JP2506825Y2 - 露光装置用吸着式搬送装置 - Google Patents

露光装置用吸着式搬送装置

Info

Publication number
JP2506825Y2
JP2506825Y2 JP1990125505U JP12550590U JP2506825Y2 JP 2506825 Y2 JP2506825 Y2 JP 2506825Y2 JP 1990125505 U JP1990125505 U JP 1990125505U JP 12550590 U JP12550590 U JP 12550590U JP 2506825 Y2 JP2506825 Y2 JP 2506825Y2
Authority
JP
Japan
Prior art keywords
suction
work
exposure
pads
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990125505U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0484243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
一成 栄
稔 綿貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP1990125505U priority Critical patent/JP2506825Y2/ja
Publication of JPH0484243U publication Critical patent/JPH0484243U/ja
Application granted granted Critical
Publication of JP2506825Y2 publication Critical patent/JP2506825Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1990125505U 1990-11-28 1990-11-28 露光装置用吸着式搬送装置 Expired - Fee Related JP2506825Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990125505U JP2506825Y2 (ja) 1990-11-28 1990-11-28 露光装置用吸着式搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990125505U JP2506825Y2 (ja) 1990-11-28 1990-11-28 露光装置用吸着式搬送装置

Publications (2)

Publication Number Publication Date
JPH0484243U JPH0484243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-22
JP2506825Y2 true JP2506825Y2 (ja) 1996-08-14

Family

ID=31873100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990125505U Expired - Fee Related JP2506825Y2 (ja) 1990-11-28 1990-11-28 露光装置用吸着式搬送装置

Country Status (1)

Country Link
JP (1) JP2506825Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck
JPS6195890A (ja) * 1984-10-15 1986-05-14 ダイキン工業株式会社 マニプレ−タの吸着把持装置
JPH06102313B2 (ja) * 1985-10-31 1994-12-14 メドマン株式会社 自動調心嵌合ツ−ル
JPS6386447A (ja) * 1986-09-30 1988-04-16 Nippon Seiko Kk 露光装置用被露光部材位置決め装置

Also Published As

Publication number Publication date
JPH0484243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-22

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