JPH0310668Y2 - - Google Patents

Info

Publication number
JPH0310668Y2
JPH0310668Y2 JP1983071140U JP7114083U JPH0310668Y2 JP H0310668 Y2 JPH0310668 Y2 JP H0310668Y2 JP 1983071140 U JP1983071140 U JP 1983071140U JP 7114083 U JP7114083 U JP 7114083U JP H0310668 Y2 JPH0310668 Y2 JP H0310668Y2
Authority
JP
Japan
Prior art keywords
guide
rotor
top lid
main body
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983071140U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59185590U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7114083U priority Critical patent/JPS59185590U/ja
Publication of JPS59185590U publication Critical patent/JPS59185590U/ja
Application granted granted Critical
Publication of JPH0310668Y2 publication Critical patent/JPH0310668Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP7114083U 1983-05-14 1983-05-14 水切乾燥装置の上蓋 Granted JPS59185590U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7114083U JPS59185590U (ja) 1983-05-14 1983-05-14 水切乾燥装置の上蓋

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7114083U JPS59185590U (ja) 1983-05-14 1983-05-14 水切乾燥装置の上蓋

Publications (2)

Publication Number Publication Date
JPS59185590U JPS59185590U (ja) 1984-12-10
JPH0310668Y2 true JPH0310668Y2 (ko) 1991-03-15

Family

ID=30201288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7114083U Granted JPS59185590U (ja) 1983-05-14 1983-05-14 水切乾燥装置の上蓋

Country Status (1)

Country Link
JP (1) JPS59185590U (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507468Y2 (ja) * 1990-06-26 1996-08-14 大日本スクリーン製造株式会社 横軸遠心式基板乾燥装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918614U (ko) * 1972-05-20 1974-02-16
JPS57183038A (en) * 1981-05-07 1982-11-11 Toshiba Corp Wafer drying machine
JPS5818927A (ja) * 1981-07-27 1983-02-03 Seiichiro Sogo 水切乾燥装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918614U (ko) * 1972-05-20 1974-02-16
JPS57183038A (en) * 1981-05-07 1982-11-11 Toshiba Corp Wafer drying machine
JPS5818927A (ja) * 1981-07-27 1983-02-03 Seiichiro Sogo 水切乾燥装置

Also Published As

Publication number Publication date
JPS59185590U (ja) 1984-12-10

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