JP2507468Y2 - 横軸遠心式基板乾燥装置 - Google Patents

横軸遠心式基板乾燥装置

Info

Publication number
JP2507468Y2
JP2507468Y2 JP1990105384U JP10538490U JP2507468Y2 JP 2507468 Y2 JP2507468 Y2 JP 2507468Y2 JP 1990105384 U JP1990105384 U JP 1990105384U JP 10538490 U JP10538490 U JP 10538490U JP 2507468 Y2 JP2507468 Y2 JP 2507468Y2
Authority
JP
Japan
Prior art keywords
rotor
chamber
substrate
peripheral wall
horizontal axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990105384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448622U (ko
Inventor
賢司 杉本
浩一郎 橋本
一男 杉原
正芳 今井
久雄 西澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990105384U priority Critical patent/JP2507468Y2/ja
Publication of JPH0448622U publication Critical patent/JPH0448622U/ja
Application granted granted Critical
Publication of JP2507468Y2 publication Critical patent/JP2507468Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP1990105384U 1990-06-26 1990-10-05 横軸遠心式基板乾燥装置 Expired - Lifetime JP2507468Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990105384U JP2507468Y2 (ja) 1990-06-26 1990-10-05 横軸遠心式基板乾燥装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6824990 1990-06-26
JP2-68249 1990-06-26
JP1990105384U JP2507468Y2 (ja) 1990-06-26 1990-10-05 横軸遠心式基板乾燥装置

Publications (2)

Publication Number Publication Date
JPH0448622U JPH0448622U (ko) 1992-04-24
JP2507468Y2 true JP2507468Y2 (ja) 1996-08-14

Family

ID=31948658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990105384U Expired - Lifetime JP2507468Y2 (ja) 1990-06-26 1990-10-05 横軸遠心式基板乾燥装置

Country Status (1)

Country Link
JP (1) JP2507468Y2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2955910B2 (ja) * 1992-09-25 1999-10-04 大日本スクリーン製造株式会社 横軸回転式基板乾燥装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101190U (ja) * 1982-12-23 1984-07-07 黒谷　信子 水切乾燥装置の上蓋
JPS59185590U (ja) * 1983-05-14 1984-12-10 黒谷　巌 水切乾燥装置の上蓋
JP2663492B2 (ja) * 1988-04-04 1997-10-15 大日本スクリーン製造 株式会社 基板の回転式表面処理装置
JP2606726B2 (ja) * 1988-07-29 1997-05-07 東京エレクトロン株式会社 回転処理装置及び回転処理方法

Also Published As

Publication number Publication date
JPH0448622U (ko) 1992-04-24

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