JP2017092098A - 窒化膜の形成方法 - Google Patents
窒化膜の形成方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 65
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 44
- 238000005121 nitriding Methods 0.000 claims abstract description 54
- 239000000460 chlorine Substances 0.000 claims abstract description 33
- 238000001179 sorption measurement Methods 0.000 claims abstract description 12
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 9
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 25
- 230000008569 process Effects 0.000 claims description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 5
- 150000003377 silicon compounds Chemical class 0.000 claims description 5
- 230000003247 decreasing effect Effects 0.000 claims description 4
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 3
- 230000003213 activating effect Effects 0.000 claims description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 3
- 239000005049 silicon tetrachloride Substances 0.000 claims description 3
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 claims description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 3
- 239000005052 trichlorosilane Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 135
- 235000012431 wafers Nutrition 0.000 description 37
- 230000007246 mechanism Effects 0.000 description 26
- 150000001875 compounds Chemical class 0.000 description 22
- 239000011261 inert gas Substances 0.000 description 20
- 239000002243 precursor Substances 0.000 description 17
- 230000001965 increasing effect Effects 0.000 description 13
- 238000000231 atomic layer deposition Methods 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 10
- 238000000926 separation method Methods 0.000 description 8
- 238000005192 partition Methods 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
Description
本発明においてはALD法により窒化膜を形成するが、本実施形態では窒化膜としてシリコン窒化膜(SiN膜)を形成する場合を例にとって説明する。
本実施形態のようにALD法によりSiN膜を形成する場合には、Siプリカーサ(成膜原料ガス)の吸着と窒化活性種による窒化処理とを所定回数繰り返す。
以下、本実施形態の具体的なシリコン窒化膜の形成方法について、図5を参照して説明する。図5は本実施形態に係る窒化膜の形成方法を説明するための工程断面図である。
次に、上記実施形態に係る窒化膜の形成方法を実施するための成膜装置の例について説明する。
図7は本発明の一実施形態に係る窒化膜の形成方法を実施するための成膜装置の第1例を概略的に示す縦断面図、図8は図7に示す成膜装置の水平断面図である。
すなわち、最初に、処理容器1内の温度を150〜600℃にし、50〜100枚の微細トレンチを有するウエハWが搭載されたウエハボート5を処理容器1内に搬入し、排気装置40により処理容器1内を排気しつつ、処理容器1内を13〜665Paに調圧する。
図9は本発明の一実施形態に係る窒化膜の形成方法を実施するための成膜装置の第2例を概略的に示す水平断面図である。
処理容器61内の搬入出口63に対応する部分は搬入出部65となっており、この搬入出部65において、ターンテーブル62上へのウエハWの搬入およびターンテーブル62上のウエハWの搬出が行われる。
すなわち、最初に、ターンテーブル62を加熱した状態で、複数枚、例えば5枚のウエハWを、順次ターンテーブル62上に載置し、ウエハWの温度を150〜600℃にし、処理容器61内を13〜665Paに調圧する。
以上、本発明の実施形態について説明したが、この発明は、上記の実施形態に限定されることはなく、その趣旨を逸脱しない範囲で種々変形可能である。
5;ウエハボート
14;窒化ガス供給機構
15;Cl含有Si化合物ガス供給機構
16;不活性ガス供給機構
19,22;ガス分散ノズル
30;プラズマ生成機構
33;プラズマ電極
35;高周波電源
40;排気装置
41;加熱機構
61;処理容器
62;ターンテーブル
65;搬入出部
71;第1処理エリア(Cl含有Si化合物ガス供給エリア)
73;第3処理エリア(窒化エリア)
77;プラズマ生成機構
100,200;成膜装置
W;半導体ウエハ(被処理基板)
Claims (8)
- 表面に微細凹部が形成された被処理基板に、成膜しようとする窒化膜を構成する元素と塩素とを含有する成膜原料ガスを吸着させる吸着工程と、前記吸着された成膜原料ガスを窒化活性種により窒化させる窒化工程とを繰り返して微細凹部内に窒化膜を形成する窒化膜の形成方法であって、
前記窒化工程は、窒化活性種としてNH*活性種およびN*活性種を生成し、これらの濃度をコントロールすることにより、前記微細凹部内で前記成膜原料ガスが吸着する領域を変化させることを特徴とする窒化膜の形成方法。 - 前記窒化工程において、N*活性種の濃度が高い状態から連続的にN*活性種の濃度を減少させ、前記微細凹部の底部から窒化膜を成長させる成膜段階を行うことを特徴とする請求項1に記載の窒化膜の形成方法。
- 前記成膜段階に先立って、前記窒化工程をNH*活性種を主体として行い、コンフォーマルな窒化膜を形成する初期成膜段階を行うことを特徴とする請求項2に記載の窒化膜の形成方法。
- 前記窒化工程において、H含有ガスとN2ガスとを活性化することによりNH*活性種およびN*活性種を生成することを特徴とする請求項1から請求項3のいずれか1項に記載の窒化膜の形成方法。
- 前記H含有ガスは、NH3ガスまたはH2ガスであることを特徴とする請求項4に記載の窒化膜の形成方法。
- 前記NH*活性種およびN*活性種の濃度は、前記H含有ガスおよび前記N2ガスの流量により制御することを特徴とする請求項4または請求項5に記載の窒化膜の形成方法。
- 前記成膜原料ガスは塩素含有シリコン化合物であり、前記窒化膜はシリコン窒化膜であることを特徴とする請求項1から請求項6のいずれか1項に記載の窒化膜の形成方法。
- 前記塩素含有シリコン化合物は、ジクロロシラン、モノクロロシラン、トリクロロシラン、シリコンテトラクロライド、およびヘキサクロロジシランからなる群から選択された少なくとも一種であることを特徴とする請求項7に記載の窒化膜の形成方法。
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Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017139306A (ja) * | 2016-02-03 | 2017-08-10 | 東京エレクトロン株式会社 | 成膜方法 |
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