JP2024529516A5 - - Google Patents
Info
- Publication number
- JP2024529516A5 JP2024529516A5 JP2024505584A JP2024505584A JP2024529516A5 JP 2024529516 A5 JP2024529516 A5 JP 2024529516A5 JP 2024505584 A JP2024505584 A JP 2024505584A JP 2024505584 A JP2024505584 A JP 2024505584A JP 2024529516 A5 JP2024529516 A5 JP 2024529516A5
- Authority
- JP
- Japan
- Prior art keywords
- heating
- heating region
- enclosure according
- housing
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163227842P | 2021-07-30 | 2021-07-30 | |
| US63/227,842 | 2021-07-30 | ||
| PCT/US2022/074140 WO2023010001A1 (en) | 2021-07-30 | 2022-07-26 | Multiple zone heated enclosure for optimized sublimation of solid-phase precursors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024529516A JP2024529516A (ja) | 2024-08-06 |
| JP2024529516A5 true JP2024529516A5 (enExample) | 2025-05-23 |
Family
ID=85088119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024505584A Pending JP2024529516A (ja) | 2021-07-30 | 2022-07-26 | 固相前駆体の最適化された昇華用の多重領域加熱エンクロージャー |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20250106944A1 (enExample) |
| EP (1) | EP4359585B1 (enExample) |
| JP (1) | JP2024529516A (enExample) |
| KR (1) | KR20240033157A (enExample) |
| CN (1) | CN117940601A (enExample) |
| IL (1) | IL310458A (enExample) |
| TW (1) | TWI809995B (enExample) |
| WO (1) | WO2023010001A1 (enExample) |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3009235A (en) | 1957-10-02 | 1961-11-21 | Internat Velcro Company | Separable fastening device |
| KR100199008B1 (ko) * | 1996-12-06 | 1999-06-15 | 정선종 | 화학기상증착형 원자층 에피택시 장치 및 화학기상증착 장치의 액체소스 증기 공급장치 |
| US6451692B1 (en) | 2000-08-18 | 2002-09-17 | Micron Technology, Inc. | Preheating of chemical vapor deposition precursors |
| US8545629B2 (en) * | 2001-12-24 | 2013-10-01 | Crystal Is, Inc. | Method and apparatus for producing large, single-crystals of aluminum nitride |
| US6953047B2 (en) | 2002-01-14 | 2005-10-11 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purging |
| US8865271B2 (en) * | 2003-06-06 | 2014-10-21 | Neophotonics Corporation | High rate deposition for the formation of high quality optical coatings |
| US6909839B2 (en) | 2003-07-23 | 2005-06-21 | Advanced Technology Materials, Inc. | Delivery systems for efficient vaporization of precursor source material |
| KR101615913B1 (ko) * | 2014-11-12 | 2016-05-13 | 에스엔유 프리시젼 주식회사 | 박막증착장치 |
| KR20170126536A (ko) | 2016-05-09 | 2017-11-20 | 삼성디스플레이 주식회사 | 증착 장치 |
| JP6409021B2 (ja) | 2016-05-20 | 2018-10-17 | 日本エア・リキード株式会社 | 昇華ガス供給システムおよび昇華ガス供給方法 |
| US11421320B2 (en) | 2017-12-07 | 2022-08-23 | Entegris, Inc. | Chemical delivery system and method of operating the chemical delivery system |
| US11021793B2 (en) | 2018-05-31 | 2021-06-01 | L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films |
| CN109269562A (zh) * | 2018-10-11 | 2019-01-25 | 中核新能核工业工程有限责任公司 | 一种铀浓缩厂供料用加热蒸发装置 |
| KR102221960B1 (ko) * | 2019-03-25 | 2021-03-04 | 엘지전자 주식회사 | 증착 장치 |
| KR102909679B1 (ko) * | 2020-01-17 | 2026-01-08 | 삼성전자주식회사 | 조리기기 |
-
2022
- 2022-07-26 KR KR1020247006920A patent/KR20240033157A/ko active Pending
- 2022-07-26 IL IL310458A patent/IL310458A/en unknown
- 2022-07-26 US US18/293,543 patent/US20250106944A1/en active Pending
- 2022-07-26 EP EP22850471.8A patent/EP4359585B1/en active Active
- 2022-07-26 WO PCT/US2022/074140 patent/WO2023010001A1/en not_active Ceased
- 2022-07-26 CN CN202280061458.0A patent/CN117940601A/zh active Pending
- 2022-07-26 JP JP2024505584A patent/JP2024529516A/ja active Pending
- 2022-07-28 TW TW111128280A patent/TWI809995B/zh active
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