KR20230002355A - 소형 횡단 로봇 - Google Patents

소형 횡단 로봇 Download PDF

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Publication number
KR20230002355A
KR20230002355A KR1020227034326A KR20227034326A KR20230002355A KR 20230002355 A KR20230002355 A KR 20230002355A KR 1020227034326 A KR1020227034326 A KR 1020227034326A KR 20227034326 A KR20227034326 A KR 20227034326A KR 20230002355 A KR20230002355 A KR 20230002355A
Authority
KR
South Korea
Prior art keywords
platform
link
actuator
spindle
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020227034326A
Other languages
English (en)
Korean (ko)
Inventor
마틴 호섹
Original Assignee
퍼시몬 테크놀로지스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 퍼시몬 테크놀로지스 코포레이션 filed Critical 퍼시몬 테크놀로지스 코포레이션
Publication of KR20230002355A publication Critical patent/KR20230002355A/ko
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/044—Cylindrical coordinate type comprising an articulated arm with forearm providing vertical linear movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B25J19/0016—Balancing devices using springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/123—Linear actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020227034326A 2020-03-02 2021-03-02 소형 횡단 로봇 Pending KR20230002355A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062983846P 2020-03-02 2020-03-02
US62/983,846 2020-03-02
PCT/US2021/020381 WO2021178348A1 (en) 2020-03-02 2021-03-02 Compact traversing robot

Publications (1)

Publication Number Publication Date
KR20230002355A true KR20230002355A (ko) 2023-01-05

Family

ID=77463385

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227034326A Pending KR20230002355A (ko) 2020-03-02 2021-03-02 소형 횡단 로봇

Country Status (5)

Country Link
US (1) US12128558B2 (https=)
JP (2) JP2023518164A (https=)
KR (1) KR20230002355A (https=)
CN (1) CN115210046A (https=)
WO (1) WO2021178348A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7425701B2 (ja) * 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置
WO2023147022A1 (en) * 2022-01-27 2023-08-03 Persimmon Technologies Corporation Traversing robot with multiple end effectors
CN115805583B (zh) * 2022-12-28 2025-02-07 天津理工大学 并联式机器人

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4678952A (en) * 1985-08-13 1987-07-07 Intelledex Incorporated Sealed joint for a robot and the like
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JP2007015863A (ja) * 1998-03-25 2007-01-25 Hitachi Plant Technologies Ltd 搬送装置及び製造方法
JP4509411B2 (ja) * 2001-03-26 2010-07-21 株式会社ディスコ 搬出入装置
JP2003080480A (ja) * 2001-09-07 2003-03-18 Tatsumo Kk 産業用ロボット
JP4389424B2 (ja) * 2001-12-25 2009-12-24 東京エレクトロン株式会社 被処理体の搬送機構及び処理システム
JP4277100B2 (ja) * 2002-11-14 2009-06-10 東京エレクトロン株式会社 搬送機構の基準位置補正装置及び基準位置補正方法
US7704036B2 (en) * 2004-07-09 2010-04-27 Rorze Corporation Drive source and transportation robot
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US8701519B2 (en) * 2006-06-28 2014-04-22 Genmark Automation, Inc. Robot with belt-drive system
JP5016302B2 (ja) * 2006-12-01 2012-09-05 日本電産サンキョー株式会社 アーム駆動装置及び産業用ロボット
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
KR20120067488A (ko) * 2010-12-16 2012-06-26 미래산업 주식회사 선형전동기 및 이를 이용한 기판 이송장치
KR20250119665A (ko) 2011-09-16 2025-08-07 퍼시몬 테크놀로지스 코포레이션 운송 장치 및 이를 포함하는 처리 장치
JP2013074145A (ja) * 2011-09-28 2013-04-22 Sinfonia Technology Co Ltd 真空処理装置
CN104428884B (zh) * 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法
JP2014078600A (ja) * 2012-10-10 2014-05-01 Sumitomo Heavy Ind Ltd 成膜装置
JP5532110B2 (ja) * 2012-11-16 2014-06-25 株式会社安川電機 基板搬送ロボットおよび基板搬送方法
JP5532111B2 (ja) * 2012-11-16 2014-06-25 株式会社安川電機 ロボットアーム、ロボットおよびロボットの動作方法
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
WO2016127160A1 (en) * 2015-02-06 2016-08-11 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
CN204508205U (zh) * 2015-03-28 2015-07-29 苏州荣威工贸有限公司 一种基于平行原理的双杆双向搬运机器人
GB2538714A (en) * 2015-05-25 2016-11-30 Robotical Ltd Robot Leg
US10580682B2 (en) * 2017-02-15 2020-03-03 Persimmon Technologies, Corp. Material-handling robot with multiple end-effectors
US20190240831A1 (en) * 2018-02-05 2019-08-08 Kimball Electronics Indiana, Inc. Robot Having Vertically Oriented Articulated Arm Motion
US10549420B2 (en) * 2018-03-15 2020-02-04 Kimball Electronics Indiana, Inc. Over and under linear axis robot
WO2020167956A1 (en) 2019-02-14 2020-08-20 Persimmon Technologies Corporation Modular material handling robot platform
WO2020167939A1 (en) 2019-02-14 2020-08-20 Persimmon Technologies Corporation Magnetically guided material handling robot

Also Published As

Publication number Publication date
JP2025103039A (ja) 2025-07-08
US20250010462A1 (en) 2025-01-09
WO2021178348A1 (en) 2021-09-10
WO2021178348A9 (en) 2021-12-30
US12128558B2 (en) 2024-10-29
US20210268641A1 (en) 2021-09-02
JP2023518164A (ja) 2023-04-28
CN115210046A (zh) 2022-10-18

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