JP2509053B2 - 電子素子 - Google Patents
電子素子Info
- Publication number
- JP2509053B2 JP2509053B2 JP4215780A JP21578092A JP2509053B2 JP 2509053 B2 JP2509053 B2 JP 2509053B2 JP 4215780 A JP4215780 A JP 4215780A JP 21578092 A JP21578092 A JP 21578092A JP 2509053 B2 JP2509053 B2 JP 2509053B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive
- adhesive
- conductive particles
- bonding
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/04—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation using electrically conductive adhesives
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Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
- Adhesives Or Adhesive Processes (AREA)
Description
続を行う方法に関し、特に電子素子を基板に結合し、素
子と基板との間に電気的相互接続を形成するために、導
電性接着剤を用いる方法に関する。
へ集積回路チップを結合するための各種の方法の開発が
行われてきた。このような方法の一つとして、基板上の
ボンディングパッドと集積回路チップのマッチングボン
ディングパッドとの間に異方性導電性の接着剤を用いる
方法がある。この接着剤は、通常絶縁性ポリマーからな
り、前記のチップのパッドと前記の基板のパッドとに同
時に接触し相互接続を形成する導電性粒子を含んでい
る。この導電性粒子は、横方向または水平方向にはほと
んど導電性を持たない。すなわち、この導電性粒子は基
板と素子のボンディングパッド間における垂直方向にの
み電流を流すため、この伝導は「異方性」と呼ばれてい
る。このポリマーの接着剤は、チップを基板上に取り付
けた後硬化され、その後、導電性相互接続に加えて、機
械的な接続構造を提供する。このような導電性接着剤に
よって高い素子密度とボンディングパッド密度に対応で
きるので、通常は、この導電性接着剤を使用することに
より組立コストを下げることができる。
は、特に、高密度のボンディングパッドを持ち、基板上
のボンディングパッドからの距離が極わずかなチップの
ボンディングコストを下げる上で効果がある。例えば、
一辺がわずか100ミクロンのオーダーで基板のボンデ
ィングパッドから約15ミクロン離れたボンディングパ
ッドを相互接続するのに異方性導電性接着剤を適用でき
れば、他の方法と比較して、組立コストを相当低減可能
であり、また、間隔を狭められるため、接続を通じての
インダクタンスによる損失を低減できる。しかしなが
ら、市販されている導電性粒子は、信頼できる均一な大
きさを持っていないため、直径の大きい粒子によってマ
ッチングボンディングパッド同士が引き離され、より直
径の小さい他の粒子による相互接続が妨げられてしま
う。極めて大径の粒子によって、隣接するボンディング
パッド同士が引き離され、これらの相互接続が妨げられ
る場合もある。さらに、基板表面が平面性を失うことに
より、一部の導電性粒子が接続不良となる場合もある。
これらの場合には、システム不良となり、何らかの誤動
作を生じることになる。
oshiらの米国特許4,754,657号ではこの問
題が扱われており、導電性粒子として金属被覆ポリマー
ボールを使用することによってこの問題を解決してい
る。十分に薄い金属被覆を設けることにより、大径ポリ
マーボールは圧力下で変形し、径の小さいボールと同時
に接触が生じる。本発明者は、そのような導電性相互接
続は本質的に電流の制限があり、それがこの方法におけ
る主たる問題点であることを見いだした。つまり適度に
変形できるボールに対しては前記の金属被覆は適度に薄
くなくてはならず、そのように薄い被覆は比較的高い電
流密度を伝達することができないということである。も
