JPH0484243U - - Google Patents

Info

Publication number
JPH0484243U
JPH0484243U JP12550590U JP12550590U JPH0484243U JP H0484243 U JPH0484243 U JP H0484243U JP 12550590 U JP12550590 U JP 12550590U JP 12550590 U JP12550590 U JP 12550590U JP H0484243 U JPH0484243 U JP H0484243U
Authority
JP
Japan
Prior art keywords
suction
support
exposure apparatus
conveyance device
suction pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12550590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2506825Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990125505U priority Critical patent/JP2506825Y2/ja
Publication of JPH0484243U publication Critical patent/JPH0484243U/ja
Application granted granted Critical
Publication of JP2506825Y2 publication Critical patent/JP2506825Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1990125505U 1990-11-28 1990-11-28 露光装置用吸着式搬送装置 Expired - Fee Related JP2506825Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990125505U JP2506825Y2 (ja) 1990-11-28 1990-11-28 露光装置用吸着式搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990125505U JP2506825Y2 (ja) 1990-11-28 1990-11-28 露光装置用吸着式搬送装置

Publications (2)

Publication Number Publication Date
JPH0484243U true JPH0484243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-22
JP2506825Y2 JP2506825Y2 (ja) 1996-08-14

Family

ID=31873100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990125505U Expired - Fee Related JP2506825Y2 (ja) 1990-11-28 1990-11-28 露光装置用吸着式搬送装置

Country Status (1)

Country Link
JP (1) JP2506825Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck
JPS6195890A (ja) * 1984-10-15 1986-05-14 ダイキン工業株式会社 マニプレ−タの吸着把持装置
JPS62102990A (ja) * 1985-10-31 1987-05-13 メドマン株式会社 自動調心嵌合ツ−ル
JPS6386447A (ja) * 1986-09-30 1988-04-16 Nippon Seiko Kk 露光装置用被露光部材位置決め装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck
JPS6195890A (ja) * 1984-10-15 1986-05-14 ダイキン工業株式会社 マニプレ−タの吸着把持装置
JPS62102990A (ja) * 1985-10-31 1987-05-13 メドマン株式会社 自動調心嵌合ツ−ル
JPS6386447A (ja) * 1986-09-30 1988-04-16 Nippon Seiko Kk 露光装置用被露光部材位置決め装置

Also Published As

Publication number Publication date
JP2506825Y2 (ja) 1996-08-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees