JP2504116Y2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JP2504116Y2
JP2504116Y2 JP6514190U JP6514190U JP2504116Y2 JP 2504116 Y2 JP2504116 Y2 JP 2504116Y2 JP 6514190 U JP6514190 U JP 6514190U JP 6514190 U JP6514190 U JP 6514190U JP 2504116 Y2 JP2504116 Y2 JP 2504116Y2
Authority
JP
Japan
Prior art keywords
wafer
temperature
holding table
semiconductor substrate
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6514190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423140U (enrdf_load_stackoverflow
Inventor
樹 原
信裕 三沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6514190U priority Critical patent/JP2504116Y2/ja
Publication of JPH0423140U publication Critical patent/JPH0423140U/ja
Application granted granted Critical
Publication of JP2504116Y2 publication Critical patent/JP2504116Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6514190U 1990-06-20 1990-06-20 半導体製造装置 Expired - Lifetime JP2504116Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6514190U JP2504116Y2 (ja) 1990-06-20 1990-06-20 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6514190U JP2504116Y2 (ja) 1990-06-20 1990-06-20 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH0423140U JPH0423140U (enrdf_load_stackoverflow) 1992-02-26
JP2504116Y2 true JP2504116Y2 (ja) 1996-07-10

Family

ID=31596709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6514190U Expired - Lifetime JP2504116Y2 (ja) 1990-06-20 1990-06-20 半導体製造装置

Country Status (1)

Country Link
JP (1) JP2504116Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0423140U (enrdf_load_stackoverflow) 1992-02-26

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