JP2020017708A - シリコン窒化膜の成膜方法及び成膜装置 - Google Patents
シリコン窒化膜の成膜方法及び成膜装置 Download PDFInfo
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Abstract
Description
前記側面から中央に向かって堆積した前記薄膜同士を繋げて前記中央の隙間を埋める直前の段階において、前記窪み内に第1の窒素ラジカルを吸着させる工程と、
前記窪み内において、前記第1の窒素ラジカル上にシリコン含有ガスを物理吸着させる工程と、
前記窪み内に第2の窒素ラジカルを供給し、前記シリコン含有ガスを前記第1の窒素ラジカルから脱離させるとともに、脱離した前記シリコン含有ガスと前記第2の窒素ラジカルとを反応させて前記中央の隙間を埋めるようにシリコン窒化膜を堆積させる工程と、を有する。
始めに、本開示の実施形態に係る成膜装置について説明する。図1から図3までを参照すると、本実施形態に係る成膜装置は、ほぼ円形の平面形状を有する扁平な真空容器1と、真空容器1内に設けられ、真空容器1の中心に回転中心を有する回転テーブル2と、を備えている。真空容器1は、内部に収容したウエハの表面上に成膜処理を行うための処理室である。真空容器1は、有底の円筒形状を有する容器本体12と、容器本体12の上面に対して、例えばOリングなどのシール部材13(図1)を介して気密に着脱可能に配置される天板11とを有している。
次に、本開示の実施形態に係るシリコン窒化膜の成膜方法について説明する。まず、本実施形態に係るシリコン窒化膜の成膜方法で用いるアンモニアによる窒化を用いたシリコン窒化膜の成膜方法と、窒素による窒化を用いたシリコン窒化膜の成膜方法の相違について説明する。
次に、本実施形態に係るシリコン窒化膜の成膜方法を実施した実施例の実施結果について説明する。
2 回転テーブル
4 凸状部
5 突出部
7 ヒータユニット
11 天板
12 容器本体
15 搬送口
24 凹部
31、32 反応ガスノズル
41、42 分離ガスノズル
80、90 プラズマ発生器
91 プラズマ生成部
93 シャワーヘッド
131a アンモニアガス供給源
131b 窒素ガス供給源
P1〜P3 処理領域
W ウエハ
Claims (10)
- 基板の表面に形成された窪み内に、ALDで底面及び側面からシリコン窒化膜を徐々に埋め込んでゆき、前記窪み内の中央部の隙間を狭めるように側面から中央に向かって薄膜を堆積させる工程と、
前記側面から中央に向かって堆積した前記薄膜同士を繋げて前記中央の隙間を埋める直前の段階において、前記窪み内に第1の窒素ラジカルを吸着させる工程と、
前記窪み内において、前記第1の窒素ラジカル上にシリコン含有ガスを物理吸着させる工程と、
前記窪み内に第2の窒素ラジカルを供給し、前記シリコン含有ガスを前記第1の窒素ラジカルから脱離させるとともに、脱離した前記シリコン含有ガスと前記第2の窒素ラジカルとを反応させて前記中央の隙間を埋めるようにシリコン窒化膜を堆積させる工程と、を有するシリコン窒化膜の成膜方法。 - 前記シリコン窒化膜を堆積させる工程は、CVDにより行われる請求項1に記載のシリコン窒化膜の成膜方法。
- 前記シリコン含有ガスを物理吸着させる工程と、前記中央の隙間を埋めるようにシリコン窒化膜を堆積させる工程は、前記中央の隙間を完全に埋めるまで繰り返される請求項1又は2に記載のシリコン窒化膜の成膜方法。
- 前記側面から中央に向かって薄膜を堆積させる工程は、前記窪み内の上部に前記シリコン含有ガスの吸着を阻害する吸着阻害ガスを吸着させ、前記シリコン含有ガスに対する吸着阻害領域を前記窪み内の上部に形成する工程と、
