JP2023501702A - 表面保護物質を用いた薄膜形成方法 - Google Patents
表面保護物質を用いた薄膜形成方法 Download PDFInfo
- Publication number
- JP2023501702A JP2023501702A JP2022528185A JP2022528185A JP2023501702A JP 2023501702 A JP2023501702 A JP 2023501702A JP 2022528185 A JP2022528185 A JP 2022528185A JP 2022528185 A JP2022528185 A JP 2022528185A JP 2023501702 A JP2023501702 A JP 2023501702A
- Authority
- JP
- Japan
- Prior art keywords
- surface protective
- thin film
- carbon atoms
- forming
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 46
- 230000001681 protective effect Effects 0.000 title claims abstract description 42
- 239000010409 thin film Substances 0.000 title claims abstract description 38
- 239000000126 substance Substances 0.000 title claims description 41
- 230000015572 biosynthetic process Effects 0.000 title description 3
- 239000002243 precursor Substances 0.000 claims abstract description 38
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 125000001033 ether group Chemical group 0.000 claims abstract description 16
- 239000000376 reactant Substances 0.000 claims abstract description 12
- 238000010926 purge Methods 0.000 claims abstract description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 38
- 125000000217 alkyl group Chemical group 0.000 claims description 12
- 125000003118 aryl group Chemical group 0.000 claims description 9
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 9
- 150000002739 metals Chemical class 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 125000005265 dialkylamine group Chemical group 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 2
- -1 Zr and Hf Chemical class 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 29
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 20
- 239000007789 gas Substances 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 8
- 239000006227 byproduct Substances 0.000 description 7
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- IEOPZUMPHCZMCS-UHFFFAOYSA-N 2-(methoxymethyl)oxolane Chemical compound COCC1CCCO1 IEOPZUMPHCZMCS-UHFFFAOYSA-N 0.000 description 1
- XTDKZSUYCXHXJM-UHFFFAOYSA-N 2-methoxyoxane Chemical compound COC1CCCCO1 XTDKZSUYCXHXJM-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45534—Use of auxiliary reactants other than used for contributing to the composition of the main film, e.g. catalysts, activators or scavengers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
技術的課題
本発明の目的は,極めて薄い厚さの薄膜を形成することができる薄膜形成方法を提供することにある。
