JP2023548557A5 - - Google Patents
Info
- Publication number
- JP2023548557A5 JP2023548557A5 JP2023527033A JP2023527033A JP2023548557A5 JP 2023548557 A5 JP2023548557 A5 JP 2023548557A5 JP 2023527033 A JP2023527033 A JP 2023527033A JP 2023527033 A JP2023527033 A JP 2023527033A JP 2023548557 A5 JP2023548557 A5 JP 2023548557A5
- Authority
- JP
- Japan
- Prior art keywords
- crystal pulling
- exhaust pipe
- pulling system
- exhaust
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063109669P | 2020-11-04 | 2020-11-04 | |
| US63/109,669 | 2020-11-04 | ||
| PCT/US2021/057973 WO2022098811A1 (en) | 2020-11-04 | 2021-11-04 | Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023548557A JP2023548557A (ja) | 2023-11-17 |
| JP2023548557A5 true JP2023548557A5 (https=) | 2024-11-06 |
| JP7688702B2 JP7688702B2 (ja) | 2025-06-04 |
Family
ID=78819643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023527033A Active JP7688702B2 (ja) | 2020-11-04 | 2021-11-04 | ハウジングを通って延在する流体充填排気管を有する結晶引上げシステム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11976379B2 (https=) |
| EP (1) | EP4240889A1 (https=) |
| JP (1) | JP7688702B2 (https=) |
| KR (1) | KR102874406B1 (https=) |
| CN (1) | CN116547415A (https=) |
| TW (1) | TWI877422B (https=) |
| WO (1) | WO2022098811A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119216271A (zh) | 2023-06-30 | 2024-12-31 | Sl镜子科技株式会社 | 相机用擦拭装置及其控制方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3093456A (en) * | 1958-09-02 | 1963-06-11 | Texas Instruments Inc | Method for recovery and reuse of quartz containers |
| TW440613B (en) * | 1996-01-11 | 2001-06-16 | Mitsubishi Material Silicon | Method for pulling single crystal |
| KR20030055900A (ko) * | 2001-12-27 | 2003-07-04 | 주식회사 실트론 | 단결정 잉곳의 제조장치 |
| JP5660019B2 (ja) * | 2011-12-13 | 2015-01-28 | 信越半導体株式会社 | 単結晶引上げ装置 |
| US10378121B2 (en) * | 2015-11-24 | 2019-08-13 | Globalwafers Co., Ltd. | Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path |
| CN105506730B (zh) | 2015-12-15 | 2019-02-12 | 上海汉虹精密机械有限公司 | 一种单晶炉的主真空管路结构 |
| JP6617680B2 (ja) * | 2016-10-26 | 2019-12-11 | 信越半導体株式会社 | シリコン単結晶引上装置 |
| CN107012501B (zh) * | 2017-03-29 | 2019-05-17 | 上海汉虹精密机械有限公司 | 一种单晶硅生长炉水冷套装置 |
| CN208455104U (zh) | 2018-06-25 | 2019-02-01 | 西安创联新能源设备有限公司 | 一种充气自清洁式气路管道 |
| JP6973366B2 (ja) * | 2018-12-19 | 2021-11-24 | 株式会社Sumco | 単結晶シリコンインゴットの製造方法及びシリコン単結晶引上げ装置 |
| JP7047803B2 (ja) * | 2019-03-18 | 2022-04-05 | 信越半導体株式会社 | 単結晶引上げ装置 |
| CN211522363U (zh) | 2019-05-27 | 2020-09-18 | 宁夏隆基硅材料有限公司 | 一种单晶炉排气管道及单晶炉 |
-
2021
- 2021-10-07 US US17/496,547 patent/US11976379B2/en active Active
- 2021-11-04 KR KR1020237018476A patent/KR102874406B1/ko active Active
- 2021-11-04 EP EP21816239.4A patent/EP4240889A1/en active Pending
- 2021-11-04 CN CN202180081762.7A patent/CN116547415A/zh active Pending
- 2021-11-04 WO PCT/US2021/057973 patent/WO2022098811A1/en not_active Ceased
- 2021-11-04 JP JP2023527033A patent/JP7688702B2/ja active Active
- 2021-11-04 TW TW110141174A patent/TWI877422B/zh active
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