JP2024121091A5 - - Google Patents

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Publication number
JP2024121091A5
JP2024121091A5 JP2023027990A JP2023027990A JP2024121091A5 JP 2024121091 A5 JP2024121091 A5 JP 2024121091A5 JP 2023027990 A JP2023027990 A JP 2023027990A JP 2023027990 A JP2023027990 A JP 2023027990A JP 2024121091 A5 JP2024121091 A5 JP 2024121091A5
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JP
Japan
Prior art keywords
scanning direction
stage
sub
main scanning
reading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023027990A
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English (en)
Japanese (ja)
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JP2024121091A (ja
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Publication date
Application filed filed Critical
Priority to JP2023027990A priority Critical patent/JP2024121091A/ja
Priority claimed from JP2023027990A external-priority patent/JP2024121091A/ja
Priority to PCT/JP2023/044760 priority patent/WO2024180866A1/ja
Priority to KR1020257024983A priority patent/KR20250129065A/ko
Priority to TW112151479A priority patent/TWI897171B/zh
Publication of JP2024121091A publication Critical patent/JP2024121091A/ja
Publication of JP2024121091A5 publication Critical patent/JP2024121091A5/ja
Pending legal-status Critical Current

Links

JP2023027990A 2023-02-27 2023-02-27 描画装置および描画方法 Pending JP2024121091A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2023027990A JP2024121091A (ja) 2023-02-27 2023-02-27 描画装置および描画方法
PCT/JP2023/044760 WO2024180866A1 (ja) 2023-02-27 2023-12-14 描画装置および描画方法
KR1020257024983A KR20250129065A (ko) 2023-02-27 2023-12-14 묘화 장치 및 묘화 방법
TW112151479A TWI897171B (zh) 2023-02-27 2023-12-29 描繪裝置及描繪方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023027990A JP2024121091A (ja) 2023-02-27 2023-02-27 描画装置および描画方法

Publications (2)

Publication Number Publication Date
JP2024121091A JP2024121091A (ja) 2024-09-06
JP2024121091A5 true JP2024121091A5 (https=) 2025-10-10

Family

ID=92589482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023027990A Pending JP2024121091A (ja) 2023-02-27 2023-02-27 描画装置および描画方法

Country Status (4)

Country Link
JP (1) JP2024121091A (https=)
KR (1) KR20250129065A (https=)
TW (1) TWI897171B (https=)
WO (1) WO2024180866A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI622084B (zh) 2006-09-01 2018-04-21 尼康股份有限公司 Mobile body driving method, moving body driving system, pattern forming method and device, exposure method and device, component manufacturing method, and correction method
JP2012169549A (ja) 2011-02-16 2012-09-06 Dainippon Screen Mfg Co Ltd 露光装置及び露光方法
HK1248832A1 (zh) * 2015-09-30 2018-10-19 株式会社尼康 曝光装置、平面显示器的制造方法、组件制造方法、及曝光方法
WO2017057587A1 (ja) * 2015-09-30 2017-04-06 株式会社ニコン 露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法
US10782619B2 (en) * 2016-09-30 2020-09-22 Nikon Corporation Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
KR102296327B1 (ko) * 2016-09-30 2021-09-01 가부시키가이샤 니콘 이동체 장치, 이동 방법, 노광 장치, 노광 방법, 플랫 패널 디스플레이의 제조 방법, 그리고 디바이스 제조 방법

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