15 ° C./s.
The reason for cooling at least 400 ° C. at a rate of ec or more is to suppress the precipitation of the above-mentioned precipitates, and the cooling rate is 1
If it is less than 5 ° C / sec, coarse granular precipitation occurs, and the above effect cannot be obtained. Further, the reason why the heat treatment is performed at 400 to 650 ° C. after performing the cold working of 30% or more is to cause uniform fine precipitation due to the working strain, and the uniform fine precipitation is obtained with the working strain of less than 30%. I can't.

【0015】[0015]

【実施例】表1に示す組成の合金を木炭被覆の黒鉛ルツ
ボにより溶解し、金型に鋳造して小型鋳塊(3kg)と
してから外削し、厚さ10mmの板とした。これを90
0℃に加熱してから厚さ1.2mmまで熱間圧延した。
上り温度は710〜750℃であり、これを直ちに水冷
した。400℃迄の冷却速度は約20℃/secであっ
た。これを酸洗してから厚さ0.6mm迄冷間圧延し、
550℃で30分間熱処理した。更にこれを0.21m
m迄圧延してから310℃で20分間低温焼鈍を行なっ
た。これ等について導電率、引張強さ、伸び、曲げ性、
半田接合強度、SCCを調べ、その結果を表2に示す。
EXAMPLE An alloy having the composition shown in Table 1 was melted in a charcoal-coated graphite crucible, cast into a mold to form a small ingot (3 kg), which was externally cut into a plate having a thickness of 10 mm. 90 this
After heating to 0 ° C., hot rolling was performed to a thickness of 1.2 mm.
The rising temperature was 710 to 750 ° C., and this was immediately water-cooled. The cooling rate up to 400 ° C was about 20 ° C / sec. After pickling this, cold-roll it to a thickness of 0.6 mm,
Heat treatment was performed at 550 ° C. for 30 minutes. This is 0.21m
After rolling to m, low temperature annealing was performed at 310 ° C. for 20 minutes. About these, conductivity, tensile strength, elongation, bendability,
The solder joint strength and SCC were examined, and the results are shown in Table 2.

【0016】曲げ性は各種先端半径(R)の押し棒と9
0°溝ダイスを用い、プレスにより折り曲げ、角部のミ
クロクラックを検査し、割れ発生のない最小Rと板厚
(t)の比で比較した。半田接合強度はリード線を半田
付け(4.5mm)した後、150℃に300時間エ
ージングしてからプル強度を測定し、半田接合の経時劣
化を比較した。SCCはJISC8306に従い、3V
ol%NHガス中で40kg/mmの定荷重をか
け、破断するまでの時間を求めた。
Bendability is 9 with push rods of various tip radii (R).
Using a 0 ° groove die, bending was performed by a press, and micro cracks at corners were inspected, and comparison was made by the ratio of the minimum radius R at which no crack was generated and the plate thickness (t). Regarding the solder joint strength, after the lead wire was soldered (4.5 mm 2 ), the pull strength was measured after aging at 150 ° C. for 300 hours, and the deterioration of the solder joint with time was compared. SCC is 3V according to JISC8306
A constant load of 40 kg / mm 2 was applied in ol% NH 3 gas, and the time until breakage was determined.

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【表2】 [Table 2]

【0019】表1及び表2から明らかなように本発明合
金No.1は何れの特性も優れており、従来のリン青銅
からなる比較合金No.4と比較して高い導電率を示す
ことが判る。特に比較合金No.4では熱間圧延時にコ
バ割れを起すばかりか、SCCをも起し、更に半田接合
強度も劣るのに、本発明合金No.1では、熱間圧延時
にコバ割れを起すことがなく、SCCも抑制され、半田
接合強度も改善されることが判る。
As is clear from Tables 1 and 2, the alloy Nos. No. 1 is excellent in all properties, and the comparative alloy No. 1 made of conventional phosphor bronze. It can be seen that, as compared with No. 4, a high conductivity is exhibited. In particular, comparative alloy No. In No. 4 alloy of the present invention, although not only cracks at the time of hot rolling but also SCC are caused at the time of hot rolling and the solder joint strength is inferior. It can be seen that in No. 1, edge cracking does not occur during hot rolling, SCC is suppressed, and solder joint strength is also improved.

【0020】また本発明合金の組成範囲から外れる比較
合金No.2〜4では、要求される特性の何れか一つ以
上が劣ることが判る。即ちMnやCr等を含まない比較
合金No.4ではSCCを起すばかりか、半田接合強度
も劣り、またMnの含有量が多い比較合金No.2では
導電率の低下が著しい。またP含有量の多い比較合金N
o.3では曲げ性が劣り、Cr等の含有量が多い比較合
金No.5では熱間圧延において割れが著しく、その後
の加工を中止した。
Comparative alloy Nos. Out of the composition range of the alloy of the present invention. In Nos. 2 to 4, it can be seen that any one or more of the required characteristics is inferior. That is, the comparative alloy No. 1 containing no Mn, Cr, etc. No. 4 not only causes SCC, but also has poor solder joint strength and has a large Mn content. In the case of No. 2, the conductivity is markedly reduced. In addition, the comparative alloy N with a high P content
o. In Comparative Alloy No. 3, the bendability was poor and the content of Cr and the like was high. In No. 5, cracking was remarkable in hot rolling, and subsequent processing was stopped.

