JP7302579B2 - 搬送車 - Google Patents
搬送車 Download PDFInfo
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- JP7302579B2 JP7302579B2 JP2020194359A JP2020194359A JP7302579B2 JP 7302579 B2 JP7302579 B2 JP 7302579B2 JP 2020194359 A JP2020194359 A JP 2020194359A JP 2020194359 A JP2020194359 A JP 2020194359A JP 7302579 B2 JP7302579 B2 JP 7302579B2
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- pair
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chain Conveyers (AREA)
- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
Description
次に、搬送車のその他の実施形態について説明する。
以下、上記において説明した搬送車の概要について説明する。
2:移動経路
10:本体部
20:保持装置
21:支持部
30:支持部材
30a:連結部
30b:先端部
31:第1支持部材
32:第2支持部材
41:第1揺動部材
41a:第1連結部
41b:第1先端部
42:第2揺動部材
42a:第2連結部
42b:第2先端部
43:連結部材(先端部に連結された部材)
50:昇降装置
61:付勢機構
62:規制機構
90:物品
90b:側面
90c:底面
91:被保持部
91a:被支持面
92:開口部
A:第1方向
A1:第1方向第1側
A2:第1方向第2側
B:第2方向
H:規定高さ
V1:上方
V2:下方
Claims (6)
- 物品を搬送する搬送車であって、
移動経路に沿って移動する本体部と、前記物品を保持する保持装置と、前記保持装置を前記本体部に対して昇降させる昇降装置と、を備え、
前記物品は、当該物品の底面と平行に配置される面であって、下方を向く被支持面が形成された被保持部を備え、
前記保持装置は、前記被支持面を下方から支持する支持部材がそれぞれ連結された一対の支持部と、一対の前記支持部を第1方向に互いに接近及び離間させる保持駆動部と、を備え、
一対の前記支持部のそれぞれにおいて、前記第1方向における他方の前記支持部に近づく側を第1方向第1側とし、前記第1方向における他方の前記支持部から離れる側を第1方向第2側として、
前記支持部材は、前記支持部との連結部を支点として揺動可能に前記支持部に連結され、
一対の前記支持部材のそれぞれにおける前記連結部とは反対側の先端部が、前記連結部よりも上方であって前記被保持部よりも下方に配置され、且つ、前記被保持部の前記第1方向の幅よりも大きい間隔で配置された一対の前記先端部の間に前記物品が位置する状態を、保持準備状態とし、前記保持準備状態よりも一対の前記支持部が前記第1方向に互いに接近し、一対の前記支持部材のそれぞれの前記先端部又は当該先端部に連結された部材が前記被支持面に対して下方から接して前記物品を支持する状態を保持状態として、
一対の前記支持部材は、前記保持準備状態から前記保持状態に移行する間に、それぞれの前記先端部が、前記第1方向第2側へ移動しつつ上方へ向かう方向に前記支点周りに揺動して、前記被支持面を上方へ持ち上げる、搬送車。 - 平面視で前記第1方向に直交する方向を第2方向として、
前記支持部材は、前記第2方向に離間して配置された一対の揺動部材である第1揺動部材と第2揺動部材とを備え、
前記連結部は、前記第1揺動部材が前記支持部に連結される第1連結部と、前記第2揺動部材が前記支持部に連結される第2連結部と、を備え、
前記第1連結部は、前記第2連結部よりも下方に配置され、
前記第1揺動部材の前記先端部を第1先端部とし、前記第2揺動部材の前記先端部を第2先端部として、
前記第1揺動部材における前記第1連結部から前記第1先端部までの長さは、前記第2揺動部材における前記第2連結部から前記第2先端部までの長さよりも長い、請求項1に記載の搬送車。 - 一対の前記支持部材の一方を第1支持部材とし、一対の前記支持部材の他方を第2支持部材として、前記第1支持部材の前記連結部から前記先端部までの長さは、前記第2支持部材の前記連結部から前記先端部までの長さよりも長い、請求項1に記載の搬送車。
- 平面視で前記第1方向に直交する方向を第2方向として、
前記支持部材は、前記第2方向に離間して配置された一対の揺動部材である第1揺動部材と第2揺動部材とを備え、
前記第1揺動部材の前記先端部を第1先端部とし、前記第2揺動部材の前記先端部を第2先端部として、
前記第1先端部と前記第2先端部とが連結部材により連結され、
前記保持状態において、前記連結部材が前記第2方向に沿って連続的に、又は前記第2方向に沿って並ぶ複数個所で、前記被支持面に接する、請求項1から3のいずれか一項に記載の搬送車。 - 前記先端部が前記第1方向第1側へ移動しつつ下方へ向かって揺動する方向に前記支持部材を付勢する付勢機構と、
前記先端部が前記連結部よりも規定高さ以上上方に配置される範囲内に、前記支持部材の揺動範囲を規制する規制機構と、を備えている、請求項1から4のいずれか一項に記載の搬送車。 - 前記物品は、側面に開口部を有する容器であり、
前記保持装置は、前記開口部が斜め上方を向く姿勢で前記物品を保持する、請求項1から5のいずれか一項に記載の搬送車。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020194359A JP7302579B2 (ja) | 2020-11-24 | 2020-11-24 | 搬送車 |
KR1020210152867A KR20220071902A (ko) | 2020-11-24 | 2021-11-09 | 반송차 |
TW110143397A TW202231559A (zh) | 2020-11-24 | 2021-11-22 | 搬送車 |
CN202111404777.0A CN114538103A (zh) | 2020-11-24 | 2021-11-24 | 搬运车 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020194359A JP7302579B2 (ja) | 2020-11-24 | 2020-11-24 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022083100A JP2022083100A (ja) | 2022-06-03 |
JP7302579B2 true JP7302579B2 (ja) | 2023-07-04 |
Family
ID=81668738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020194359A Active JP7302579B2 (ja) | 2020-11-24 | 2020-11-24 | 搬送車 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7302579B2 (ja) |
KR (1) | KR20220071902A (ja) |
CN (1) | CN114538103A (ja) |
TW (1) | TW202231559A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013045964A (ja) | 2011-08-25 | 2013-03-04 | Sharp Corp | 被処理基板の浸漬処理方法及び浸漬処理装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08188375A (ja) * | 1995-01-04 | 1996-07-23 | Tsubakimoto Chain Co | ワーク搬送用カセットの傾動機構 |
JP5574177B2 (ja) * | 2010-09-16 | 2014-08-20 | 株式会社ダイフク | 搬送装置 |
-
2020
- 2020-11-24 JP JP2020194359A patent/JP7302579B2/ja active Active
-
2021
- 2021-11-09 KR KR1020210152867A patent/KR20220071902A/ko unknown
- 2021-11-22 TW TW110143397A patent/TW202231559A/zh unknown
- 2021-11-24 CN CN202111404777.0A patent/CN114538103A/zh active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013045964A (ja) | 2011-08-25 | 2013-03-04 | Sharp Corp | 被処理基板の浸漬処理方法及び浸漬処理装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20220071902A (ko) | 2022-05-31 |
JP2022083100A (ja) | 2022-06-03 |
CN114538103A (zh) | 2022-05-27 |
TW202231559A (zh) | 2022-08-16 |
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