JP2510127Y2 - 磁気ディスクの成膜用保持具 - Google Patents

磁気ディスクの成膜用保持具

Info

Publication number
JP2510127Y2
JP2510127Y2 JP1989112171U JP11217189U JP2510127Y2 JP 2510127 Y2 JP2510127 Y2 JP 2510127Y2 JP 1989112171 U JP1989112171 U JP 1989112171U JP 11217189 U JP11217189 U JP 11217189U JP 2510127 Y2 JP2510127 Y2 JP 2510127Y2
Authority
JP
Japan
Prior art keywords
substrate
groove
holder
disk
disk substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989112171U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352815U (cs
Inventor
一好 富田
保 波多腰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1989112171U priority Critical patent/JP2510127Y2/ja
Publication of JPH0352815U publication Critical patent/JPH0352815U/ja
Application granted granted Critical
Publication of JP2510127Y2 publication Critical patent/JP2510127Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1989112171U 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具 Expired - Lifetime JP2510127Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989112171U JP2510127Y2 (ja) 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989112171U JP2510127Y2 (ja) 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具

Publications (2)

Publication Number Publication Date
JPH0352815U JPH0352815U (cs) 1991-05-22
JP2510127Y2 true JP2510127Y2 (ja) 1996-09-11

Family

ID=31660621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989112171U Expired - Lifetime JP2510127Y2 (ja) 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具

Country Status (1)

Country Link
JP (1) JP2510127Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007213730A (ja) * 2006-02-10 2007-08-23 Tdk Corp 基板保持装置及び磁気記録媒体の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259838A (ja) * 1987-04-17 1988-10-26 Showa Denko Kk 磁性薄膜記録媒体の製造方法および製造装置
JPH0198165U (cs) * 1987-12-18 1989-06-30

Also Published As

Publication number Publication date
JPH0352815U (cs) 1991-05-22

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