【0021】[0021]

【発明の効果】このように本発明によれば、Cu−Sn
合金の優れた機械的強度や精密加工性を活かしつつ上記
改善点(1)〜(6)のすべてを改善したもので電子電
気機器、特に半導体リード材、コネクター、スイッチ、
リレーなどの接点ばね、端子として強度、導電性、メッ
キ性、半田付け性等の実用特性を満足することができる
等工業上顕著な効果を奏するものである。
As described above, according to the present invention, Cu-Sn
All of the above improvements (1) to (6) have been improved while making use of the alloy's excellent mechanical strength and precision workability. It is an electrical and electronic device, especially a semiconductor lead material, connector, switch,
As a contact spring and a terminal of a relay or the like, industrially significant effects can be obtained such that practical properties such as strength, conductivity, plating property, and solderability can be satisfied.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 篠崎 重雄 栃木県日光市清滝町500番地 古河電気 工業株式会社 日光電気精銅所内 (56)参考文献 特開 昭59−153853(JP,A) 特公 昭61−413(JP,B2) 特公 昭60−59979(JP,B2) ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigeo Shinozaki 500 Kiyotaki-cho, Nikko City, Tochigi Prefecture Furukawa Electric Co., Ltd. Nikko Denki Copper Works (56) References JP 59-153853 (JP, A) JP Sho 61-413 (JP, B2) Japanese Patent Sho 60-59979 (JP, B2)

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 Sn:0.05〜2wt%,P:0.0
05〜0.1wt%,Mn:0.03〜2.0wt%を
含み、更にCr,Co,Ti,Zrの何れか1種又は2
種以上を合計0.05〜1wt%を含み、残部Cuから
なる電子電気機器用銅合金。
1. Sn: 0.05 to 2 wt%, P: 0.0
05-0.1 wt%, Mn: 0.03-2.0 wt%, and any one or two of Cr, Co, Ti, and Zr.
A copper alloy for electronic and electrical equipment, containing a total of 0.05 to 1 wt% of the seeds and the balance Cu.
【請求項2】 Sn:0.05〜2wt%,P:0.0
05〜0.1wt%,Mn:0.03〜2.0wt%を
含み、更にCr,Co,Ti,Zrの何れか1種又は2
種以上を合計0.05〜1wt%を含み、残部Cuから
なる合金を700〜1050℃で熱間加工してから、少
なくとも400℃まで15℃/sec以上の速度で冷却
し、しかる後30%以上の冷間加工を行なってから、4
00〜650℃で熱処理を施すことを特徴とする電子電
気機器用銅合金の製造法。
2. Sn: 0.05 to 2 wt%, P: 0.0
05-0.1 wt%, Mn: 0.03-2.0 wt%, and any one or two of Cr, Co, Ti, and Zr.
An alloy containing 0.05 to 1 wt% in total of the seeds or more and the balance Cu is hot worked at 700 to 1050 ° C., then cooled to at least 400 ° C. at a rate of 15 ° C./sec or more, and then 30%. After performing the above cold working, 4
A method for producing a copper alloy for electronic and electrical equipment, characterized by performing heat treatment at 00 to 650 ° C.
JP5177225A 1986-04-10 1993-06-24 Copper alloy for electronic and electrical equipment and its manufacturing method Expired - Fee Related JP2521880B2 (en)

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JP8274586 1986-04-10

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JPH01219133A (en) * 1988-02-25 1989-09-01 Mitsubishi Electric Corp Copper alloy for electronic parts
KR940010455B1 (en) * 1992-09-24 1994-10-22 김영길 Copper alloy and making method thereof
JP2688116B2 (en) * 1993-07-29 1997-12-08 ロレアル Make-up composition
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DE19927137C1 (en) * 1999-06-15 2001-03-01 Wieland Werke Ag Use of a copper-tin-iron-titanium alloy
TWI291994B (en) * 2002-11-13 2008-01-01 Sumitomo Electric Industries Copper alloy conductor and the manufacturing method
US7740721B2 (en) 2003-03-17 2010-06-22 Nippon Mining & Metals Co., Ltd Copper alloy sputtering target process for producing the same and semiconductor element wiring
DK1777305T3 (en) * 2004-08-10 2011-01-03 Mitsubishi Shindo Kk Copper base alloy casting with refined crystal grains
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JPS5949293B2 (en) * 1982-06-05 1984-12-01 株式会社神戸製鋼所 Copper alloy for electrical and electronic parts and its manufacturing method
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JP2516622B2 (en) 1996-07-24
JPS6345338A (en) 1988-02-26
JPS6345337A (en) 1988-02-26
JPH06207232A (en) 1994-07-26
JPH06207233A (en) 1994-07-26
JP2521879B2 (en) 1996-08-07
JPS6345336A (en) 1988-02-26

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