JP2017201653A - 凹部の埋め込み方法 - Google Patents
凹部の埋め込み方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 57
- 238000002513 implantation Methods 0.000 title abstract 2
- 238000005121 nitriding Methods 0.000 claims abstract description 77
- 239000002861 polymer material Substances 0.000 claims abstract description 71
- 238000001179 sorption measurement Methods 0.000 claims abstract description 49
- 150000004767 nitrides Chemical class 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000003213 activating effect Effects 0.000 claims abstract description 6
- 239000002994 raw material Substances 0.000 claims abstract 8
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 20
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 12
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 7
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 4
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 claims description 4
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 3
- 230000002401 inhibitory effect Effects 0.000 claims description 3
- 239000005049 silicon tetrachloride Substances 0.000 claims description 3
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 claims description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 3
- 239000005052 trichlorosilane Substances 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 99
- 239000002243 precursor Substances 0.000 description 59
- 235000012431 wafers Nutrition 0.000 description 32
- 239000011261 inert gas Substances 0.000 description 23
- 238000000231 atomic layer deposition Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 11
- 238000000926 separation method Methods 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000011800 void material Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 230000005764 inhibitory process Effects 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 150000002605 large molecules Chemical class 0.000 description 2
- 229920002521 macromolecule Polymers 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
【解決手段】表面に凹部が形成された被処理基板に対し、成膜しようとする窒化膜を構成する元素を含有する成膜原料ガスを吸着させる成膜原料ガス吸着工程と、前記吸着された成膜原料ガスを、窒化ガスを活性化することにより生成された窒化種により窒化させる窒化工程とを繰り返して凹部内に窒化膜を形成し、凹部を埋め込むにあたり、窒化膜を形成する期間の少なくとも一部を、被処理基板の表面に吸着可能な高分子材料を気相状態で供給し、凹部の上部に吸着させて、成膜原料ガスの吸着を阻害させ、凹部の底部から窒化膜を成長させるボトムアップ成長期間とする。
【選択図】図4
Description
