JP2507518C - - Google Patents
Info
- Publication number
- JP2507518C JP2507518C JP2507518C JP 2507518 C JP2507518 C JP 2507518C JP 2507518 C JP2507518 C JP 2507518C
- Authority
- JP
- Japan
- Prior art keywords
- pump
- oil rotary
- rotary pump
- oil
- roughing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010926 purge Methods 0.000 claims description 42
- 238000011144 upstream manufacturing Methods 0.000 claims description 14
- 239000007789 gas Substances 0.000 description 49
- 238000009792 diffusion process Methods 0.000 description 14
- 238000011109 contamination Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000005086 pumping Methods 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001172 regenerating Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
Family
ID=
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