JP2023111073A - 圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置 - Google Patents

圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置 Download PDF

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Publication number
JP2023111073A
JP2023111073A JP2022012710A JP2022012710A JP2023111073A JP 2023111073 A JP2023111073 A JP 2023111073A JP 2022012710 A JP2022012710 A JP 2022012710A JP 2022012710 A JP2022012710 A JP 2022012710A JP 2023111073 A JP2023111073 A JP 2023111073A
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Japan
Prior art keywords
piezoelectric element
array substrate
element array
piezoelectric
thin film
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JP2022012710A
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Japanese (ja)
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JP2023111073A5 (https=
Inventor
賢二 世良
Kenji Sera
健一 林
Kenichi Hayashi
浩史 芳賀
Hiroshi Haga
伸 竹内
Shin Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Tianma Microelectronics Co Ltd
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Shanghai Tianma Microelectronics Co Ltd
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Publication date
Application filed by Shanghai Tianma Microelectronics Co Ltd filed Critical Shanghai Tianma Microelectronics Co Ltd
Priority to JP2022012710A priority Critical patent/JP2023111073A/ja
Priority to CN202310062628.3A priority patent/CN116528654A/zh
Priority to US18/157,319 priority patent/US20230241646A1/en
Publication of JP2023111073A publication Critical patent/JP2023111073A/ja
Publication of JP2023111073A5 publication Critical patent/JP2023111073A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B06B1/0692—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
JP2022012710A 2022-01-31 2022-01-31 圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置 Pending JP2023111073A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022012710A JP2023111073A (ja) 2022-01-31 2022-01-31 圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置
CN202310062628.3A CN116528654A (zh) 2022-01-31 2023-01-18 制造压电元件阵列板的方法、压电元件阵列板和极化装置
US18/157,319 US20230241646A1 (en) 2022-01-31 2023-01-20 Method of manufacturing piezoelectric element array board, piezoelectric element array board, and poling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022012710A JP2023111073A (ja) 2022-01-31 2022-01-31 圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置

Publications (2)

Publication Number Publication Date
JP2023111073A true JP2023111073A (ja) 2023-08-10
JP2023111073A5 JP2023111073A5 (https=) 2024-12-13

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JP2022012710A Pending JP2023111073A (ja) 2022-01-31 2022-01-31 圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置

Country Status (3)

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US (1) US20230241646A1 (https=)
JP (1) JP2023111073A (https=)
CN (1) CN116528654A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121057488A (zh) * 2025-07-28 2025-12-02 合肥领航微系统集成有限公司 一种基于tft晶体管的超声波传感器及其制备工艺

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026030233A1 (en) * 2024-07-29 2026-02-05 Qualcomm Incorporated Flexible acoustic sensor systems and fabrication thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5254504A (en) * 1989-04-13 1993-10-19 Trustees Of The University Of Pennsylvania Method of manufacturing ferroelectric MOSFET sensors
JP2009179649A (ja) * 2008-01-29 2009-08-13 Konica Minolta Medical & Graphic Inc 有機高分子材料、有機複合材料、有機圧電材料、その形成方法及び超音波探触子
JP2009300941A (ja) * 2008-06-17 2009-12-24 Fdk Corp 磁気光学空間光変調器の製造方法
JP2012045539A (ja) * 2010-07-30 2012-03-08 Ricoh Co Ltd 薄膜形成装置、薄膜形成方法、圧電素子の形成方法、液滴吐出ヘッド及びインクジェット記録装置
JP2012049254A (ja) * 2010-08-25 2012-03-08 Ricoh Co Ltd 製造装置、製造方法、液体吐出ヘッドおよびインクジェットプリンタ
JP2014175551A (ja) * 2013-03-11 2014-09-22 Ricoh Co Ltd 電気−機械変換素子の製造装置、電気−機械変換素子の製造方法、電気−機械変換素子、液滴吐出ヘッド、液滴吐出装置
JP2016526165A (ja) * 2013-06-03 2016-09-01 クアルコム，インコーポレイテッド コーティングされた圧電層を有する超音波受信機
JP2017503241A (ja) * 2013-11-21 2017-01-26 スリーエム イノベイティブ プロパティズ カンパニー 多層圧電ポリマーフィルムデバイス及び方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5254504A (en) * 1989-04-13 1993-10-19 Trustees Of The University Of Pennsylvania Method of manufacturing ferroelectric MOSFET sensors
JP2009179649A (ja) * 2008-01-29 2009-08-13 Konica Minolta Medical & Graphic Inc 有機高分子材料、有機複合材料、有機圧電材料、その形成方法及び超音波探触子
JP2009300941A (ja) * 2008-06-17 2009-12-24 Fdk Corp 磁気光学空間光変調器の製造方法
JP2012045539A (ja) * 2010-07-30 2012-03-08 Ricoh Co Ltd 薄膜形成装置、薄膜形成方法、圧電素子の形成方法、液滴吐出ヘッド及びインクジェット記録装置
JP2012049254A (ja) * 2010-08-25 2012-03-08 Ricoh Co Ltd 製造装置、製造方法、液体吐出ヘッドおよびインクジェットプリンタ
JP2014175551A (ja) * 2013-03-11 2014-09-22 Ricoh Co Ltd 電気−機械変換素子の製造装置、電気−機械変換素子の製造方法、電気−機械変換素子、液滴吐出ヘッド、液滴吐出装置
JP2016526165A (ja) * 2013-06-03 2016-09-01 クアルコム，インコーポレイテッド コーティングされた圧電層を有する超音波受信機
JP2017503241A (ja) * 2013-11-21 2017-01-26 スリーエム イノベイティブ プロパティズ カンパニー 多層圧電ポリマーフィルムデバイス及び方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121057488A (zh) * 2025-07-28 2025-12-02 合肥领航微系统集成有限公司 一种基于tft晶体管的超声波传感器及其制备工艺

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CN116528654A (zh) 2023-08-01

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