KR102706113B1 - 기판 상의 유동 물체를 자동으로 매핑하기 위한 방법 및 시스템 - Google Patents

기판 상의 유동 물체를 자동으로 매핑하기 위한 방법 및 시스템 Download PDF

Info

Publication number
KR102706113B1
KR102706113B1 KR1020217014781A KR20217014781A KR102706113B1 KR 102706113 B1 KR102706113 B1 KR 102706113B1 KR 1020217014781 A KR1020217014781 A KR 1020217014781A KR 20217014781 A KR20217014781 A KR 20217014781A KR 102706113 B1 KR102706113 B1 KR 102706113B1
Authority
KR
South Korea
Prior art keywords
substrate
location
objects
identification module
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020217014781A
Other languages
English (en)
Korean (ko)
Other versions
KR20210077735A (ko
Inventor
매튜 씨. 풋맨
존 비. 풋맨
존 크룩생크
줄리 올란도
아델 프랑켈
브랜든 스캇
Original Assignee
나노트로닉스 이미징, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나노트로닉스 이미징, 인코포레이티드 filed Critical 나노트로닉스 이미징, 인코포레이티드
Publication of KR20210077735A publication Critical patent/KR20210077735A/ko
Application granted granted Critical
Publication of KR102706113B1 publication Critical patent/KR102706113B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365Control or image processing arrangements for digital or video microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/20Analysis of motion
    • G06T7/246Analysis of motion using feature-based methods, e.g. the tracking of corners or segments
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras
    • G06T7/73Determining position or orientation of objects or cameras using feature-based methods
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/20Image preprocessing
    • G06V10/255Detecting or recognising potential candidate objects based on visual cues, e.g. shapes
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00Scenes; Scene-specific elements
    • G06V20/60Type of objects
    • G06V20/69Microscopic objects, e.g. biological cells or cellular parts
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10056Microscopic image
    • G06T2207/10061Microscopic image from scanning electron microscope
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20081Training; Learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20084Artificial neural networks [ANN]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30004Biomedical image processing
    • G06T2207/30024Cell structures in vitro; Tissue sections in vitro
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30141Printed circuit board [PCB]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Quality & Reliability (AREA)
  • Image Processing (AREA)
  • Microscoopes, Condenser (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR1020217014781A 2018-10-19 2019-09-26 기판 상의 유동 물체를 자동으로 매핑하기 위한 방법 및 시스템 Active KR102706113B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/164,990 US10481379B1 (en) 2018-10-19 2018-10-19 Method and system for automatically mapping fluid objects on a substrate
US16/164,990 2018-10-19
PCT/US2019/053187 WO2020081211A1 (en) 2018-10-19 2019-09-26 Method and system for automatically mapping fluid objects on a substrate

Publications (2)

Publication Number Publication Date
KR20210077735A KR20210077735A (ko) 2021-06-25
KR102706113B1 true KR102706113B1 (ko) 2024-09-12

Family

ID=68536040

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217014781A Active KR102706113B1 (ko) 2018-10-19 2019-09-26 기판 상의 유동 물체를 자동으로 매핑하기 위한 방법 및 시스템

Country Status (7)

Country Link
US (5) US10481379B1 (https=)
EP (1) EP3867686B1 (https=)
JP (2) JP7226852B2 (https=)
KR (1) KR102706113B1 (https=)
CN (2) CN117784387A (https=)
TW (2) TWI833822B (https=)
WO (1) WO2020081211A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate
JP7506523B2 (ja) * 2020-05-20 2024-06-26 株式会社エビデント 顕微鏡システム、制御方法、プログラム
CN111766694A (zh) * 2020-07-20 2020-10-13 深圳市创能亿科科技开发有限公司 显微镜切片位置的采集方法和系统
US11556223B2 (en) 2020-08-27 2023-01-17 Ebay Inc. Automatic feedback system using visual interactions
US12266143B2 (en) 2021-04-12 2025-04-01 Kla Corporation Salient feature point based image alignment
CN114047129B (zh) * 2021-11-24 2025-02-07 东莞市东宇阳电子科技发展有限公司 自动拍摄mlcc产品切面图像的装置及方法
EP4197485B1 (en) * 2021-12-20 2024-08-21 3Shape A/S System for scanning multiple dental objects
KR102805720B1 (ko) * 2022-03-15 2025-05-13 중앙대학교 산학협력단 기계학습을 이용한 led칩 유체 자가 배열 장치, 시스템 및 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050174580A1 (en) 1998-03-05 2005-08-11 Gsi Lumonics Corporation Method and system for high speed measuring of microscopic targets
JP2006238802A (ja) 2005-03-03 2006-09-14 Olympus Corp 細胞観察装置、細胞観察方法、顕微鏡システム、及び細胞観察プログラム
US20100007727A1 (en) 2003-04-10 2010-01-14 Torre-Bueno Jose De La Automated measurement of concentration and/or amount in a biological sample

