JP2023052869A5 - - Google Patents

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JP2023052869A5
JP2023052869A5 JP2023014817A JP2023014817A JP2023052869A5 JP 2023052869 A5 JP2023052869 A5 JP 2023052869A5 JP 2023014817 A JP2023014817 A JP 2023014817A JP 2023014817 A JP2023014817 A JP 2023014817A JP 2023052869 A5 JP2023052869 A5 JP 2023052869A5
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objects
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computing system
predicting
deformation
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JP2023052869A (ja
JP7553978B2 (ja
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JP2023014817A 2018-10-19 2023-02-02 基板上の流動的対象を自動的にマッピングするための方法およびシステム Active JP7553978B2 (ja)

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Application Number Priority Date Filing Date Title
US16/164,990 US10481379B1 (en) 2018-10-19 2018-10-19 Method and system for automatically mapping fluid objects on a substrate
US16/164,990 2018-10-19
PCT/US2019/053187 WO2020081211A1 (en) 2018-10-19 2019-09-26 Method and system for automatically mapping fluid objects on a substrate
JP2021521121A JP7226852B2 (ja) 2018-10-19 2019-09-26 基板上の流動的対象を自動的にマッピングするための方法およびシステム

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JP2023052869A JP2023052869A (ja) 2023-04-12
JP2023052869A5 true JP2023052869A5 (https=) 2023-04-19
JP7553978B2 JP7553978B2 (ja) 2024-09-19

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JP2021521121A Active JP7226852B2 (ja) 2018-10-19 2019-09-26 基板上の流動的対象を自動的にマッピングするための方法およびシステム
JP2023014817A Active JP7553978B2 (ja) 2018-10-19 2023-02-02 基板上の流動的対象を自動的にマッピングするための方法およびシステム

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US (5) US10481379B1 (https=)
EP (1) EP3867686B1 (https=)
JP (2) JP7226852B2 (https=)
KR (1) KR102706113B1 (https=)
CN (2) CN117784387A (https=)
TW (2) TWI833822B (https=)
WO (1) WO2020081211A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate
JP7506523B2 (ja) * 2020-05-20 2024-06-26 株式会社エビデント 顕微鏡システム、制御方法、プログラム
CN111766694A (zh) * 2020-07-20 2020-10-13 深圳市创能亿科科技开发有限公司 显微镜切片位置的采集方法和系统
US11556223B2 (en) 2020-08-27 2023-01-17 Ebay Inc. Automatic feedback system using visual interactions
US12266143B2 (en) 2021-04-12 2025-04-01 Kla Corporation Salient feature point based image alignment
CN114047129B (zh) * 2021-11-24 2025-02-07 东莞市东宇阳电子科技发展有限公司 自动拍摄mlcc产品切面图像的装置及方法
EP4197485B1 (en) * 2021-12-20 2024-08-21 3Shape A/S System for scanning multiple dental objects
KR102805720B1 (ko) * 2022-03-15 2025-05-13 중앙대학교 산학협력단 기계학습을 이용한 led칩 유체 자가 배열 장치, 시스템 및 방법

