JP2023518164A - コンパクトなトラバースロボット - Google Patents

コンパクトなトラバースロボット Download PDF

Info

Publication number
JP2023518164A
JP2023518164A JP2022551540A JP2022551540A JP2023518164A JP 2023518164 A JP2023518164 A JP 2023518164A JP 2022551540 A JP2022551540 A JP 2022551540A JP 2022551540 A JP2022551540 A JP 2022551540A JP 2023518164 A JP2023518164 A JP 2023518164A
Authority
JP
Japan
Prior art keywords
platform
link
actuator
spindle
traverse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022551540A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023518164A5 (https=
Inventor
マルチン ホシェク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Persimmon Technologies Corp
Original Assignee
Persimmon Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Persimmon Technologies Corp filed Critical Persimmon Technologies Corp
Publication of JP2023518164A publication Critical patent/JP2023518164A/ja
Priority to JP2025066110A priority Critical patent/JP2025103039A/ja
Publication of JP2023518164A5 publication Critical patent/JP2023518164A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/044—Cylindrical coordinate type comprising an articulated arm with forearm providing vertical linear movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B25J19/0016—Balancing devices using springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/123—Linear actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2022551540A 2020-03-02 2021-03-02 コンパクトなトラバースロボット Pending JP2023518164A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025066110A JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062983846P 2020-03-02 2020-03-02
US62/983,846 2020-03-02
PCT/US2021/020381 WO2021178348A1 (en) 2020-03-02 2021-03-02 Compact traversing robot

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025066110A Division JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Publications (2)

Publication Number Publication Date
JP2023518164A true JP2023518164A (ja) 2023-04-28
JP2023518164A5 JP2023518164A5 (https=) 2025-04-22

Family

ID=77463385

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022551540A Pending JP2023518164A (ja) 2020-03-02 2021-03-02 コンパクトなトラバースロボット
JP2025066110A Pending JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025066110A Pending JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Country Status (5)

Country Link
US (1) US12128558B2 (https=)
JP (2) JP2023518164A (https=)
KR (1) KR20230002355A (https=)
CN (1) CN115210046A (https=)
WO (1) WO2021178348A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7425701B2 (ja) * 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置
WO2023147022A1 (en) * 2022-01-27 2023-08-03 Persimmon Technologies Corporation Traversing robot with multiple end effectors
CN115805583B (zh) * 2022-12-28 2025-02-07 天津理工大学 并联式机器人

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JP2002289673A (ja) * 2001-03-26 2002-10-04 Disco Abrasive Syst Ltd 搬出入装置
JP2003080480A (ja) * 2001-09-07 2003-03-18 Tatsumo Kk 産業用ロボット
JP2003197709A (ja) * 2001-12-25 2003-07-11 Tokyo Electron Ltd 被処理体の搬送機構及び処理システム
JP2004160613A (ja) * 2002-11-14 2004-06-10 Tokyo Electron Ltd 搬送機構の基準位置補正装置及び基準位置補正方法
JP2007015863A (ja) * 1998-03-25 2007-01-25 Hitachi Plant Technologies Ltd 搬送装置及び製造方法
JP2008137115A (ja) * 2006-12-01 2008-06-19 Nidec Sankyo Corp アーム駆動装置及び産業用ロボット
JP2013074145A (ja) * 2011-09-28 2013-04-22 Sinfonia Technology Co Ltd 真空処理装置
JP2014078600A (ja) * 2012-10-10 2014-05-01 Sumitomo Heavy Ind Ltd 成膜装置
JP2014103156A (ja) * 2012-11-16 2014-06-05 Yaskawa Electric Corp 基板搬送ロボットおよび基板搬送方法
JP2018505065A (ja) * 2015-02-06 2018-02-22 パーシモン テクノロジーズ コーポレイションＰｅｒｓｉｍｍｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｃｏｒｐ． 不等リンク長を有するアームを有するロボット
US20190240831A1 (en) * 2018-02-05 2019-08-08 Kimball Electronics Indiana, Inc. Robot Having Vertically Oriented Articulated Arm Motion

