JP2023107777A - 搬送車 - Google Patents
搬送車 Download PDFInfo
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- JP2023107777A JP2023107777A JP2023080903A JP2023080903A JP2023107777A JP 2023107777 A JP2023107777 A JP 2023107777A JP 2023080903 A JP2023080903 A JP 2023080903A JP 2023080903 A JP2023080903 A JP 2023080903A JP 2023107777 A JP2023107777 A JP 2023107777A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Load-Engaging Elements For Cranes (AREA)
- Handcart (AREA)
Abstract
Description
より保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能な技術の実現が望まれる。
手方向(移動経路2が延びる方向)を経路長手方向Lとし、移動経路2の幅方向を経路幅方向Wとする。経路幅方向Wは、経路長手方向L及び鉛直方向Vの双方に直交する方向である。また、搬送車1を基準として定義される方向(すなわち、搬送車1の姿勢に応じて変化する方向)であって、移動経路2に配置された状態で経路長手方向Lに沿う方向を車体前後方向Xとし、搬送車1を基準として定義される方向であって、移動経路2に配置された状態で経路幅方向Wに沿う方向を車体左右方向Yとする。本実施形態では、鉛直方向Vが「昇降方向」に相当する。
れる構成とすることができる。
れる場合を例示しているが、開口部92が車体前後方向Xの一方側を向く向きで、物品90が保持部20に保持されてもよい。なお、搬送車1が、保持部20を本体部10に対して鉛直方向Vに沿う軸心周りに回転させる機構を備える構成とすることもできる。物品90に収容されている基板93が、搬送車1の走行時に開口部92から物品90の外部に移動することをより確実に防止するという観点から、開口部92がカバー部14の壁部を向く向きで、物品90が保持部20に保持される構成とすると好適である。
数の回転体51は、同軸に並べて配置されてもよい。また、図3では、伝動部材52の連結部52aが、当該伝動部材52が巻回された回転体51の直下に配置されているが、伝動部材52における回転体51から繰り出された部分が、案内用回転体(案内用プーリ等)に巻き掛けられ、伝動部材52の連結部52aが、当該案内用回転体の直下に配置される構成としてもよい。
では、基板93)の出し入れが行われる際の収容物の移動方向に沿って、物品90の外部に向かう方向を、開口部92の向きとしており、本実施形態では、物品90の底面90cが水平面に沿う姿勢が、開口部92が水平方向を向く水平姿勢S2である。
られても、搬送車1とは独立に設けられてもよい。また、制御部80が互いに通信可能に分離された複数のハードウェアを備える場合、一部のハードウェアが搬送車1に設けられ、残りのハードウェアが搬送車1とは独立に設けられてもよい。
定領域ΔV2の外部に配置されている状態では、傾斜角度Aを第1角度とし、保持部20が第2位置P2に配置されている状態では、傾斜角度Aを第2角度とする制御である。ここで、第1角度は、物品90(保持部20に保持されてる物品90、以下同様)の姿勢が傾斜姿勢S1(開口部92が斜め上方を向く物品90の姿勢)となる角度であり、例えば5度とされる。また、第2角度は、物品90の姿勢が水平姿勢S2(開口部92が水平方向を向く物品90の姿勢)となる角度であり、本実施形態では0度である。なお、図6~図13では、鉛直方向Vにおける規定領域ΔV2の外部の領域を外部領域ΔV1としている。
次に、搬送車のその他の実施形態について説明する。
以下、上記において説明した搬送車の概要について説明する。
がない分、制御の簡素化や処理の高速化を図ることができる。
2:移動経路
10:本体部
20:保持部
21:第1部分
22:第2部分
40:角度調整機構
41:揺動部材
42:支持部材
50:昇降装置
51:回転体
52:伝動部材
73:揺動駆動部(駆動部)
90:物品
90b:側面
92:開口部
A:傾斜角度
P1:第1位置
P2:第2位置
P2a:対象第2位置
R:軸心
S1:傾斜姿勢
S2:水平姿勢
V:鉛直方向(昇降方向)
V2:下方
ΔV2:規定領域
Claims (6)
- 物品を搬送する搬送車であって、
移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、
前記保持部は、前記昇降装置に連結された第1部分と、前記第1部分を介して前記昇降装置に連結されると共に前記物品に接触する第2部分と、前記第1部分と前記第2部分との間に設けられ、前記第1部分に対する前記第2部分の傾斜角度を変更する角度調整機構と、を備えている、搬送車。 - 前記昇降装置は、回転駆動される複数の回転体と、複数の前記回転体のそれぞれに巻き取り及び繰り出し自在に巻回された伝動部材と、を備え、
前記第1部分は、前記伝動部材に連結されている、請求項1に記載の搬送車。 - 前記角度調整機構は、前記第2部分に固定された揺動部材と、前記第1部分に固定されていると共に前記揺動部材を水平方向に沿う軸心周りに回転可能に支持する支持部材と、を備え、
前記角度調整機構を駆動する駆動部が、前記揺動部材を前記軸心周りに揺動させるように構成されている、請求項1又は2に記載の搬送車。 - 前記物品は、側面に開口部を有する容器であり、
前記昇降装置は、第1位置と、前記保持部による前記物品の保持及び保持解除を行う位置であって前記第1位置よりも下方の第2位置との間で、前記保持部を昇降させ、
前記昇降方向における前記第2位置を含む領域を規定領域とし、前記開口部が斜め上方を向く前記物品の姿勢を傾斜姿勢とし、前記開口部が水平方向を向く前記物品の姿勢を水平姿勢として、
前記角度調整機構を駆動する駆動部は、前記保持部が前記物品を保持している場合に、傾斜角度調整制御を実行し、
