JP2505263Y2 - ウエハの表面処理装置のウエハ移送装置 - Google Patents

ウエハの表面処理装置のウエハ移送装置

Info

Publication number
JP2505263Y2
JP2505263Y2 JP1990027603U JP2760390U JP2505263Y2 JP 2505263 Y2 JP2505263 Y2 JP 2505263Y2 JP 1990027603 U JP1990027603 U JP 1990027603U JP 2760390 U JP2760390 U JP 2760390U JP 2505263 Y2 JP2505263 Y2 JP 2505263Y2
Authority
JP
Japan
Prior art keywords
cassette
transfer
wafer
dedicated
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990027603U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03117834U (enExample
Inventor
俊作 児玉
茂 小原
泰彦 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990027603U priority Critical patent/JP2505263Y2/ja
Publication of JPH03117834U publication Critical patent/JPH03117834U/ja
Application granted granted Critical
Publication of JP2505263Y2 publication Critical patent/JP2505263Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1990027603U 1990-03-16 1990-03-16 ウエハの表面処理装置のウエハ移送装置 Expired - Fee Related JP2505263Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990027603U JP2505263Y2 (ja) 1990-03-16 1990-03-16 ウエハの表面処理装置のウエハ移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990027603U JP2505263Y2 (ja) 1990-03-16 1990-03-16 ウエハの表面処理装置のウエハ移送装置

Publications (2)

Publication Number Publication Date
JPH03117834U JPH03117834U (enExample) 1991-12-05
JP2505263Y2 true JP2505263Y2 (ja) 1996-07-24

Family

ID=31530444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990027603U Expired - Fee Related JP2505263Y2 (ja) 1990-03-16 1990-03-16 ウエハの表面処理装置のウエハ移送装置

Country Status (1)

Country Link
JP (1) JP2505263Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109378290B (zh) * 2018-11-29 2024-02-20 无锡江松科技股份有限公司 硅片热处理装置及硅片盒流转方法

Also Published As

Publication number Publication date
JPH03117834U (enExample) 1991-12-05

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