CN116528654A - 制造压电元件阵列板的方法、压电元件阵列板和极化装置 - Google Patents

制造压电元件阵列板的方法、压电元件阵列板和极化装置 Download PDF

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Publication number
CN116528654A
CN116528654A CN202310062628.3A CN202310062628A CN116528654A CN 116528654 A CN116528654 A CN 116528654A CN 202310062628 A CN202310062628 A CN 202310062628A CN 116528654 A CN116528654 A CN 116528654A
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CN
China
Prior art keywords
piezoelectric element
thin film
piezoelectric
element array
array plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310062628.3A
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English (en)
Chinese (zh)
Inventor
世良贤二
林健一
芳贺浩史
竹内伸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Tianma Microelectronics Co Ltd
Original Assignee
Shanghai Tianma Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Tianma Microelectronics Co Ltd filed Critical Shanghai Tianma Microelectronics Co Ltd
Publication of CN116528654A publication Critical patent/CN116528654A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B06B1/0692—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
CN202310062628.3A 2022-01-31 2023-01-18 制造压电元件阵列板的方法、压电元件阵列板和极化装置 Pending CN116528654A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-012710 2022-01-31
JP2022012710A JP2023111073A (ja) 2022-01-31 2022-01-31 圧電素子アレイ基板の製造方法、圧電素子アレイ基板及び分極装置

Publications (1)

Publication Number Publication Date
CN116528654A true CN116528654A (zh) 2023-08-01

Family

ID=87400012

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310062628.3A Pending CN116528654A (zh) 2022-01-31 2023-01-18 制造压电元件阵列板的方法、压电元件阵列板和极化装置

Country Status (3)

Country Link
US (1) US20230241646A1 (https=)
JP (1) JP2023111073A (https=)
CN (1) CN116528654A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026030233A1 (en) * 2024-07-29 2026-02-05 Qualcomm Incorporated Flexible acoustic sensor systems and fabrication thereof
CN121057488B (zh) * 2025-07-28 2026-03-27 合肥领航微系统集成有限公司 一种基于tft晶体管的超声波传感器及其制备工艺

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5254504A (en) * 1989-04-13 1993-10-19 Trustees Of The University Of Pennsylvania Method of manufacturing ferroelectric MOSFET sensors
JP2009179649A (ja) * 2008-01-29 2009-08-13 Konica Minolta Medical & Graphic Inc 有機高分子材料、有機複合材料、有機圧電材料、その形成方法及び超音波探触子
JP2009300941A (ja) * 2008-06-17 2009-12-24 Fdk Corp 磁気光学空間光変調器の製造方法
JP5919630B2 (ja) * 2010-07-30 2016-05-18 株式会社リコー 薄膜形成装置、薄膜形成方法、圧電素子の形成方法、及び液滴吐出ヘッドの製造方法
JP2012049254A (ja) * 2010-08-25 2012-03-08 Ricoh Co Ltd 製造装置、製造方法、液体吐出ヘッドおよびインクジェットプリンタ
JP6221270B2 (ja) * 2013-03-11 2017-11-01 株式会社リコー 電気−機械変換素子の製造装置、電気−機械変換素子の製造方法
US20140355387A1 (en) * 2013-06-03 2014-12-04 Qualcomm Incorporated Ultrasonic receiver with coated piezoelectric layer
CN105765750B (zh) * 2013-11-21 2018-07-20 3M创新有限公司 多层压电聚合物膜装置和方法

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Publication number Publication date
JP2023111073A (ja) 2023-08-10
US20230241646A1 (en) 2023-08-03

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