Family Cites Families (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153444A (en) * 1988-12-23 1992-10-06 Hitachi, Ltd. Method and apparatus for detecting patterns
US6292582B1 (en) * 1996-05-31 2001-09-18 Lin Youling Method and system for identifying defects in a semiconductor
JPH10335399A (ja) * 1997-06-03 1998-12-18 Advantest Corp 試料処理装置および方法
JP3371764B2 (ja) * 1997-06-27 2003-01-27 株式会社日立製作所 撮像方法及び装置
US6366357B1 (en) * 1998-03-05 2002-04-02 General Scanning, Inc. Method and system for high speed measuring of microscopic targets
JP2000182066A (ja) * 1998-10-07 2000-06-30 Advantest Corp 画像処理装置
JP3812185B2 (ja) * 1998-12-01 2006-08-23 株式会社日立製作所 欠陥分類方法およびその装置
US7966078B2 (en) * 1999-02-01 2011-06-21 Steven Hoffberg Network media appliance system and method
JP4526661B2 (ja) * 2000-06-28 2010-08-18 株式会社日立製作所 検査装置および検査方法
JP2002076071A (ja) * 2000-08-25 2002-03-15 Matsushita Electric Ind Co Ltd 部品実装部の信頼性評価方法および信頼性評価装置
US7248716B2 (en) * 2001-07-06 2007-07-24 Palantyr Research, Llc Imaging system, methodology, and applications employing reciprocal space optical design
CA2484549A1 (en) * 2002-05-10 2003-11-20 Phase-1 Molecular Toxicology, Inc. Liver inflammation predictive genes
JP2003339659A (ja) * 2002-05-23 2003-12-02 Hitachi Ltd 超電導磁気シールド装置
US9955551B2 (en) * 2002-07-12 2018-04-24 Yechezkal Evan Spero Detector controlled illuminating system
JP4222927B2 (ja) * 2002-09-20 2009-02-12 エーエスエムエル ネザーランズ ビー.ブイ. 少なくとも2波長を使用するリソグラフィ装置用アライメント・システム
US8712118B2 (en) * 2003-04-10 2014-04-29 Carl Zeiss Microimaging Gmbh Automated measurement of concentration and/or amount in a biological sample
TWI254792B (en) * 2003-07-01 2006-05-11 Au Optronics Corp Detecting method and device of laser crystalline silicon
US20050031188A1 (en) * 2003-08-10 2005-02-10 Luu Victor Van Systems and methods for characterizing a sample
JP4842533B2 (ja) * 2004-10-27 2011-12-21 株式会社日立ハイテクノロジーズ 不良検査装置
JP2006238802A (ja) * 2005-03-03 2006-09-14 Olympus Corp 細胞観察装置、細胞観察方法、顕微鏡システム、及び細胞観察プログラム
RU2305270C2 (ru) * 2005-05-18 2007-08-27 Андрей Алексеевич Климов Способ флуоресцентной наноскопии (варианты)
JP4537277B2 (ja) * 2005-07-08 2010-09-01 株式会社日立ハイテクノロジーズ 半導体検査装置
CN101611324B (zh) * 2005-10-18 2012-11-21 Gsi集团公司 利用光学基准的方法和器件
US7676077B2 (en) * 2005-11-18 2010-03-09 Kla-Tencor Technologies Corp. Methods and systems for utilizing design data in combination with inspection data
DE112006003790A5 (de) * 2006-01-04 2008-12-04 Jpk Instruments Ag Verfahren zum Betreiben eines Messsystems mit einem Rastersondenmikroskop und Messsystem
JP4908934B2 (ja) * 2006-06-08 2012-04-04 株式会社日立ハイテクノロジーズ 半導体ウェーハ検査装置および半導体ウェーハ検査方法
US8392418B2 (en) * 2009-06-25 2013-03-05 University Of Tennessee Research Foundation Method and apparatus for predicting object properties and events using similarity-based information retrieval and model
US8396582B2 (en) * 2008-03-08 2013-03-12 Tokyo Electron Limited Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
DE102008041821A1 (de) * 2008-09-04 2010-03-11 Leica Microsystems (Schweiz) Ag Videoadapter für eine Mikroskopkamera
JP2010079221A (ja) * 2008-09-29 2010-04-08 Olympus Corp 生体観察装置
US8373113B2 (en) * 2008-11-05 2013-02-12 Hitachi High-Technologies Corporation Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member
US8488863B2 (en) * 2008-11-06 2013-07-16 Los Alamos National Security, Llc Combinational pixel-by-pixel and object-level classifying, segmenting, and agglomerating in performing quantitative image analysis that distinguishes between healthy non-cancerous and cancerous cell nuclei and delineates nuclear, cytoplasm, and stromal material objects from stained biological tissue materials