本発明の一実施例によれば,複数のエーテル基を有する表面保護物質を用いた薄膜形成方法は,金属前駆体を基板が置かれたチャンバーの内部に供給し,前記金属前駆体を前記基板に吸着する金属前駆体供給段階;前記チャンバーの内部をパージする段階;前記チャンバーの内部に反応物質を供給して吸着された前記金属前駆体と反応して薄膜を形成する薄膜形成段階を含むが,前記方法は,前記薄膜形成段階の前に,前記表面保護物質を供給して前記基板に吸着する表面保護物質供給段階;前記チャンバーの内部をパージする段階を含んでいる。
R1,R2は炭素数1~10のアルキル基,炭素数1~10のシクロアルキル基,炭素数6~12のアリール基の中から選択される。
Rは,炭素数1~10のアルキル基,炭素数1~10のシクロアルキル基,炭素数6~12のアリール基を含む複数のエーテル官能基から選択される。
Rは,炭素数1~10のアルキル基,炭素数1~10のシクロアルキル基,炭素数6~12のアリール基を含む複数のエーテル官能基から選択される。
本発明の一実施形態によれば,既存のALD工程によって得られる1つのモノレイヤー厚より薄く不純物なしで純度の高い薄膜を形成することができ,これにより非常に低い薄膜成長速度を有するので薄膜の厚さの調整が容易でステップカバレッジ制御が可能であるだけでなく,素子の電気的特性及び信頼性を向上させることができる。
R1,R2は炭素数1~10のアルキル基,炭素数1~10のシクロアルキル基,炭素数6~12のアリール基の中から選択される。
Rは,炭素数1~10のアルキル基,炭素数1~10のシクロアルキル基,炭素数6~12のアリール基を含む複数のエーテル官能基から選択される。
Rは,炭素数1~10のアルキル基,炭素数1~10のシクロアルキル基,炭素数6~12のアリール基を含む複数のエーテル官能基から選択される。
前述した表面保護物質を使用せずに,シリコン基板上にアルミニウム酸化膜を形成した。ALD工程を使用してアルミニウム酸化膜を形成し,ALD工程温度は250~350℃,反応物質は,O3ガスを使用した。
1)Arをキャリア(carrier)ガスとして,常温でアルミニウム前駆体TMA(Trimethylaluminium)を反応チャンバーに供給して,基板にアルミニウム前駆体を吸着
2)反応チャンバー内にArガスを供給して未吸着アルミニウム前駆体又は副産物を除去
3)O3ガスを反応室に供給してモノレイヤー(monolayer)を形成
4)反応チャンバー内にArガスを供給して未反応物質又は副産物を除去
表面保護物質で1つのエーテル基を有する物質を使用して,シリコン基板上にアルミニウム酸化膜を形成した。ALD工程を使用してアルミニウム酸化膜を形成し,ALD工程温度は300~360℃,反応物質は,O3ガスを使用した。
1)反応チャンバー内に表面保護物質を供給して基板に吸着
2)反応チャンバー内にArガスを供給して未吸着表面保護物質又は副産物を除去
3)Arをキャリア(carrier)ガスとして,常温でアルミニウム前駆体TMA(Trimethylaluminium)を反応チャンバーに供給して,基板にアルミニウム前駆体を吸着
4)反応チャンバー内にArガスを供給して未吸着アルミニウム前駆体又は副産物を除去
5)O3ガスを反応室に供給してモノレイヤー(monolayer)を形成
6)反応チャンバー内にArガスを供給して未反応物質又は副産物を除去
表面保護物質を1つのエーテル基を有する物質から複数のエーテル基を有するMTHP(Methoxy Tetrahydropyran)に変更することを除いて,比較例2と同様の方法でアルミニウム酸化膜を形成した。
表面保護物質をMTHPからMMTHF(Methoxymethyl Tetrahydrofuran)に変更することを除いて,比較例2と同様の方法でアルミニウム酸化膜を形成した。
Claims (7)
- 複数のエーテル基を有する表面保護物質を用いた薄膜形成方法において,
金属前駆体を基板が置かれたチャンバーの内部に供給し,前記金属前駆体を前記基板に吸着する金属前駆体供給段階;
前記チャンバーの内部をパージする段階;と
前記チャンバーの内部に反応物質を供給して吸着された前記金属前駆体と反応して薄膜を形成する薄膜形成段階を含むが,
前記方法は,前記薄膜形成段階の前に,前記表面保護物質を供給して前記基板に吸着する表面保護物質供給段階;と
前記チャンバーの内部をパージする段階を含む,表面保護物質を用いた薄膜形成方法。 - 前記反応物質は水蒸気(H2O),酸素(O2),及びオゾン(O3)の中から選択される,請求項1記載の表面保護物質を用いた薄膜形成方法。
- 前記金属前駆体は,Alを含む3族金属,Zr及びHfを含む4族金属,Nb及びTaを含む5族金属のいずれかを含む化合物である,請求項1記載の表面保護物質を用いた薄膜形成方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190146643A KR102333599B1 (ko) | 2019-11-15 | 2019-11-15 | 표면 보호 물질을 이용한 박막 형성 방법 |
KR10-2019-0146643 | 2019-11-15 | ||
PCT/KR2020/016102 WO2021096326A1 (ko) | 2019-11-15 | 2020-11-16 | 표면 보호 물질을 이용한 박막 형성 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023501702A true JP2023501702A (ja) | 2023-01-18 |
JP7496634B2 JP7496634B2 (ja) | 2024-06-07 |
Family
ID=75913125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022528185A Active JP7496634B2 (ja) | 2019-11-15 | 2020-11-16 | 表面保護物質を用いた薄膜形成方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220403521A1 (ja) |