し、前記の導電性被覆が高い電流密度を伝達するのに十
分なほど厚いと、ボールの変形が妨げられ、従って信頼
性を確実にするためのこの方法の作用は得られないこと
がわかった。この薄い被覆はまた、固体金属粒子より誘
導性が高く、相互接続された回路が作動するスピードを
低減させる。
気伝導性と機械的結合を与える導電性接着構造、特に、
比較的高い電流密度または低いインダクタンスに対応可
能な導電性接着構造を含む電子素子を提供することであ
る。
プの複数のボンディングパッドを基板上の導電性パター
ンのマッチングボンディングパッドに結合するための導
電性接着構造の改良に関する。つまり、前記のチップを
前記の基板へ押し付け、前記の導電性接着剤を分散して
マッチングボンディングパッド間に導電性粒子の層が含
まれるようにする。本発明に従い、前記の集積回路と基
板の間には柔軟性材料層が設けられるが、これは大きい
直径を持つ硬い導電性粒子の作用を調節することがで
き、それによって他の小径導電性粒子が対向するボンデ
ィングパッドを相互接続することができるようにするも
のである。
グパッドのうちの一組が、前記導電性粒子が作られてい
る金属よりもはるかに柔らかい金属の層で被覆されてい
る。例えば、前記の粒子は主にニッケルで、前記の導電
性パッドの被覆は、鉛はんだまたはインジウムである。
このような構成により特大の導電性粒子が柔らかい金属
層にめり込み、この金属層が導電性粒子の周囲で変形
し、他のより小さな直径を持つ粒子の接触も生じるよう
になる。
ンディングパッドのうちの一組が、接触が形成される温
度で十分に粘性のある接着剤の比較的厚い層上に配列さ
れ、ボンディングパッドが特大の導電性粒子からの圧力
に応じて旋回することができるようにする。この接着剤
の柔軟性を利用することにより、ボンディングパッドは
傾くことができ、他のより小さな直径を持つ粒子とも接
触できるようになる。
着剤を用いて基板の導電性パターンへ集積回路チップを
結合するための技法が示されている。集積回路チップ1
1は複数のボンディングパッド12、13及び14を持
ち、これらは基板19のボンディングパッド15、16
及び17と機械的に結合されるものである。基板19は
プリント回路で、これに対してフリップ・チップ表面取
り付けの原理に従い、集積回路11を結合することが求
められる。結合及び相互接続は導電性接着剤20によっ
て行われるが、これは複数の導電性粒子21を含む絶縁
性接着剤22からなるものである。
であり、流動状態で基板19に塗布され、前記の集積回
路11はその上に押し付けられて図に示すように接触し
ている。下向きの圧力により前記の導電性接着剤20と
成分の導電性粒子21が横方向に分散する。この導電性
粒子21がすべて同じ直径であるなら、ボンディングパ
ッドのそれぞれのマッチングペアーは複数の前記導電性
粒子によって相互接続されることになる。その後、前記
接着剤22が加熱により硬化され、固体となり、ボンデ
ィングパッド12、13及び14をマッチングボンディ
ングパッド15、16及び17と機械的に結合する。前
記の導電性粒子は、その後前記のボンデイングパッド間
に異方性伝導を生じる。つまりこれらにより各マッチン
グボンディングパッド間には垂直方向にのみ伝導が生
じ、水平方向には伝導が生じない。少なくともボンディ
ングパッド13と14のような隣接するボンディングパ
ッド間の短絡を起こすような横方向の伝導は生じない。
このような異方性伝導を確実にする導電性粒子21の密
度と大きさ及び絶縁接着剤22の組成はこの分野で周知
である。
ッチングボンディングパッド間の距離を減少することが
前記の粒子21によって形成される導電路のインダクタ
ンスを減少することになる。さらに導体密度の増加及
び、集積回路のマイクロ化に適応するように前記のボン
ディングパッドの大きさが減少すると、粒子21の大き
さは必然的により小さくならなければならなくなる。例
えば、14ミクロンの公称直径を持つ導電性粒子は14
ミクロンのオーダーで分離されているマッチングボンデ
ィングパッド同士を相互接続するのに適当である。この
目的には、ニッケル製銀被覆の固体金属ボールが比較的
低いインダクタンスで比較的高い電流密度を伝達するこ
とができる、適当な導電性を持つことがわかっている。
問題は市販されているこの大きさの導電性ボールが図1
に図示されているような均一な直径を持たず、しばしば
導電性粒子21の大きさが大きすぎ、前記のマッチング
導電性パッドが他の粒子と接触できず、前記のボンディ