前記傾斜角度調整制御は、前記保持部が前記規定領域の外部に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記傾斜姿勢となる角度である第1角度とし、前記保持部が前記第2位置に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記水平姿勢となる角度である第2角度とする制御である、請求項1から3のいずれか一項に記載の搬送車。 - 前記第2位置は、前記第1位置よりも下方の複数の位置を含み、
複数の前記第2位置のうちの、前記保持部の昇降動作の始点又は終点となる前記第2位置を対象第2位置として、
前記駆動部は、前記対象第2位置を含む領域を前記規定領域に設定して前記傾斜角度調整制御を実行する、請求項4に記載の搬送車。 - 前記駆動部は、前記物品を保持していない前記保持部が前記第2位置へ向かって下降している間、前記傾斜角度を前記第2角度とする、請求項4又は5に記載の搬送車。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023080903A JP7480887B2 (ja) | 2020-11-06 | 2023-05-16 | 搬送車 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020185880A JP7342841B2 (ja) | 2020-11-06 | 2020-11-06 | 搬送車 |
JP2023080903A JP7480887B2 (ja) | 2020-11-06 | 2023-05-16 | 搬送車 |
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JP2020185880A Division JP7342841B2 (ja) | 2020-11-06 | 2020-11-06 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
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JP2023107777A true JP2023107777A (ja) | 2023-08-03 |
JP7480887B2 JP7480887B2 (ja) | 2024-05-10 |
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JP2020185880A Active JP7342841B2 (ja) | 2020-11-06 | 2020-11-06 | 搬送車 |
JP2023080903A Active JP7480887B2 (ja) | 2020-11-06 | 2023-05-16 | 搬送車 |
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Application Number | Title | Priority Date | Filing Date |
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JP2020185880A Active JP7342841B2 (ja) | 2020-11-06 | 2020-11-06 | 搬送車 |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP7342841B2 (ja) |
KR (1) | KR20220061877A (ja) |
CN (1) | CN114435876A (ja) |
TW (1) | TW202222669A (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3981885B2 (ja) | 2003-05-20 | 2007-09-26 | 株式会社ダイフク | 搬送装置 |
JP4538729B2 (ja) | 2005-02-04 | 2010-09-08 | 株式会社ダイフク | 搬送車 |
JP4389181B2 (ja) | 2007-03-07 | 2009-12-24 | 株式会社ダイフク | 物品処理設備 |
JP6641926B2 (ja) | 2015-11-26 | 2020-02-05 | 株式会社ダイフク | 物品搬送設備 |
JP2017154840A (ja) | 2016-02-29 | 2017-09-07 | 株式会社ダイフク | 物品搬送設備 |
JP7373953B2 (ja) | 2019-09-19 | 2023-11-06 | 株式会社ディスコ | 収容カセット |
-
2020
- 2020-11-06 JP JP2020185880A patent/JP7342841B2/ja active Active
-
2021
- 2021-11-03 KR KR1020210149673A patent/KR20220061877A/ko unknown
- 2021-11-04 TW TW110141176A patent/TW202222669A/zh unknown
- 2021-11-05 CN CN202111306316.XA patent/CN114435876A/zh active Pending
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2023
- 2023-05-16 JP JP2023080903A patent/JP7480887B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR20220061877A (ko) | 2022-05-13 |
JP7342841B2 (ja) | 2023-09-12 |
CN114435876A (zh) | 2022-05-06 |
JP7480887B2 (ja) | 2024-05-10 |
TW202222669A (zh) | 2022-06-16 |
JP2022075222A (ja) | 2022-05-18 |
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