JP (1) | JP7496634B2 (ja) |
KR (1) | KR102333599B1 (ja) |
CN (1) | CN114729450A (ja) |
WO (1) | WO2021096326A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4253595A1 (en) * | 2022-02-10 | 2023-10-04 | Soulbrain Co., Ltd. | Oxide film reaction surface control agent, method for forming oxide film by using same, and semiconductor substrate and semiconductor device manufactured therefrom |
WO2023191360A1 (ko) * | 2022-03-28 | 2023-10-05 | 솔브레인 주식회사 | 계단율 개선제, 이를 이용한 박막 형성 방법, 이로부터 제조된 반도체 기판 및 반도체 소자 |
WO2023195654A1 (ko) * | 2022-04-05 | 2023-10-12 | 솔브레인 주식회사 | 박막 개질 조성물, 이를 이용한 박막 형성 방법, 이로부터 제조된 반도체 기판 및 반도체 소자 |
WO2023195656A1 (ko) * | 2022-04-05 | 2023-10-12 | 솔브레인 주식회사 | 박막 형성 방법, 이로부터 제조된 반도체 기판 및 반도체 소자 |
WO2023195657A1 (ko) * | 2022-04-05 | 2023-10-12 | 솔브레인 주식회사 | 박막 개질 조성물, 이를 이용한 박막 형성 방법, 이로부터 제조된 반도체 기판 및 반도체 소자 |
WO2023195655A1 (ko) * | 2022-04-05 | 2023-10-12 | 솔브레인 주식회사 | 박막 차폐제, 이를 이용한 박막 형성 방법, 이로부터 제조된 반도체 기판 및 반도체 소자 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012235125A (ja) * | 2011-04-28 | 2012-11-29 | Samsung Electronics Co Ltd | 酸化物層の形成方法及びそれを含む半導体素子の製造方法 |
US20170040172A1 (en) * | 2015-08-04 | 2017-02-09 | Samsung Electronics Co., Ltd. | Methods of forming material layer |
JP2017201653A (ja) * | 2016-05-02 | 2017-11-09 | 東京エレクトロン株式会社 | 凹部の埋め込み方法 |
JP2019504509A (ja) * | 2015-11-19 | 2019-02-14 | ユージーンテック マテリアルズ カンパニー リミテッド | 有機4族化合物を含む前駆体造成物及びそれを利用した薄膜形成方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003231738A (ja) * | 2002-02-08 | 2003-08-19 | Matsushita Electric Ind Co Ltd | 導電性有機薄膜とその製造方法 |
US7229405B2 (en) | 2002-11-15 | 2007-06-12 | Paracor Medical, Inc. | Cardiac harness delivery device and method of use |
KR100576739B1 (ko) * | 2004-02-12 | 2006-05-03 | 학교법인 포항공과대학교 | 원자층 화학 증착법에 의한 금속 실리 알루미네이트박막의 제조방법 |
US20100036144A1 (en) * | 2006-07-20 | 2010-02-11 | Ce Ma | Methods for atomic layer deposition |
US8871617B2 (en) * | 2011-04-22 | 2014-10-28 | Asm Ip Holding B.V. | Deposition and reduction of mixed metal oxide thin films |
KR102550652B1 (ko) * | 2018-04-02 | 2023-07-05 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
KR102095710B1 (ko) * | 2019-11-05 | 2020-04-01 | 주식회사 유진테크 머티리얼즈 | 표면 보호 물질을 이용한 박막 형성 방법 |
-
2019
- 2019-11-15 KR KR1020190146643A patent/KR102333599B1/ko active IP Right Grant
-
2020
- 2020-11-16 JP JP2022528185A patent/JP7496634B2/ja active Active
- 2020-11-16 WO PCT/KR2020/016102 patent/WO2021096326A1/ko active Application Filing
- 2020-11-16 US US17/776,751 patent/US20220403521A1/en active Pending