前記窪み内に前記シリコン含有ガスを供給し、前記窪み内の前記吸着阻害領域以外の領域に前記シリコン含有ガスを吸着させる工程と、
前記窪み内にアンモニアガスを供給し、前記窪み内に吸着した前記シリコン含有ガスと前記アンモニアガスとを反応させ、シリコン窒化膜の分子層を前記窪み内に堆積させる工程と、
前記吸着阻害領域を前記窪み内の上部に形成する工程、前記吸着阻害領域以外の領域に前記シリコン含有ガスを吸着させる工程及び前記シリコン窒化膜の分子層を前記窪み内に堆積させる工程を周期的に繰り返す工程と、を有する請求項1乃至3のいずれか一項に記載のシリコン窒化膜の成膜方法。 - 前記アンモニアガスは、プラズマ化されたアンモニアプラズマとして前記窪み内に供給される請求項4に記載のシリコン窒化膜の成膜方法。
- 前記吸着阻害ガスはプラズマにより活性化された吸着阻害基である請求項5に記載のシリコン窒化膜の成膜方法。
- 前記吸着阻害ガスを活性化するプラズマはリモートプラズマであり、
前記第1の窒素ラジカル、前記第2の窒素ラジカル及び前記アンモニアプラズマは、誘導結合型プラズマを用いて生成される請求項6に記載のシリコン窒化膜の成膜方法。 - 前記シリコン含有ガスは塩素を含有するガスであり、
前記吸着阻害ガスは塩素ガスである請求項4乃至7のいずれか一項に記載のシリコン窒化膜の成膜方法。 - 前記側面から中央に向かって薄膜を堆積させる工程、前記窪み内に第1の窒素ラジカルを吸着させる工程、前記第1の窒素ラジカル上にシリコン含有ガスを物理吸着させる工程及び前記中央の隙間を埋めるようにシリコン窒化膜を堆積させる工程を1サイクルとし、
前記窪み内を総て埋め込むまで、前記窪みの深さ範囲に応じて複数サイクル行われる請求項1乃至8のいずれか一項に記載のシリコン窒化膜の成膜方法。 - 処理室と、
該処理室内に設けられ、上面に径方向に沿って基板を載置可能な基板載置領域を有する回転テーブルと、
該回転テーブルの上方に、前記回転テーブルの回転方向に沿って設けられ、前記回転テーブル上にシリコン含有ガスを吸着させることが可能なシリコン含有ガス吸着領域と、
該シリコン含有ガス吸着領域の前記回転テーブルの回転方向下流側に設けられ、前記回転テーブル上にアンモニアプラズマ又は窒素プラズマを供給可能な窒化領域と、
該窒化領域の前記回転テーブルの回転方向下流側、かつ前記シリコン含有ガス吸着領域の上流側に設けられ、前記回転テーブル上に前記シリコン含有ガスの吸着を阻害する吸着阻害ガスを吸着させることが可能な吸着阻害ガス吸着領域と、
表面に窪みが形成された基板が前記基板載置領域上に載置された前記回転テーブルを回転させながら、前記窒化領域で前記基板に前記アンモニアプラズマを供給して前記窪み内を窒化する処理と、前記吸着阻害ガス吸着領域で前記窪み内の上部に前記吸着阻害ガスを吸着させ、前記シリコン含有ガスに対する吸着阻害領域を形成する処理と、前記シリコン含有ガス吸着領域で前記窪み内の前記吸着阻害領域以外の領域に前記シリコン含有ガスを吸着させる処理と、を周期的に繰り返して前記窪み内に、中央部に隙間を有するV字の断面形状を有するシリコン窒化膜の成膜を行う成膜工程と、
前記回転テーブルを回転させながら前記シリコン含有ガス吸着領域で前記窪み内の表面に前記シリコン含有ガスを物理吸着させる処理と、前記窒化領域で前記窪み内に前記窒素プラズマを供給し、物理吸着した前記シリコン含有ガスを解離させるとともに前記窒素プラズマと反応させ、中央部の前記隙間にシリコン窒化膜を満たすシームレス工程と、を実施する制御部と、を有する成膜装置。
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