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4678952A (en) * 1985-08-13 1987-07-07 Intelledex Incorporated Sealed joint for a robot and the like
US7704036B2 (en) * 2004-07-09 2010-04-27 Rorze Corporation Drive source and transportation robot
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US8701519B2 (en) * 2006-06-28 2014-04-22 Genmark Automation, Inc. Robot with belt-drive system
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
KR20120067488A (ko) * 2010-12-16 2012-06-26 미래산업 주식회사 선형전동기 및 이를 이용한 기판 이송장치
KR20250119665A (ko) 2011-09-16 2025-08-07 퍼시몬 테크놀로지스 코포레이션 운송 장치 및 이를 포함하는 처리 장치
CN104428884B (zh) * 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法
JP5532111B2 (ja) * 2012-11-16 2014-06-25 株式会社安川電機 ロボットアーム、ロボットおよびロボットの動作方法
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
CN204508205U (zh) * 2015-03-28 2015-07-29 苏州荣威工贸有限公司 一种基于平行原理的双杆双向搬运机器人
GB2538714A (en) * 2015-05-25 2016-11-30 Robotical Ltd Robot Leg
US10580682B2 (en) * 2017-02-15 2020-03-03 Persimmon Technologies, Corp. Material-handling robot with multiple end-effectors
US10549420B2 (en) * 2018-03-15 2020-02-04 Kimball Electronics Indiana, Inc. Over and under linear axis robot
WO2020167956A1 (en) 2019-02-14 2020-08-20 Persimmon Technologies Corporation Modular material handling robot platform
WO2020167939A1 (en) 2019-02-14 2020-08-20 Persimmon Technologies Corporation Magnetically guided material handling robot

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JP2007015863A (ja) * 1998-03-25 2007-01-25 Hitachi Plant Technologies Ltd 搬送装置及び製造方法
JP2002289673A (ja) * 2001-03-26 2002-10-04 Disco Abrasive Syst Ltd 搬出入装置
JP2003080480A (ja) * 2001-09-07 2003-03-18 Tatsumo Kk 産業用ロボット
JP2003197709A (ja) * 2001-12-25 2003-07-11 Tokyo Electron Ltd 被処理体の搬送機構及び処理システム
JP2004160613A (ja) * 2002-11-14 2004-06-10 Tokyo Electron Ltd 搬送機構の基準位置補正装置及び基準位置補正方法
JP2008137115A (ja) * 2006-12-01 2008-06-19 Nidec Sankyo Corp アーム駆動装置及び産業用ロボット
JP2013074145A (ja) * 2011-09-28 2013-04-22 Sinfonia Technology Co Ltd 真空処理装置
JP2014078600A (ja) * 2012-10-10 2014-05-01 Sumitomo Heavy Ind Ltd 成膜装置
JP2014103156A (ja) * 2012-11-16 2014-06-05 Yaskawa Electric Corp 基板搬送ロボットおよび基板搬送方法
JP2018505065A (ja) * 2015-02-06 2018-02-22 パーシモン テクノロジーズ コーポレイションＰｅｒｓｉｍｍｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｃｏｒｐ． 不等リンク長を有するアームを有するロボット
US20190240831A1 (en) * 2018-02-05 2019-08-08 Kimball Electronics Indiana, Inc. Robot Having Vertically Oriented Articulated Arm Motion

Also Published As

Publication number Publication date
JP2025103039A (ja) 2025-07-08
US20250010462A1 (en) 2025-01-09
WO2021178348A1 (en) 2021-09-10
WO2021178348A9 (en) 2021-12-30
US12128558B2 (en) 2024-10-29
US20210268641A1 (en) 2021-09-02
KR20230002355A (ko) 2023-01-05
CN115210046A (zh) 2022-10-18

Similar Documents

Publication Publication Date Title
JP2025103039A (ja) コンパクトなトラバースロボット
US11996316B2 (en) Robot having arm with parallel paths
JP6173677B2 (ja) 産業用ロボットの原点位置復帰方法
TWI678753B (zh) 基板移載裝置
KR101829397B1 (ko) 낮은 가변성을 가진 로봇
JP5387622B2 (ja) 搬送ロボット
JP2023518164A5 (https=)
CN110712195A (zh) 运送机器人和机器人系统
JP2011199121A (ja) 搬送装置
US11472023B2 (en) Robotic apparatus
KR20000042618A (ko) 원통좌표계로봇
KR102672414B1 (ko) 반송 장치, 반송 방법 및 반송 시스템
US20200338757A1 (en) Horizontal Articulated Robot
JP2024510251A (ja) 複数のリンケージを有する分散アーキテクチャロボット
TW200536689A (en) Carrying device, method of controlling the same, and vacuum processing device
JP2007250196A (ja) 搬送装置及び真空プロセス装置
US12617076B2 (en) Compact traversing robot
JP2018094650A (ja) 搬送ロボットシステム
JPH1094983A (ja) アクチュエータ機構
KR102533338B1 (ko) 와이어리스 밸브 매니폴드
JP7737358B2 (ja) 真空用双腕ロボット
US12083666B2 (en) Traversing robot with multiple end effectors
KR20250173806A (ko) 개선된 2자유도 동시 중력 보상 장치를 포함하는 매니퓰레이터

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240226

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20241217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250122

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250414

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20250414

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250731

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20251029

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260128