JP2507416Y2 - 基板のバツフア装置 - Google Patents
基板のバツフア装置Info
- Publication number
- JP2507416Y2 JP2507416Y2 JP1989038279U JP3827989U JP2507416Y2 JP 2507416 Y2 JP2507416 Y2 JP 2507416Y2 JP 1989038279 U JP1989038279 U JP 1989038279U JP 3827989 U JP3827989 U JP 3827989U JP 2507416 Y2 JP2507416 Y2 JP 2507416Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transport path
- accommodating
- cassette
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 229
- 238000011084 recovery Methods 0.000 claims description 26
- 230000003139 buffering effect Effects 0.000 claims description 2
- 230000032258 transport Effects 0.000 description 31
- 238000012545 processing Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 17
- 230000004308 accommodation Effects 0.000 description 10
- 230000003028 elevating effect Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 6
- 238000007599 discharging Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000002203 pretreatment Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Conveyance By Endless Belt Conveyors (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
- Control Of Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038279U JP2507416Y2 (ja) | 1989-03-31 | 1989-03-31 | 基板のバツフア装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038279U JP2507416Y2 (ja) | 1989-03-31 | 1989-03-31 | 基板のバツフア装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02129342U JPH02129342U (en, 2012) | 1990-10-25 |
| JP2507416Y2 true JP2507416Y2 (ja) | 1996-08-14 |
Family
ID=31546140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989038279U Expired - Lifetime JP2507416Y2 (ja) | 1989-03-31 | 1989-03-31 | 基板のバツフア装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507416Y2 (en, 2012) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009001358A (ja) * | 2007-06-20 | 2009-01-08 | Shinko Electric Co Ltd | 搬送システム |
| PL2195138T3 (pl) * | 2007-09-14 | 2012-09-28 | Flexlink Components Ab | Podnośnik do systemu przenośnikowego, system przenośnikowy i sposób |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653333B2 (ja) * | 1985-07-19 | 1994-07-20 | キヤノン株式会社 | 物品等の自動供給装置 |
| JPH0682743B2 (ja) * | 1986-05-09 | 1994-10-19 | キヤノン株式会社 | ウエハ処理装置 |
| JPS6292224U (en, 2012) * | 1985-11-30 | 1987-06-12 | ||
| JPS63282007A (ja) * | 1987-05-14 | 1988-11-18 | Sanyo Electric Co Ltd | バッファ装置 |
-
1989
- 1989-03-31 JP JP1989038279U patent/JP2507416Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02129342U (en, 2012) | 1990-10-25 |
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