Family Cites Families (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153444A (en) * 1988-12-23 1992-10-06 Hitachi, Ltd. Method and apparatus for detecting patterns
US6292582B1 (en) * 1996-05-31 2001-09-18 Lin Youling Method and system for identifying defects in a semiconductor
JPH10335399A (ja) * 1997-06-03 1998-12-18 Advantest Corp 試料処理装置および方法
JP3371764B2 (ja) * 1997-06-27 2003-01-27 株式会社日立製作所 撮像方法及び装置
JP2000182066A (ja) * 1998-10-07 2000-06-30 Advantest Corp 画像処理装置
JP3812185B2 (ja) * 1998-12-01 2006-08-23 株式会社日立製作所 欠陥分類方法およびその装置
US7966078B2 (en) * 1999-02-01 2011-06-21 Steven Hoffberg Network media appliance system and method
JP4526661B2 (ja) * 2000-06-28 2010-08-18 株式会社日立製作所 検査装置および検査方法
JP2002076071A (ja) * 2000-08-25 2002-03-15 Matsushita Electric Ind Co Ltd 部品実装部の信頼性評価方法および信頼性評価装置
US7248716B2 (en) * 2001-07-06 2007-07-24 Palantyr Research, Llc Imaging system, methodology, and applications employing reciprocal space optical design
CA2484549A1 (en) * 2002-05-10 2003-11-20 Phase-1 Molecular Toxicology, Inc. Liver inflammation predictive genes
JP2003339659A (ja) * 2002-05-23 2003-12-02 Hitachi Ltd 超電導磁気シールド装置
US9955551B2 (en) * 2002-07-12 2018-04-24 Yechezkal Evan Spero Detector controlled illuminating system
JP4222927B2 (ja) * 2002-09-20 2009-02-12 エーエスエムエル ネザーランズ ビー.ブイ. 少なくとも2波長を使用するリソグラフィ装置用アライメント・システム
TWI254792B (en) * 2003-07-01 2006-05-11 Au Optronics Corp Detecting method and device of laser crystalline silicon
US20050031188A1 (en) * 2003-08-10 2005-02-10 Luu Victor Van Systems and methods for characterizing a sample
JP4842533B2 (ja) * 2004-10-27 2011-12-21 株式会社日立ハイテクノロジーズ 不良検査装置
RU2305270C2 (ru) * 2005-05-18 2007-08-27 Андрей Алексеевич Климов Способ флуоресцентной наноскопии (варианты)
JP4537277B2 (ja) * 2005-07-08 2010-09-01 株式会社日立ハイテクノロジーズ 半導体検査装置
CN101611324B (zh) * 2005-10-18 2012-11-21 Gsi集团公司 利用光学基准的方法和器件
US7676077B2 (en) * 2005-11-18 2010-03-09 Kla-Tencor Technologies Corp. Methods and systems for utilizing design data in combination with inspection data
DE112006003790A5 (de) * 2006-01-04 2008-12-04 Jpk Instruments Ag Verfahren zum Betreiben eines Messsystems mit einem Rastersondenmikroskop und Messsystem
JP4908934B2 (ja) * 2006-06-08 2012-04-04 株式会社日立ハイテクノロジーズ 半導体ウェーハ検査装置および半導体ウェーハ検査方法
US8392418B2 (en) * 2009-06-25 2013-03-05 University Of Tennessee Research Foundation Method and apparatus for predicting object properties and events using similarity-based information retrieval and model
US8396582B2 (en) * 2008-03-08 2013-03-12 Tokyo Electron Limited Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
DE102008041821A1 (de) * 2008-09-04 2010-03-11 Leica Microsystems (Schweiz) Ag Videoadapter für eine Mikroskopkamera
JP2010079221A (ja) * 2008-09-29 2010-04-08 Olympus Corp 生体観察装置
US8373113B2 (en) * 2008-11-05 2013-02-12 Hitachi High-Technologies Corporation Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member
US8488863B2 (en) * 2008-11-06 2013-07-16 Los Alamos National Security, Llc Combinational pixel-by-pixel and object-level classifying, segmenting, and agglomerating in performing quantitative image analysis that distinguishes between healthy non-cancerous and cancerous cell nuclei and delineates nuclear, cytoplasm, and stromal material objects from stained biological tissue materials
JP5301970B2 (ja) * 2008-12-08 2013-09-25 オリンパス株式会社 顕微鏡用デジタルカメラシステム及び顕微鏡システム
JP5152077B2 (ja) * 2009-04-01 2013-02-27 ソニー株式会社 生体像提示装置、生体像提示方法及びプログラム並びに生体像提示システム
US8729470B2 (en) * 2009-06-14 2014-05-20 DLA Instruments Electron microscope with an emitter operating in medium vacuum
