JP2023036721A5 - - Google Patents

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Publication number
JP2023036721A5
JP2023036721A5 JP2022199852A JP2022199852A JP2023036721A5 JP 2023036721 A5 JP2023036721 A5 JP 2023036721A5 JP 2022199852 A JP2022199852 A JP 2022199852A JP 2022199852 A JP2022199852 A JP 2022199852A JP 2023036721 A5 JP2023036721 A5 JP 2023036721A5
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JP
Japan
Prior art keywords
support table
support
support element
reaction chamber
substrate
Prior art date
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JP2022199852A
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English (en)
Japanese (ja)
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JP7556927B2 (ja
JP2023036721A (ja
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Priority claimed from FI20215556A external-priority patent/FI130021B/en
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Publication of JP2023036721A publication Critical patent/JP2023036721A/ja
Publication of JP2023036721A5 publication Critical patent/JP2023036721A5/ja
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Publication of JP7556927B2 publication Critical patent/JP7556927B2/ja
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JP2022199852A 2021-05-10 2022-12-15 基板処理装置及び方法 Active JP7556927B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20215556 2021-05-10
FI20215556A FI130021B (en) 2021-05-10 2021-05-10 Substrate processing apparatus and method
JP2022071232A JP7197739B2 (ja) 2021-05-10 2022-04-25 基板処理装置及び方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022071232A Division JP7197739B2 (ja) 2021-05-10 2022-04-25 基板処理装置及び方法

Publications (3)

Publication Number Publication Date
JP2023036721A JP2023036721A (ja) 2023-03-14
JP2023036721A5 true JP2023036721A5 (enExample) 2023-04-21
JP7556927B2 JP7556927B2 (ja) 2024-09-26

Family

ID=81654699

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022071232A Active JP7197739B2 (ja) 2021-05-10 2022-04-25 基板処理装置及び方法
JP2022199852A Active JP7556927B2 (ja) 2021-05-10 2022-12-15 基板処理装置及び方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022071232A Active JP7197739B2 (ja) 2021-05-10 2022-04-25 基板処理装置及び方法

Country Status (8)

Country Link
US (1) US12247288B2 (enExample)
EP (1) EP4338191A1 (enExample)
JP (2) JP7197739B2 (enExample)
KR (2) KR102527108B1 (enExample)
CN (2) CN115323356B (enExample)
FI (1) FI130021B (enExample)
TW (1) TWI892012B (enExample)
WO (1) WO2022238622A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI130020B (en) * 2021-05-10 2022-12-30 Picosun Oy Substrate processing apparatus and method

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DE17895903T1 (de) 2017-02-08 2020-01-16 Picosun Oy Abscheidungs- oder Reinigungsvorrichtung mit beweglicher Struktur und Verfahren zum Betrieb
CN111357090B (zh) 2017-11-11 2024-01-05 微材料有限责任公司 用于高压处理腔室的气体输送系统
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JP7403234B2 (ja) * 2019-04-25 2023-12-22 東京エレクトロン株式会社 基板処理装置、及び基板処理方法
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