JPH0310668Y2 - - Google Patents
Info
- Publication number
- JPH0310668Y2 JPH0310668Y2 JP1983071140U JP7114083U JPH0310668Y2 JP H0310668 Y2 JPH0310668 Y2 JP H0310668Y2 JP 1983071140 U JP1983071140 U JP 1983071140U JP 7114083 U JP7114083 U JP 7114083U JP H0310668 Y2 JPH0310668 Y2 JP H0310668Y2
- Authority
- JP
- Japan
- Prior art keywords
- guide
- rotor
- top lid
- main body
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 11
- 230000000630 rising effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 description 13
- 238000001035 drying Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000009423 ventilation Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7114083U JPS59185590U (ja) | 1983-05-14 | 1983-05-14 | 水切乾燥装置の上蓋 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7114083U JPS59185590U (ja) | 1983-05-14 | 1983-05-14 | 水切乾燥装置の上蓋 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59185590U JPS59185590U (ja) | 1984-12-10 |
JPH0310668Y2 true JPH0310668Y2 (ko) | 1991-03-15 |
Family
ID=30201288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7114083U Granted JPS59185590U (ja) | 1983-05-14 | 1983-05-14 | 水切乾燥装置の上蓋 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59185590U (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2507468Y2 (ja) * | 1990-06-26 | 1996-08-14 | 大日本スクリーン製造株式会社 | 横軸遠心式基板乾燥装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918614U (ko) * | 1972-05-20 | 1974-02-16 | ||
JPS57183038A (en) * | 1981-05-07 | 1982-11-11 | Toshiba Corp | Wafer drying machine |
JPS5818927A (ja) * | 1981-07-27 | 1983-02-03 | Seiichiro Sogo | 水切乾燥装置 |
-
1983
- 1983-05-14 JP JP7114083U patent/JPS59185590U/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918614U (ko) * | 1972-05-20 | 1974-02-16 | ||
JPS57183038A (en) * | 1981-05-07 | 1982-11-11 | Toshiba Corp | Wafer drying machine |
JPS5818927A (ja) * | 1981-07-27 | 1983-02-03 | Seiichiro Sogo | 水切乾燥装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS59185590U (ja) | 1984-12-10 |
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