US9995766B2 (en) * 2009-06-16 2018-06-12 The Regents Of The University Of California Methods and systems for measuring a property of a macromolecule
JP5091976B2 (ja) * 2010-04-09 2012-12-05 株式会社東芝 映像表示装置、映像表示方法及び映像表示プログラム
EP2617011A1 (en) * 2010-09-14 2013-07-24 Ramot at Tel Aviv University, Ltd. Cell occupancy measurement
JP2012237566A (ja) * 2011-05-10 2012-12-06 Hitachi High-Technologies Corp 欠陥観察方法及びその装置
KR20130035061A (ko) 2011-09-29 2013-04-08 삼성전기주식회사 솔더볼 검사장치
JP5894854B2 (ja) * 2012-05-11 2016-03-30 株式会社日立ハイテクノロジーズ 検査装置
JP5608209B2 (ja) * 2012-11-28 2014-10-15 株式会社日立ハイテクノロジーズ 欠陥レビュー装置
JP6194450B2 (ja) * 2013-04-15 2017-09-13 株式会社メガチップス 状態推定装置、プログラムおよび集積回路
JP6070420B2 (ja) * 2013-05-31 2017-02-01 富士ゼロックス株式会社 画像処理装置及びプログラム
JP2015031831A (ja) * 2013-08-02 2015-02-16 オリンパス株式会社 細胞追跡装置及び方法、細胞追跡プログラム
US9263233B2 (en) * 2013-09-29 2016-02-16 Carl Zeiss Microscopy Gmbh Charged particle multi-beam inspection system and method of operating the same
JP6253368B2 (ja) * 2013-11-25 2017-12-27 キヤノン株式会社 三次元形状計測装置およびその制御方法
US10290092B2 (en) * 2014-05-15 2019-05-14 Applied Materials Israel, Ltd System, a method and a computer program product for fitting based defect detection
WO2015189026A2 (en) * 2014-06-10 2015-12-17 Asml Netherlands B.V. Computational wafer inspection
US10325057B2 (en) * 2015-08-17 2019-06-18 Amber Precision Instruments, Inc. Using computer-aided design layout in scanning system
US10186028B2 (en) * 2015-12-09 2019-01-22 Kla-Tencor Corporation Defect signal to noise enhancement by reducing die to die process noise
JP6643072B2 (ja) * 2015-12-10 2020-02-12 キヤノン株式会社 顕微鏡システムおよびその制御方法
WO2017145172A1 (en) * 2016-02-23 2017-08-31 Sigtuple Technologies Private Limited System and method for extraction and analysis of samples under a microscope
EP3432783B1 (en) * 2016-03-25 2024-02-14 Thorlabs, Inc. Mems tunable vcsel powered swept source oct for 3d metrology applications
US10754334B2 (en) * 2016-05-09 2020-08-25 Strong Force Iot Portfolio 2016, Llc Methods and systems for industrial internet of things data collection for process adjustment in an upstream oil and gas environment
US10085162B2 (en) * 2016-07-22 2018-09-25 Ets-Lindgren, Inc. System and method for over-the-air testing of milli-meter wave and other beamforming technologies
US10239178B2 (en) * 2016-10-17 2019-03-26 Virtek Vision International, ULC Laser projector with dynamically adaptable focus
EP3557521B1 (en) * 2016-12-19 2024-09-25 Kabushiki Kaisha Yaskawa Denki Industrial device image recognition processor and controller
KR102668955B1 (ko) * 2017-02-10 2024-05-23 나노트로닉스 이미징, 인코포레이티드 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬
US10333632B2 (en) * 2017-04-03 2019-06-25 Ets-Lindgren, Inc. Method and system for testing beam forming capabilities of wireless devices
US10311573B2 (en) * 2017-05-02 2019-06-04 Techcyte, Inc. Training and machine learning classification of mold in digital microscopy images
EP3664705A4 (en) * 2017-08-09 2021-09-29 Allen Institute IMAGE PROCESSING SYSTEMS, DEVICES AND METHODS FOR GENERATING AN IMAGE WITH PREDICTIVE MARKING
EP3811287B1 (en) * 2018-06-19 2025-09-17 MetaSystems Hard & Software GmbH System and method for detection and classification of objects of interest in microscope images by supervised machine learning
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050174580A1 (en) 1998-03-05 2005-08-11 Gsi Lumonics Corporation Method and system for high speed measuring of microscopic targets
US20100007727A1 (en) 2003-04-10 2010-01-14 Torre-Bueno Jose De La Automated measurement of concentration and/or amount in a biological sample
JP2006238802A (ja) 2005-03-03 2006-09-14 Olympus Corp 細胞観察装置、細胞観察方法、顕微鏡システム、及び細胞観察プログラム