ングパッド間に平行な導電路を形成することができない
ことである。時には、このような特大粒子が硬質な集積
回路チップ11を、硬質なプリント回路板である基板1
9から大きく引き離してしまい、ボンディングパッドの
別のマッチングペアーが一つの粒子によってすら相互接
続できないことになり、致命的問題を生じる場合もあ
る。
ているが、図1の従来例と同じ機能を持つ部分は同じ番
号で表されている。この実施例においては、本発明に従
い、集積回路チップ(第一の物体)11のすべてのボン
ディングパッド(第一の導電体)12〜14は、インジ
ウムまたははんだのような柔軟性を有する金属からなる
柔軟性金属層(柔軟性材料層)23によって被覆されて
いる。これらの柔軟性金属層23は、硬質の導電性粒子
21に対して押し付けられた場合に変形可能である。従
って、例えば、柔軟性金属層23ははんだ製であり、特
大の導電性粒子21Aの外径に一致するように変形す
る。この変形により、柔軟性金属層23がそれぞれ導電
性粒子21Aよりはるかに小さな直径をもつ21Bや2
1Cのような他の導電性粒子とも接触できるようにな
る。さらに重要な事は、前記の柔軟性金属層23の変形
によって、集積回路チップ11の他のボンディングパッ
ドがプリント回路基板(第二の物体)19の対応するボ
ンディングパッド(第二の導電体)に対し十分近づけら
れ、図1に示すような導電性粒子21による接触が生じ
ることである。
着剤22として、ブチル化ユリアホルムアルデヒド樹脂
(固体)とフェノキシ樹脂(固体)とを1:3の重量比
で用いてなる接着剤を使用した。前記の導電性粒子21
としては、ニュージャージー、パーシパニーにあるポタ
ーズインダストリーズ製の銀被覆ニッケル球体を使用し
たところ、公称直径は14ミクロンであったが、実際の
直径は約8から20ミクロンの間で分布していた。集積
回路チップとしては、96個の導電性パッド12を有
し、各列24個づつ4列に配置してなるチップを使用し
た。このチップの大きさは縦横それぞれ0.35インチ
であった。ボンディングパッドは、それぞれ一辺が10
0ミクロンで、ボンディングパッド12と15の間隔は
14ミクロンであった。柔軟性金属層23は、鉛95%
と錫5%からなる融点が320℃のはんだで、30ミク
ロンの厚みを有するように形成した。このはんだを知ら
れている方法で蒸発によって塗布した。結合温度は13
0℃と150℃の間であり、その温度で前記の絶縁性接
着剤22は圧力下で流動した。前記の結合は集積回路チ
ップ11に対し下向きの力を加えることによって行われ
た。この力は各ボンディングパッド23に対し、平方イ
ンチあたり40〜50ポンドの圧力であった。前記の集
積回路チップは、最大電流定格が50ミリアンペアで、
この電流は前記の異方性相互接続を通じて安定して伝達
された。導電性粒子21として金属被覆ポリマー球を用
いた実験を行ったところ、5〜10ミリアンペアで前記
の金属被覆が焼失する傾向があることがわかった。
ここでも図1の素子と同じ機能を持つ素子は同じ参照番
号で示されている。この実施例に従い、ボンディングパ
ッド15、16及び17(及びそれらがその一部である
前記の導電パターン)は基板19から柔軟性接着剤層
(柔軟性材料層)25によって分離されている。柔軟性
接着剤層25は結合温度で十分に柔軟性を持つため、例
えば特大の導電性粒子21Dからの下向きの圧力に応じ
てボンディングパッド16が旋回することができるよう
になっている。この柔軟性のおかげで、前記のボンディ
ングパッドは、導電性粒子21Dよりもその直径がはる
かに小さい導電性粒子21E及び導電性粒子21Fとも
接触することができる。また特大の導電性粒子の存在に
もかかわらず、前記のチップ11と前記の基板19との
間には、他の電極のマッチングペアー間を適度に接触さ
せるために必要な、適当な距離が保たれ、ボンディング
パッド13と16の間に複数の接触が形成される。前記
の柔軟性接着剤層25は、好ましくは結合後に硬化する
ことのできるポリマーである。
ュポンカンパニーまたはミネソタ、ミネアポリスの3M
カンパニーから市販されているアクリル系接着剤を前記
の柔軟性接着剤層25として使用できる。この層は上に
挙げた大きさに一致する25〜35ミクロンの間の厚み
を持つ。これらの物質は重合体で通常(8〜10)×1
03ポンド/平方インチの降伏強度を持ち、(14〜1
8)×103ポンド/平方インチの圧縮強度を持つが、
この強度は装置の構造上の配置を保つという機械的な目
的には十分である。前記の結合ステップにおける下向き
