JP2023046270A - 磁気センサ - Google Patents

磁気センサ Download PDF

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Publication number
JP2023046270A
JP2023046270A JP2022139170A JP2022139170A JP2023046270A JP 2023046270 A JP2023046270 A JP 2023046270A JP 2022139170 A JP2022139170 A JP 2022139170A JP 2022139170 A JP2022139170 A JP 2022139170A JP 2023046270 A JP2023046270 A JP 2023046270A
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JP
Japan
Prior art keywords
magnetic sensor
inclined surface
magnetic
lower electrode
sensing element
Prior art date
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Pending
Application number
JP2022139170A
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English (en)
Japanese (ja)
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JP2023046270A5 (https=
Inventor
秀和 小嶋
Hidekazu Kojima
弘道 梅原
Hiromichi Umehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
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TDK Corp
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Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to US17/947,735 priority Critical patent/US11874346B2/en
Priority to CN202211154955.3A priority patent/CN115840176B/zh
Priority to CN202511951484.2A priority patent/CN121805915A/zh
Publication of JP2023046270A publication Critical patent/JP2023046270A/ja
Publication of JP2023046270A5 publication Critical patent/JP2023046270A5/ja
Priority to US18/524,172 priority patent/US12235333B2/en
Priority to US19/026,827 priority patent/US20250155531A1/en
Pending legal-status Critical Current

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  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2022139170A 2021-09-21 2022-09-01 磁気センサ Pending JP2023046270A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US17/947,735 US11874346B2 (en) 2021-09-21 2022-09-19 Magnetic sensor
CN202211154955.3A CN115840176B (zh) 2021-09-21 2022-09-21 磁传感器
CN202511951484.2A CN121805915A (zh) 2021-09-21 2022-09-21 磁传感器
US18/524,172 US12235333B2 (en) 2021-09-21 2023-11-30 Magnetic sensor including magnetic detection element including bottom surface facing inclined surface
US19/026,827 US20250155531A1 (en) 2021-09-21 2025-01-17 Magnetic sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202163246428P 2021-09-21 2021-09-21
US63/246,428 2021-09-21

Publications (2)

Publication Number Publication Date
JP2023046270A true JP2023046270A (ja) 2023-04-03
JP2023046270A5 JP2023046270A5 (https=) 2023-04-18

Family

ID=85777164

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2022139170A Pending JP2023046270A (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139165A Pending JP2023046269A (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139176A Active JP7833374B2 (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139173A Pending JP2023046271A (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139452A Pending JP2023046273A (ja) 2021-09-21 2022-09-01 磁気センサ

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP2022139165A Pending JP2023046269A (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139176A Active JP7833374B2 (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139173A Pending JP2023046271A (ja) 2021-09-21 2022-09-01 磁気センサ
JP2022139452A Pending JP2023046273A (ja) 2021-09-21 2022-09-01 磁気センサ

Country Status (1)

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JP (5) JP2023046270A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023046271A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 磁気センサ

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JP2004128229A (ja) * 2002-10-02 2004-04-22 Nec Corp 磁性メモリ及びその製造方法
JP2005109493A (ja) * 2003-10-01 2005-04-21 Hewlett-Packard Development Co Lp 非対称にパターニングされた磁気メモリ
JP2005167236A (ja) * 2003-11-20 2005-06-23 Headway Technologies Inc 膜面直交電流型巨大磁気抵抗効果センサおよびその製造方法
JP2006194733A (ja) * 2005-01-13 2006-07-27 Yamaha Corp 磁気センサおよびその製法
JP2008309566A (ja) * 2007-06-13 2008-12-25 Yamaha Corp 磁気センサ及びその製造方法
JP2009122041A (ja) * 2007-11-16 2009-06-04 Ricoh Co Ltd 複合センサー
JP2012533188A (ja) * 2009-07-13 2012-12-20 シーゲイト テクノロジー エルエルシー 磁気積層体設計
JP2018181996A (ja) * 2017-04-10 2018-11-15 Tdk株式会社 磁気抵抗効果素子
JP2021085738A (ja) * 2019-11-27 2021-06-03 Tdk株式会社 磁気センサ

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JPH11316919A (ja) * 1998-04-30 1999-11-16 Hitachi Ltd スピントンネル磁気抵抗効果型磁気ヘッド
JP2001056908A (ja) * 1999-08-11 2001-02-27 Nec Corp 磁気抵抗効果素子、磁気抵抗効果ヘッド及び磁気抵抗検出システム並びに磁気記憶システム
JP2002033532A (ja) * 2000-07-17 2002-01-31 Alps Electric Co Ltd トンネル型磁気抵抗効果型素子及びその製造方法
JP3958947B2 (ja) * 2001-09-14 2007-08-15 アルプス電気株式会社 磁気検出素子及びその製造方法
JP3592662B2 (ja) * 2001-09-27 2004-11-24 株式会社東芝 磁気抵抗効果素子及びその製造方法、磁気記録再生装置
JP4012526B2 (ja) * 2004-07-01 2007-11-21 Ｔｄｋ株式会社 薄膜コイルおよびその製造方法、ならびにコイル構造体およびその製造方法
JP4657836B2 (ja) * 2005-07-12 2011-03-23 Ｎｅｃトーキン株式会社 インピーダンス素子を用いた磁性薄膜素子
JP5071042B2 (ja) 2007-10-23 2012-11-14 ヤマハ株式会社 磁気センサ及びその製造方法
US8890266B2 (en) * 2011-01-31 2014-11-18 Everspin Technologies, Inc. Fabrication process and layout for magnetic sensor arrays
US9791523B2 (en) * 2013-03-15 2017-10-17 Fairchild Semiconductor Corporation Magnetic sensor utilizing magnetization reset for sense axis selection
US10164001B1 (en) 2017-09-18 2018-12-25 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure having integrated inductor therein
JP7332738B2 (ja) 2021-07-08 2023-08-23 Tdk株式会社 磁気センサ装置および磁気センサシステム
JP7819065B2 (ja) * 2021-09-21 2026-02-24 Tdk株式会社 磁気センサ
JP2023046259A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 センサ
JP2023046270A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 磁気センサ

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004128229A (ja) * 2002-10-02 2004-04-22 Nec Corp 磁性メモリ及びその製造方法
JP2005109493A (ja) * 2003-10-01 2005-04-21 Hewlett-Packard Development Co Lp 非対称にパターニングされた磁気メモリ
JP2005167236A (ja) * 2003-11-20 2005-06-23 Headway Technologies Inc 膜面直交電流型巨大磁気抵抗効果センサおよびその製造方法
JP2006194733A (ja) * 2005-01-13 2006-07-27 Yamaha Corp 磁気センサおよびその製法
JP2008309566A (ja) * 2007-06-13 2008-12-25 Yamaha Corp 磁気センサ及びその製造方法
JP2009122041A (ja) * 2007-11-16 2009-06-04 Ricoh Co Ltd 複合センサー
JP2012533188A (ja) * 2009-07-13 2012-12-20 シーゲイト テクノロジー エルエルシー 磁気積層体設計
JP2018181996A (ja) * 2017-04-10 2018-11-15 Tdk株式会社 磁気抵抗効果素子
JP2021085738A (ja) * 2019-11-27 2021-06-03 Tdk株式会社 磁気センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023046271A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 磁気センサ
JP2023046272A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 磁気センサ

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JP2023046271A (ja) 2023-04-03
JP2023046272A (ja) 2023-04-03
JP2023046273A (ja) 2023-04-03
JP7833374B2 (ja) 2026-03-19
JP2023046269A (ja) 2023-04-03

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