本発明においては、被処理基板の凹部にALD法により窒化膜を埋め込む。本実施形態では窒化膜としてシリコン窒化膜(SiN膜)を例にとって説明する。
本実施形態では、被処理基板に形成されたトレンチやホール等の凹部に対し、ALD法によってSiN膜を埋め込む。
以下、本実施形態の凹部の埋め込み方法の具体例について、図3の工程断面図を参照して説明する。
次に、上記実施形態に係る凹部の埋め込み方法を実施するための成膜装置の例について説明する。
図6は本発明の一実施形態に係る凹部の埋め込み方法を実施するための成膜装置の第1例を概略的に示す断面図である。
図7は本発明の一実施形態に係る凹部の埋め込み方法を実施するための成膜装置の第2例を概略的に示す水平断面図である。
処理容器61内の搬入出口63に対応する部分は搬入出部65となっており、この搬入出部65において、ターンテーブル62上へのウエハWの搬入およびターンテーブル62上のウエハWの搬出が行われる。
以上、本発明の実施形態について説明したが、この発明は、上記の実施形態に限定されることはなく、その趣旨を逸脱しない範囲で種々変形可能である。
2;凹部
3;SiN膜
4,14;高分子材料
11;絶縁膜
12;微細トレンチ
13;ライナー膜
15;Siプリカーサ
21,23;コンフォーマルSiN膜
22;ボトムアップSiN膜
22a;V字溝
31;処理容器
32;ウエハ載置台
33;ヒータ
35;シャワーヘッド
39;高周波電源
40;ガス供給機構
41;Siプリカーサ供給源
42;窒化ガス供給源
43;高分子材料供給源
44;不活性ガス供給源
51;排気配管
52;自動圧力制御バルブ(APC)
53;真空ポンプ
56;制御部
61;処理容器
62;ターンテーブル
65;搬入出部
71;第1処理エリア(高分子材料供給エリア)
72;第2処理エリア(Siプリカーサ供給エリア)
73;第3処理エリア(窒化エリア)
77;プラズマ生成機構
100,200;成膜装置
W;半導体ウエハ(被処理基板)
Claims (11)
- 表面に凹部が形成された被処理基板に対し、成膜しようとする窒化膜を構成する元素を含有する成膜原料ガスを吸着させる成膜原料ガス吸着工程と、前記吸着された成膜原料ガスを、窒化ガスを活性化することにより生成された窒化種により窒化させる窒化工程とを繰り返して凹部内に窒化膜を形成し、凹部を埋め込む凹部の埋め込み方法であって、
前記窒化膜を形成する期間の少なくとも一部を、被処理基板の表面に吸着可能な高分子材料を気相状態で供給し、前記凹部の上部に吸着させて、前記成膜原料ガスの吸着を阻害させ、前記凹部の底部から窒化膜を成長させるボトムアップ成長期間とすることを特徴とする凹部の埋め込み方法。 - 前記窒化膜を形成する最初の期間を、前記高分子材料を供給せずに、前記成膜原料ガス吸着工程と、前記窒化工程を繰り返してコンフォーマルな窒化膜を形成するコンフォーマル窒化膜形成期間とし、その後の期間を前記ボトムアップ成長期間とすることを特徴とする請求項1に記載の凹部の埋め込み方法。
- 前記ボトムアップ成長期間は、前記成膜原料ガス吸着工程、前記窒化工程、および前記高分子材料を前記凹部の上部に吸着させる高分子材料吸着工程をこの順に繰り返すことを特徴とする請求項1または請求項2に記載の凹部の埋め込み方法。
- 被処理基板の表面に形成された凹部に窒化膜を形成し、凹部を埋め込む凹部の埋め込み方法であって、
成膜しようとする窒化膜を構成する元素を含有する成膜原料ガスを吸着させる成膜原料ガス吸着工程と、前記吸着された成膜原料ガスを、窒化ガスを活性化することにより生成された窒化種により窒化させる窒化工程とを繰り返して凹部内にコンフォーマルな窒化膜を形成する第1段階と、
前記成膜原料ガス吸着工程と、前記窒化工程と、被処理基板の表面に吸着可能な高分子材料を気相状態で供給し、前記凹部の上部に吸着させる高分子材料吸着工程とを、この順に繰り返し、前記成膜原料ガスの吸着を阻害させ前記凹部の底部から窒化膜を成長させる第2段階と
を有することを特徴とする凹部の埋め込み方法。 - 前記第2段階の後、前記成膜原料ガス吸着工程と、前記窒化工程とを繰り返してコンフォーマルな窒化膜を形成する第3段階をさらに有することを特徴とする請求項4に記載の凹部の埋め込み方法。
- 前記高分子材料は、前記窒化工程によって被処理基板表面に形成されるNH基に吸着することを特徴とする請求項1から請求項5のいずれか1項に記載の凹部の埋め込み方法。
- 前記高分子材料は、エーテル結合を有する高分子材料であることを特徴とする請求項6に記載の凹部の埋め込み方法。
- 前記エーテル結合を有する高分子材料は、グリム、ジグリム、およびトリグリムから選択された少なくとも1種であることを特徴とする請求項7に記載の凹部の埋め込み方法。
- 前記成膜原料ガスはSiを含有し、前記窒化膜はシリコン窒化膜であることを特徴とする請求項1から請求項8のいずれか1項に記載の凹部の埋め込み方法。
- 前記成膜原料ガスは、ジクロロシラン、モノクロロシラン、トリクロロシラン、シリコンテトラクロライド、およびヘキサクロロジシランからなる群から選択された少なくとも一種であることを特徴とする請求項9に記載の凹部の埋め込み方法。
- 前記窒化ガスとしてNH3ガスを用いることを特徴とする請求項1から請求項10のいずれか1項に記載の凹部の埋め込み方法。
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