TWI833822B - 用於自動映射流動體物體在基板上之方法及系統 - Google Patents

用於自動映射流動體物體在基板上之方法及系統 Download PDF

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Publication number
TWI833822B
TWI833822B TW108137374A TW108137374A TWI833822B TW I833822 B TWI833822 B TW I833822B TW 108137374 A TW108137374 A TW 108137374A TW 108137374 A TW108137374 A TW 108137374A TW I833822 B TWI833822 B TW I833822B
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Prior art keywords
substrate
objects
microscope
recognition module
layout
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TW108137374A
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Chinese (zh)
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TW202028802A (zh
Inventor
馬修 C 樸特曼
強恩 B 樸特曼
約翰 克魯克山
裘莉 奧蘭多
艾戴爾 法蘭科
布蘭登 史考特
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美商奈米創尼克影像公司
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365Control or image processing arrangements for digital or video microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/20Analysis of motion
    • G06T7/246Analysis of motion using feature-based methods, e.g. the tracking of corners or segments
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras
    • G06T7/73Determining position or orientation of objects or cameras using feature-based methods
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/20Image preprocessing
    • G06V10/255Detecting or recognising potential candidate objects based on visual cues, e.g. shapes
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00Scenes; Scene-specific elements
    • G06V20/60Type of objects
    • G06V20/69Microscopic objects, e.g. biological cells or cellular parts
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10056Microscopic image
    • G06T2207/10061Microscopic image from scanning electron microscope
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20081Training; Learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20084Artificial neural networks [ANN]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30004Biomedical image processing
    • G06T2207/30024Cell structures in vitro; Tissue sections in vitro
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30141Printed circuit board [PCB]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Quality & Reliability (AREA)
  • Image Processing (AREA)
  • Microscoopes, Condenser (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
TW108137374A 2018-10-19 2019-10-17 用於自動映射流動體物體在基板上之方法及系統 TWI833822B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/164,990 US10481379B1 (en) 2018-10-19 2018-10-19 Method and system for automatically mapping fluid objects on a substrate
US16/164,990 2018-10-19

Publications (2)

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TW202028802A TW202028802A (zh) 2020-08-01
TWI833822B true TWI833822B (zh) 2024-03-01

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TW108137374A TWI833822B (zh) 2018-10-19 2019-10-17 用於自動映射流動體物體在基板上之方法及系統
TW113103586A TW202422151A (zh) 2018-10-19 2019-10-17 用於自動映射流動體物體在基板上之方法及系統

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US (5) US10481379B1 (https=)
EP (1) EP3867686B1 (https=)
JP (2) JP7226852B2 (https=)
KR (1) KR102706113B1 (https=)
CN (2) CN117784387A (https=)
TW (2) TWI833822B (https=)
WO (1) WO2020081211A1 (https=)

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Publication number Publication date
JP2023052869A (ja) 2023-04-12
US20220276481A1 (en) 2022-09-01
JP7553978B2 (ja) 2024-09-19
JP2022502796A (ja) 2022-01-11
US20200124837A1 (en) 2020-04-23
EP3867686B1 (en) 2025-03-19
US11333876B2 (en) 2022-05-17
WO2020081211A1 (en) 2020-04-23
US10809516B2 (en) 2020-10-20
US11815673B2 (en) 2023-11-14
KR102706113B1 (ko) 2024-09-12
US12174361B2 (en) 2024-12-24
KR20210077735A (ko) 2021-06-25
CN117784387A (zh) 2024-03-29
US20210026125A1 (en) 2021-01-28
TW202028802A (zh) 2020-08-01
US10481379B1 (en) 2019-11-19
TW202422151A (zh) 2024-06-01
CN112912783B (zh) 2023-05-30
EP3867686A1 (en) 2021-08-25
CN112912783A (zh) 2021-06-04
EP3867686A4 (en) 2022-08-17
US20240160002A1 (en) 2024-05-16
JP7226852B2 (ja) 2023-02-21

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