JP6929209B2 - シリコン窒化膜の成膜方法及び成膜装置 - Google Patents
シリコン窒化膜の成膜方法及び成膜装置 Download PDFInfo
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Description
前記基板の表面に活性化された塩素含有ガスを供給し、前記基板の表面全体に塩素ラジカルを吸着させる塩素ラジカル吸着工程と、
前記塩素ラジカルが吸着した前記基板に活性化された窒化ガスを供給し、前記平坦面において吸着した塩素ラジカルを脱着させて、前記平坦面における前記基板の表面を窒化することによりシリコン吸着サイトを形成する窒化工程と、
前記基板にシリコンと塩素を含有する原料ガスを供給し、前記シリコン吸着サイト上に原料ガスを吸着させる原料ガス吸着工程と、を有する。
まず、本発明の実施形態に係る成膜装置について説明する。図1から図3までを参照すると、本実施形態に係る成膜装置は、ほぼ円形の平面形状を有する扁平な真空容器1と、真空容器1内に設けられ、真空容器1の中心に回転中心を有する回転テーブル2と、を備えている。真空容器1は、内部に収容したウエハの表面上に成膜処理を行うための処理室である。真空容器1は、有底の円筒形状を有する容器本体12と、容器本体12の上面に対して、例えばOリングなどのシール部材13(図1)を介して気密に着脱可能に配置される天板11とを有している。
次に、図12を用いて、本発明の実施形態に係るシリコン窒化膜の成膜方法について上述の成膜装置を用いて行う場合を例にとり説明する。図12は、本発明の実施形態に係る成膜方法の一例の一連の工程を示した図である。
次に、本実施形態に係るシリコン窒化膜の成膜方法及び成膜装置の実施例1について説明する。
実施例2では、塩素ガスの流量を75sccm、サイクル数を1655サイクル、処理時間を9930秒とし、これ以外の条件を実施例1と同じとした。図16は、実施例2に係るシリコン窒化膜の成膜方法の実施結果を示したSEM画像である。図16に示されるように、実施例2の条件で、ウエハWのトレンチT同士の間の平坦面にシリコン窒化膜が形成されているが、ウエハWに形成されたトレンチTの底面及び側面にはシリコン窒化膜は形成されていなかった。上記の本発明の実施形態に示したシリコン窒化膜の成膜方法により、トレンチTが形成されたウエハWに対して、トレンチT同士の間の平坦面に選択的にシリコン窒化膜を形成できることが確認された。
2 回転テーブル
4 凸状部
5 突出部
7 ヒータユニット
11 天板
12 容器本体
15 搬送口
24 凹部
31〜33 反応ガスノズル
41、42 分離ガスノズル
80、90 プラズマ発生器
91 プラズマ生成部
93 シャワーヘッド部
130〜132 ガス供給源
P1〜P3 処理領域
W ウエハ
Claims (14)
- 平坦面に複数の微細凹部が形成された表面を有する基板の前記微細凹部同士の間の前記平坦面上に選択的にシリコン窒化膜を形成するシリコン窒化膜の成膜方法であって、
前記基板の表面に活性化された塩素含有ガスを供給し、前記基板の表面全体に塩素ラジカルを吸着させる塩素ラジカル吸着工程と、
前記塩素ラジカルが吸着した前記基板に活性化された窒化ガスを供給し、前記平坦面において吸着した塩素ラジカルを脱着させて、前記平坦面における前記基板の表面を窒化することによりシリコン吸着サイトを形成する窒化工程と、
前記基板にシリコンと塩素を含有する原料ガスを供給し、前記シリコン吸着サイト上に原料ガスを吸着させる原料ガス吸着工程と、を有するシリコン窒化膜の成膜方法。 - 前記塩素含有ガスは、リモートプラズマ発生器を用いて活性化される請求項1に記載のシリコン窒化膜の成膜方法。
- 前記窒化ガスは、誘導結合プラズマにより活性化される請求項1又は2に記載のシリコン窒化膜の成膜方法。
- 前記塩素含有ガスは、Cl2含有ガスである請求項1乃至3のいずれか一項に記載のシリコン窒化膜の成膜方法。
- 前記窒化ガスは、NH3含有ガス又はN2含有ガスである請求項1乃至4のいずれか一項に記載のシリコン窒化膜の成膜方法。
