JP2023161934A - コンタクトプローブ - Google Patents
コンタクトプローブ Download PDFInfo
- Publication number
- JP2023161934A JP2023161934A JP2022072595A JP2022072595A JP2023161934A JP 2023161934 A JP2023161934 A JP 2023161934A JP 2022072595 A JP2022072595 A JP 2022072595A JP 2022072595 A JP2022072595 A JP 2022072595A JP 2023161934 A JP2023161934 A JP 2023161934A
- Authority
- JP
- Japan
- Prior art keywords
- contact probe
- metal conductor
- contact
- insulating coating
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 68
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 41
- 239000004020 conductor Substances 0.000 claims abstract description 36
- 238000000576 coating method Methods 0.000 claims abstract description 24
- 238000007689 inspection Methods 0.000 claims abstract description 24
- 239000011248 coating agent Substances 0.000 claims abstract description 23
- 238000005452 bending Methods 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 14
- 239000010410 layer Substances 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 238000007747 plating Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000004070 electrodeposition Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 239000002320 enamel (paints) Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003055 poly(ester-imide) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910000597 tin-copper alloy Inorganic materials 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
- G01R1/06761—Material aspects related to layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022072595A JP2023161934A (ja) | 2022-04-26 | 2022-04-26 | コンタクトプローブ |
| KR1020230020588A KR20230151879A (ko) | 2022-04-26 | 2023-02-16 | 콘택트 프로브 |
| CN202310431544.2A CN116990557A (zh) | 2022-04-26 | 2023-04-21 | 接触探针 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022072595A JP2023161934A (ja) | 2022-04-26 | 2022-04-26 | コンタクトプローブ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2023161934A true JP2023161934A (ja) | 2023-11-08 |
Family
ID=88528996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022072595A Pending JP2023161934A (ja) | 2022-04-26 | 2022-04-26 | コンタクトプローブ |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2023161934A (ko) |
| KR (1) | KR20230151879A (ko) |
| CN (1) | CN116990557A (ko) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317412A (ja) * | 2005-05-16 | 2006-11-24 | Totoku Electric Co Ltd | 絶縁被膜付きプローブ針及びその製造方法 |
| JP2012127869A (ja) * | 2010-12-16 | 2012-07-05 | Mitsubishi Cable Ind Ltd | 絶縁被膜プローブピン及びその製造方法 |
| JP2015025697A (ja) * | 2013-07-25 | 2015-02-05 | 東京特殊電線株式会社 | プローブユニット |
| JP2017215221A (ja) * | 2016-06-01 | 2017-12-07 | イビデン株式会社 | プローブ及びその製造方法 |
| JP2020183911A (ja) * | 2019-05-09 | 2020-11-12 | 東京特殊電線株式会社 | プローブ針及びプローブユニット |
| JP2021189066A (ja) * | 2020-06-01 | 2021-12-13 | 東京特殊電線株式会社 | プローブ針及びプローブユニット |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007322369A (ja) | 2006-06-05 | 2007-12-13 | Totoku Electric Co Ltd | コンタクトプローブ及びその製造方法 |
| JP2021105547A (ja) | 2019-12-26 | 2021-07-26 | 日本発條株式会社 | コンタクトプローブ |
-
2022
- 2022-04-26 JP JP2022072595A patent/JP2023161934A/ja active Pending
-
2023
- 2023-02-16 KR KR1020230020588A patent/KR20230151879A/ko unknown
- 2023-04-21 CN CN202310431544.2A patent/CN116990557A/zh active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317412A (ja) * | 2005-05-16 | 2006-11-24 | Totoku Electric Co Ltd | 絶縁被膜付きプローブ針及びその製造方法 |
| JP2012127869A (ja) * | 2010-12-16 | 2012-07-05 | Mitsubishi Cable Ind Ltd | 絶縁被膜プローブピン及びその製造方法 |
| JP2015025697A (ja) * | 2013-07-25 | 2015-02-05 | 東京特殊電線株式会社 | プローブユニット |
| JP2017215221A (ja) * | 2016-06-01 | 2017-12-07 | イビデン株式会社 | プローブ及びその製造方法 |
| JP2020183911A (ja) * | 2019-05-09 | 2020-11-12 | 東京特殊電線株式会社 | プローブ針及びプローブユニット |
| JP2021189066A (ja) * | 2020-06-01 | 2021-12-13 | 東京特殊電線株式会社 | プローブ針及びプローブユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230151879A (ko) | 2023-11-02 |
| CN116990557A (zh) | 2023-11-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20221221 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20230516 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231107 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20240430 |