JP5301970B2 (ja) * 2008-12-08 2013-09-25 オリンパス株式会社 顕微鏡用デジタルカメラシステム及び顕微鏡システム
JP5152077B2 (ja) * 2009-04-01 2013-02-27 ソニー株式会社 生体像提示装置、生体像提示方法及びプログラム並びに生体像提示システム
US8729470B2 (en) * 2009-06-14 2014-05-20 DLA Instruments Electron microscope with an emitter operating in medium vacuum
US9995766B2 (en) * 2009-06-16 2018-06-12 The Regents Of The University Of California Methods and systems for measuring a property of a macromolecule
JP5091976B2 (ja) * 2010-04-09 2012-12-05 株式会社東芝 映像表示装置、映像表示方法及び映像表示プログラム
EP2617011A1 (en) * 2010-09-14 2013-07-24 Ramot at Tel Aviv University, Ltd. Cell occupancy measurement
JP2012237566A (ja) * 2011-05-10 2012-12-06 Hitachi High-Technologies Corp 欠陥観察方法及びその装置
KR20130035061A (ko) 2011-09-29 2013-04-08 삼성전기주식회사 솔더볼 검사장치
JP5894854B2 (ja) * 2012-05-11 2016-03-30 株式会社日立ハイテクノロジーズ 検査装置
JP5608209B2 (ja) * 2012-11-28 2014-10-15 株式会社日立ハイテクノロジーズ 欠陥レビュー装置
JP6194450B2 (ja) * 2013-04-15 2017-09-13 株式会社メガチップス 状態推定装置、プログラムおよび集積回路
JP6070420B2 (ja) * 2013-05-31 2017-02-01 富士ゼロックス株式会社 画像処理装置及びプログラム
JP2015031831A (ja) * 2013-08-02 2015-02-16 オリンパス株式会社 細胞追跡装置及び方法、細胞追跡プログラム
US9263233B2 (en) * 2013-09-29 2016-02-16 Carl Zeiss Microscopy Gmbh Charged particle multi-beam inspection system and method of operating the same
JP6253368B2 (ja) * 2013-11-25 2017-12-27 キヤノン株式会社 三次元形状計測装置およびその制御方法
US10290092B2 (en) * 2014-05-15 2019-05-14 Applied Materials Israel, Ltd System, a method and a computer program product for fitting based defect detection
WO2015189026A2 (en) * 2014-06-10 2015-12-17 Asml Netherlands B.V. Computational wafer inspection
US10325057B2 (en) * 2015-08-17 2019-06-18 Amber Precision Instruments, Inc. Using computer-aided design layout in scanning system
US10186028B2 (en) * 2015-12-09 2019-01-22 Kla-Tencor Corporation Defect signal to noise enhancement by reducing die to die process noise
JP6643072B2 (ja) * 2015-12-10 2020-02-12 キヤノン株式会社 顕微鏡システムおよびその制御方法
WO2017145172A1 (en) * 2016-02-23 2017-08-31 Sigtuple Technologies Private Limited System and method for extraction and analysis of samples under a microscope
EP3432783B1 (en) * 2016-03-25 2024-02-14 Thorlabs, Inc. Mems tunable vcsel powered swept source oct for 3d metrology applications
US10754334B2 (en) * 2016-05-09 2020-08-25 Strong Force Iot Portfolio 2016, Llc Methods and systems for industrial internet of things data collection for process adjustment in an upstream oil and gas environment
US10085162B2 (en) * 2016-07-22 2018-09-25 Ets-Lindgren, Inc. System and method for over-the-air testing of milli-meter wave and other beamforming technologies
US10239178B2 (en) * 2016-10-17 2019-03-26 Virtek Vision International, ULC Laser projector with dynamically adaptable focus
EP3557521B1 (en) * 2016-12-19 2024-09-25 Kabushiki Kaisha Yaskawa Denki Industrial device image recognition processor and controller
KR102668955B1 (ko) * 2017-02-10 2024-05-23 나노트로닉스 이미징, 인코포레이티드 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬
US10333632B2 (en) * 2017-04-03 2019-06-25 Ets-Lindgren, Inc. Method and system for testing beam forming capabilities of wireless devices
US10311573B2 (en) * 2017-05-02 2019-06-04 Techcyte, Inc. Training and machine learning classification of mold in digital microscopy images
EP3664705A4 (en) * 2017-08-09 2021-09-29 Allen Institute IMAGE PROCESSING SYSTEMS, DEVICES AND METHODS FOR GENERATING AN IMAGE WITH PREDICTIVE MARKING
EP3811287B1 (en) * 2018-06-19 2025-09-17 MetaSystems Hard & Software GmbH System and method for detection and classification of objects of interest in microscope images by supervised machine learning
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate

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