- 前記原料ガスはジクロロシランである請求項1乃至5のいずれか一項に記載のシリコン窒化膜の成膜方法。
- 前記微細凹部は、トレンチ又はビアホールである請求項1乃至6のいずれか一項に記載のシリコン窒化膜の成膜方法。
- 前記塩素ラジカル吸着工程、前記窒化工程及び前記原料ガス吸着工程を1サイクルとし、該1サイクルが複数サイクル繰り返される請求項1乃至7のいずれか一項に記載のシリコン窒化膜の成膜方法。
- 前記窒化工程と前記原料ガス吸着工程との間、及び前記原料ガス吸着工程と前記塩素ラジカル吸着工程との間に、前記基板にパージガスを供給するパージ工程を更に有する請求項8に記載のシリコン窒化膜の成膜方法。
- 前記基板は、処理室内に設けられた回転テーブル上に周方向に沿って配置され、
前記処理室内の前記回転テーブルより上方には、前記回転テーブルの回転方向に沿って活性化された前記塩素含有ガスを前記基板に供給可能な塩素含有ガス供給領域と、活性化された前記窒化ガスを前記基板に供給可能な窒化ガス供給領域と、前記原料ガスを前記基板に供給可能な原料ガス供給領域が互いに離間して設けられ、
前記回転テーブルを回転させながら、前記塩素ラジカル吸着工程と、前記窒化工程と、前記原料ガス吸着工程を含むサイクルを実施する請求項8又は9に記載のシリコン窒化膜の成膜方法。 - 前記回転テーブルを回転させながら、前記塩素ラジカル吸着工程と、前記窒化工程と、前記原料ガス吸着工程を含むサイクルを実施する前に、前記窒化ガス供給領域における前記窒化ガスの供給と前記原料ガス供給領域における前記原料ガスの供給を停止し、前記塩素含有ガス供給領域において活性化された前記塩素含有ガスを前記基板に供給しながら前記回転テーブルを少なくとも1回回転させる第2の塩素ラジカル吸着工程をさらに有する請求項10に記載のシリコン窒化膜の成膜方法。
- 前記サイクルが、前記原料ガス吸着工程と前記塩素ラジカル吸着工程の間に、前記窒化ガス供給領域における前記窒化ガスの供給と前記原料ガス供給領域における前記原料ガスの供給を停止し、前記塩素含有ガス供給領域において活性化された前記塩素含有ガスを前記基板に供給しながら前記回転テーブルを少なくとも1回回転させる第3の塩素ラジカル吸着工程を含む請求項11に記載のシリコン窒化膜の成膜方法。
- 平坦面に複数の微細凹部が形成された表面を有する基板の前記微細凹部同士の間の前記平坦面上に選択的にシリコン窒化膜を形成する成膜装置であって、
処理室と、
該処理室内に設けられ、表面上に基板を載置可能な基板載置領域を有する回転テーブルと、
該回転テーブル上に回転方向に沿って所定領域に設けられ、前記回転テーブル上に活性化された塩素含有ガスを供給可能な塩素含有ガス供給領域と、
前記回転テーブル上であって、該塩素含有ガス供給領域の前記回転方向における下流側に設けられ、前記回転テーブル上に活性化された窒化ガスを供給可能な窒化ガス供給領域と、
前記回転テーブル上であって、該窒化ガス供給領域の前記回転方向における下流側に設けられ、前記回転テーブル上にシリコンと塩素を含有する原料ガスを供給可能な原料ガス供給領域と、
前記窒化ガス供給領域における前記窒化ガスの供給と前記原料ガス供給領域における前記原料ガスの供給を停止し、前記塩素含有ガス供給領域において活性化された前記塩素含有ガスを前記基板に供給しながら前記回転テーブルを回転させて成膜処理の初期段階における塩素ラジカル吸着工程を実施し、前記塩素含有ガス供給領域において活性化された前記塩素含有ガスを前記基板に供給し、前記窒化ガス供給領域において活性化された前記窒化ガスを前記基板に供給し、前記原料ガス供給領域において前記原料ガスを前記基板に供給しながら前記回転テーブルを回転させて、塩素ラジカル吸着工程と、窒化工程と、原料ガス吸着工程を含む工程を1サイクルとして複数サイクル実施する制御を行う制御手段と、を有する成膜装置。 - 前記塩素含有ガス供給領域に活性化された前記塩素含有ガスを供給可能なリモートプラズマ発生器と、
前記窒化ガス供給領域に前記活性化された前記窒化ガスを供給可能な誘導結合プラズマのプラズマ発生器と、を有する請求項13に記載の成膜装置。
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