の圧力はやはり40〜50ポンド/平方インチであっ
た。
導電性粒子を用いて、信頼性のある異方性接着性導電体
相互接続を行うための二つの特定の実施例を詳しく述べ
た。これらの直径の変動は前記の集積回路チップと前記
の基板の間に置かれた二つの特定の種類の柔軟性材料層
によって好都合に調節された。これらの実施例では、集
積回路と基板上の導電パターンとの効果的な機械的結合
及び比較的高い電流密度を伝達可能な相互接続が実現さ
れた。本発明においてはまた、固体金属導電粒子を結合
または硬化するために必要な比較的高い温度で使用する
ことから必然的な結果として起こる、熱的ミスマッチか
ら生じる応力を前記の柔軟性材料層によって吸収できる
こともわかった。本発明のさらにもう一つの利点は、特
大の導電性粒子が、ほんの1000〜3000オングス
トロ−ムの厚みしかない前記のチップのボンディングパ
ッドを貫いてしまうことを防ぐことができる点である。
これは、ある種の装置においては疑似短絡の原因とな
る。
は、前記の集積回路ボンディングパッド上に設ける代わ
りに、あるいはそれに加えてさらに、前記の基板ボンデ
ィングパッド15上に設けることができる。同様に、図
3の実施例において、理論的には前記の集積回路のボン
ディングパッドを接着剤上に保つこともできるが、これ
を実現するのは図3の実施例よりはるかに困難である。
集積回路チップの複数のボンディングパッドを基板上の
導電性パターンのマッチングボンディングパッドに結合
するための導電性接着構造として、比較的高い電流密度
または低いインダクタンスに対応可能な、信頼性の高い
電気伝導性と機械的結合を与える導電性接着構造を含
む、優れた電子素子を提供することができる。
を示す部分断面図である。
を示す部分断面図である。
施例を示す部分断面図である。
Claims (2)
- 【請求項1】 第一の導電体を有する第一の物体と、 第二の導電体を有する第二の物体と、 前記第一の導電体と第二の導電体の両方を所定の位置で
接着する導電性接着剤を含む、前記第一の導電体と第二
の導電体とを相互接続する手段と を備え、 前記導電性接着剤は固体金属製の硬質の導電性粒子を含
む絶縁性接着剤からなり、 さらに、前記第一の物体及び第二の物体の間に配置され
た柔軟性材料層を備え、前記柔軟性材料層が、前記第一の物体及び第二の物体の
うちの一方の物体と前記第一の導電体及び第二の導電体
のうちの一方の導電体の間に配置された柔軟性を有する
接着剤からなり、前記柔軟性を有する接着剤が、それが
接着している前記の導電体を、異なる大きさを有する異
なる導電性粒子に接触するように旋回可能とする程度の
十分な柔軟性を有する ことを特徴とする電子素子。 - 【請求項2】 前記第一の物体が集積回路であり、前記
第二の物体が硬質の基板であることを特徴とする請求項
1の素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/735,231 US5225966A (en) | 1991-07-24 | 1991-07-24 | Conductive adhesive film techniques |
US735231 | 1991-07-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0758148A JPH0758148A (ja) | 1995-03-03 |
JP2509053B2 true JP2509053B2 (ja) | 1996-06-19 |
Family
ID=24954876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4215780A Expired - Lifetime JP2509053B2 (ja) | 1991-07-24 | 1992-07-22 | 電子素子 |
Country Status (2)
Country | Link |
---|---|
US (1) | US5225966A (ja) |
JP (1) | JP2509053B2 (ja) |
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JPH0758148A (ja) | 1995-03-03 |
US5225966A (en) | 1993-07-06 |
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