- 2020-11-16 CN CN202080079543.0A patent/CN114729450A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012235125A (ja) * | 2011-04-28 | 2012-11-29 | Samsung Electronics Co Ltd | 酸化物層の形成方法及びそれを含む半導体素子の製造方法 |
US20170040172A1 (en) * | 2015-08-04 | 2017-02-09 | Samsung Electronics Co., Ltd. | Methods of forming material layer |
JP2019504509A (ja) * | 2015-11-19 | 2019-02-14 | ユージーンテック マテリアルズ カンパニー リミテッド | 有機4族化合物を含む前駆体造成物及びそれを利用した薄膜形成方法 |
JP2017201653A (ja) * | 2016-05-02 | 2017-11-09 | 東京エレクトロン株式会社 | 凹部の埋め込み方法 |
Also Published As
Publication number | Publication date |
---|---|
CN114729450A (zh) | 2022-07-08 |
US20220403521A1 (en) | 2022-12-22 |
JP7496634B2 (ja) | 2024-06-07 |
KR102333599B1 (ko) | 2021-11-30 |
KR20210059332A (ko) | 2021-05-25 |
WO2021096326A1 (ko) | 2021-05-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7496634B2 (ja) | 表面保護物質を用いた薄膜形成方法 | |
KR102095710B1 (ko) | 표면 보호 물질을 이용한 박막 형성 방법 | |
KR102186335B1 (ko) | 반응 챔버에서 아웃가싱을 감소시키는 방법 및 시스템 | |
KR101427142B1 (ko) | 금속 규산염 막의 원자층 증착 | |
KR102521792B1 (ko) | 선택적 산화알루미늄 막 증착 | |
KR100356473B1 (ko) | 반도체 소자의 알루미늄 옥사이드 박막 형성 방법 | |
KR100652420B1 (ko) | 유전막 제조방법, 그 유전막을 포함하는 mim 캐패시터의제조방법 및 그 유전막을 제조하기 위한 배치 타입 ald장치 | |
TWI693229B (zh) | 用於含鋯膜氣相沈積的含鋯成膜組成物 | |
JP2004056142A (ja) | 原子層蒸着法を利用した物質形成方法及びこれを利用した半導体装置のキャパシタ形成方法 | |
JP2023545619A (ja) | 選択性付与剤を用いた領域選択的薄膜形成方法 | |
JP7485403B2 (ja) | 表面保護物質を用いた薄膜形成方法 | |
KR100518560B1 (ko) | 원자층 증착법을 이용한 박막 형성방법 | |
KR20100115375A (ko) | 성막 방법 및 기억 매체 | |
KR102199999B1 (ko) | 표면 보호 물질을 이용한 박막 형성 방법 | |
TWI841867B (zh) | 使用保護材料來沉積薄膜的方法 | |
KR20210087808A (ko) | 표면 보호 물질을 이용한 물질막 형성 방법 | |
KR20220124000A (ko) | 선택성 부여제를 이용한 영역 선택적 박막 형성 방법 | |
KR100608453B1 (ko) | HfSiN 박막증착방법 | |
KR20050002011A (ko) | 반도체 소자의 절연박막 형성방법 | |
KR20110069631A (ko) | 결정질 산화티타늄막 제조 방법 | |
KR20040087310A (ko) | 저온 게이트 스택 | |
KR20050044115A (ko) | 하프늄 금속 유기물을 이용한 하프늄 산화막 형성 방법 | |
KR20070004193A (ko) | 막 형성 방법 및 이를 이용하는 커패시터 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220712 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230731 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230802 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20231030 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20231225 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240131 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240423 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240521 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7496634 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |