JPS645882Y2 - - Google Patents
Info
- Publication number
- JPS645882Y2 JPS645882Y2 JP7386183U JP7386183U JPS645882Y2 JP S645882 Y2 JPS645882 Y2 JP S645882Y2 JP 7386183 U JP7386183 U JP 7386183U JP 7386183 U JP7386183 U JP 7386183U JP S645882 Y2 JPS645882 Y2 JP S645882Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- casing
- semiconductor material
- bottom plate
- peripheral wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7386183U JPS59185829U (ja) | 1983-05-18 | 1983-05-18 | 水切乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7386183U JPS59185829U (ja) | 1983-05-18 | 1983-05-18 | 水切乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59185829U JPS59185829U (ja) | 1984-12-10 |
| JPS645882Y2 true JPS645882Y2 (ko) | 1989-02-14 |
Family
ID=30203974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7386183U Granted JPS59185829U (ja) | 1983-05-18 | 1983-05-18 | 水切乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59185829U (ko) |
-
1983
- 1983-05-18 JP JP7386183U patent/JPS59185829U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59185829U (ja) | 1984-12-10 |
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