JP2023171342A5 - - Google Patents

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Publication number
JP2023171342A5
JP2023171342A5 JP2023082382A JP2023082382A JP2023171342A5 JP 2023171342 A5 JP2023171342 A5 JP 2023171342A5 JP 2023082382 A JP2023082382 A JP 2023082382A JP 2023082382 A JP2023082382 A JP 2023082382A JP 2023171342 A5 JP2023171342 A5 JP 2023171342A5
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JP
Japan
Prior art keywords
sample
mask
sample holder
bib
steps include
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023082382A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023171342A (ja
Filing date
Publication date
Priority claimed from US17/748,972 external-priority patent/US12106931B2/en
Application filed filed Critical
Publication of JP2023171342A publication Critical patent/JP2023171342A/ja
Publication of JP2023171342A5 publication Critical patent/JP2023171342A5/ja
Pending legal-status Critical Current

Links

JP2023082382A 2022-05-19 2023-05-18 ブロードイオンビーム（ｂｉｂ）システムを用いた複数の試料のより効率的な処理のために試料を事前に位置合わせするためのシステム及び方法 Pending JP2023171342A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/748,972 2022-05-19
US17/748,972 US12106931B2 (en) 2022-05-19 2022-05-19 Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a Broad Ion Beam (BIB) system

Publications (2)

Publication Number Publication Date
JP2023171342A JP2023171342A (ja) 2023-12-01
JP2023171342A5 true JP2023171342A5 (cg-RX-API-DMAC7.html) 2026-05-11

Family

ID=86378497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023082382A Pending JP2023171342A (ja) 2022-05-19 2023-05-18 ブロードイオンビーム（ｂｉｂ）システムを用いた複数の試料のより効率的な処理のために試料を事前に位置合わせするためのシステム及び方法

Country Status (4)

Country Link
US (1) US12106931B2 (cg-RX-API-DMAC7.html)
EP (1) EP4279899B1 (cg-RX-API-DMAC7.html)
JP (1) JP2023171342A (cg-RX-API-DMAC7.html)
CN (1) CN117091926B (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12165833B2 (en) * 2022-05-19 2024-12-10 Fei Company System and methods for automated processing of multiple samples in a BIB system
US12548731B2 (en) * 2022-09-30 2026-02-10 Fei Company Systems and methods for transferring a sample

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004017381A2 (en) * 2002-08-19 2004-02-26 The Trustees Of Columbia University In The City Of New York Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions
JP5462028B2 (ja) * 2010-02-23 2014-04-02 Ｎｓｋテクノロジー株式会社 露光装置、露光方法及び基板の製造方法
SG177822A1 (en) * 2010-07-06 2012-02-28 Camtek Ltd Method and system for preparing a sample
SG177823A1 (en) * 2010-07-06 2012-02-28 Camtek Ltd Method and system for preparing a lamella
US9761412B2 (en) * 2014-05-09 2017-09-12 Hitachi High-Technologies Corporation Ion milling apparatus and sample processing method
MY183097A (en) * 2014-08-05 2021-02-13 Intevac Inc Implant masking and alignment system with rollers
US9576772B1 (en) * 2015-08-31 2017-02-21 Fei Company CAD-assisted TEM prep recipe creation
KR102145816B1 (ko) * 2016-02-26 2020-08-19 주식회사 히타치하이테크 이온 밀링 장치, 및 이온 밀링 방법
EP3196919B1 (en) * 2016-10-20 2018-09-19 FEI Company Cryogenic specimen processing in a charged particle microscope
US11476120B2 (en) 2017-03-30 2022-10-18 Intel Corporation Method of sample preparation using dual ion beam trenching
CN109979793B (zh) * 2017-12-27 2023-11-07 Fei 公司 复合型sem-cl和fib-ioe显微术
US20210088770A1 (en) * 2019-09-24 2021-03-25 Fei Company Pose estimation using sematic segmentation
JP2020194789A (ja) * 2020-08-11 2020-12-03 株式会社日立ハイテク イオンミリング方法、およびイオンミリング装置

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