Also Published As

Publication number Publication date
JP2023052869A (ja) 2023-04-12
US20220276481A1 (en) 2022-09-01
JP7553978B2 (ja) 2024-09-19
JP2022502796A (ja) 2022-01-11
US20200124837A1 (en) 2020-04-23
EP3867686B1 (en) 2025-03-19
US11333876B2 (en) 2022-05-17
WO2020081211A1 (en) 2020-04-23
US10809516B2 (en) 2020-10-20
US11815673B2 (en) 2023-11-14
US12174361B2 (en) 2024-12-24
KR20210077735A (ko) 2021-06-25
CN117784387A (zh) 2024-03-29
US20210026125A1 (en) 2021-01-28
TW202028802A (zh) 2020-08-01
US10481379B1 (en) 2019-11-19
TWI833822B (zh) 2024-03-01
TW202422151A (zh) 2024-06-01
CN112912783B (zh) 2023-05-30
EP3867686A1 (en) 2021-08-25
CN112912783A (zh) 2021-06-04
EP3867686A4 (en) 2022-08-17
US20240160002A1 (en) 2024-05-16
JP7226852B2 (ja) 2023-02-21

Similar Documents

Publication Publication Date Title
KR102706113B1 (ko) 기판 상의 유동 물체를 자동으로 매핑하기 위한 방법 및 시스템
EP3864578B1 (en) Macro inspection systems, apparatus and methods
JP7431458B2 (ja) 超解像イメージングの精度に関するフィードバックを行い、その精度を改善するためのシステム、デバイス、および方法
US11754392B2 (en) Distance determination of a sample plane in a microscope system

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20210517

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20231031

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20240612

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20240909

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20240909

End annual number: 3

Start annual number: 1

PG1601 Publication of registration